摘要:
A resonator device having an insulating substrate, a strip-shaped vibrating element which is mounted on said insulating substrate and is provided with driving electrodes formed on the main opposing surfaces of a piezoelectric substrate, and terminal electrodes which are provided on said insulating substrate so as to be electrically connected with said driving electrodes and to which driving signals are applied by an external signal source. At least the longitudinal side portions of said vibrating element are coated with a surface active agent. With such a constitution, fluctuations in resonant resistance which are due to the excitation level can be suppressed, thereby contributing to the stable operation of the device, reducing the number of producing steps, and raising the yield rate in production.
摘要:
A resonator device having an insulating substrate, a strip-shaped vibrating element which is mounted on said insulating substrate and is provided with driving electrodes formed on the main opposing surfaces of a piezoelectric substrate, and terminal electrodes which are provided on said insulating substrate so as to be electrically connected with said driving electrodes and to which driving signals are applied by an external signal source. At least the longitudinal side portions of said vibrating element are coated with a surface active agent. With such a constitution, fluctuations in resonant resistance which are due to the excitation level can be suppressed, thereby contributing to the stable operation of the device, reducing the number of producing steps, and raising the yield rate in production.
摘要:
The substrate for devices 10 comprises an insulating substrate 12 of an insulating material, conducting layers 14 formed on the insulating substrate 12 and opposed to each other at a certain distance, and a dielectric film 16 formed on that portion of the insulating substrate 12 between the conducting layers 14. The substrate 10 incorporates a capacitance constituted by the opposed electric layers 14 and the dielectric film 16. A piezoelectric oscillator 20 is connected to the left and right conducting layers 14b, 14c of the substrate for devices 10. A cap 22 is connected to a boundary part of the substrate 10 through epoxy resin 24. The substrate for devices 10 with a built-in capacitance can reduce fabrication costs of a piezoelectric oscillation device and a surface acoustic wave device.
摘要:
To provide an inertia sensor and a method for reducing an operation error of the inertia sensor, the sensor and the method being configured such that complicated means is not required, and such that, even at the initial use stage in which the temperature characteristic of the sensor is not learned, and even in the case where the sensor is used in an ambient temperature different from the ambient temperature during the previous use of the sensor, an operation error due to an output change caused by a temperature change can be reduced in a relatively simple and highly accurate manner. An inertia sensor 10 is configured by including at least a sensor element 1 for sensing inertia, a signal processing circuit 2, and a memory 3, and is configured such that memory data 8 for estimating a characteristic of the inertia sensor 10 is stored in the memory 3. An angular velocity sensor and an acceleration sensor are included in the category of the inertia sensor 10.
摘要:
An angular velocity sensor includes a vibrator sensing an angular velocity, and a package on which the vibrator is mounted. The vibrator is arranged in a diagonal direction of the package. The angular velocity sensor includes a circuit board that supports the package. The vibrator is attached to the circuit board so that the vibrator is inclined to a vertical direction by a given angle.
摘要:
A piezoelectric vibrator 2 that generates an electric charge according to a stress and a weight 1 provided on the piezoelectric vibrator 2 are included. The piezoelectric vibrator 2 has multiple pairs of sensing electrodes 3a and 3b, and 4a and 4b, and the sensing electrodes 3a and 3b, and 4a and 4b are respectively connected in parallel so that capacitances Cd1 and Cd2 made of the sensing electrodes may be connected in parallel. It is thus possible to double the charge sensitivity with keeping the voltage sensitivity.
摘要:
A tuning-fork vibration gyro including a ferroelectric tuning-fork vibration body generating a plurality of sensor signals and a sensor circuit to which the sensor signals generated by the tuning-fork vibration body are input. The sensor circuit includes a differential amplifier having two input terminals between which the sensor signals are input, and a capacitor being connected between the two input terminals of the differential amplifier.
摘要:
The shape of drive electrodes and/or the shape of detection electrodes of a tuning fork type vibration gyro are made asymmetrical between the inside and outside of the arm, and between the surface and reverse face of the arm, to reduce the abnormal vibration and leaking output. The drive electrodes to be provided on the inside parts of the surface and reverse face of the first arm are formed smaller than the drive electrodes to be provided on the outside parts of the surface and reverse face thereof. The length of the detection electrode to be provided on the outside lateral face of the second arm is formed short. The drive electrodes to be provided on the surface and reverse face of the first arm are extended to the base side from the boundary position between the first arm and the base, and the detection electrodes to be provided on the surface and reverse face of the second arm are extended to the base side from the boundary position between the second arm and the base.
摘要:
A tuning-fork vibratory gyro has first and second arms and a base integrally connected to the first and second arms. The gyro includes drive electrodes used to generate tuning-fork vibrations due to a piezoelectric transversal effect, and detection electrodes provided on the first and second arms and used to output a detection voltage due to an angular velocity.
摘要:
A tuning-fork type piezoelectric vibratory gyroscope includes a tuning fork having two arms and a base portion integrally formed with the two arms and having electrodes, and a supporting base supporting the base portion of the tuning fork. An adhesive layer joins the base portion and the supporting base together so that the tuning fork and the supporting plate are elastically integrated within a temperature range in which the gyroscope is used.