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    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method
    4.
    发明申请
    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method 有权
    氢化开环易位聚合物，包含其的抗蚀剂组合物和图案化方法

    公开(公告)号：US20080085470A1

    公开(公告)日：2008-04-10

    申请号：US11902775

    申请日：2007-09-25

    申请人： Tadahiro Sunaga ,  Yuichi Okawa ,  Takeshi Kinsho ,  Tomohiro Kobayashi

    发明人： Tadahiro Sunaga ,  Yuichi Okawa ,  Takeshi Kinsho ,  Tomohiro Kobayashi

    IPC分类号： G03C5/00 ,  C08G65/00

    CPC分类号： G03F7/0395 ,  C08G61/08 ,  C08G61/12 ,  C08G2261/142 ,  C08G2261/1426 ,  C08G2261/3325 ,  C08G2261/3342 ,  C08G2261/418 ,  C08G2261/72 ,  G03F7/0397 ,  Y10S430/106

    摘要： [Problem] Provided is a resin having an alicyclic structure in a main chain, which is excellent in etching resistance and developing property, a resist composition for exposure with a high energy radiation using the resin, and a method for forming a pattern using the resist composition. [Means to Solve] Also provided is a hydrogenated ring-opening metathesis polymer which is comprised of alicyclic skeleton-containing structural units [A], [B] and a structural unit [C] selected from the following general formula [5] and/or [6]: wherein, e and f represent respectively an integer of 0 to 3, wherein the at least one of X1 of the general formula [1] of the structural unit [A], X of the general formula [3] and X3 of the general formula [4] of the structural unit [B] is —O—, and wherein the molar ratio of the structural units [A], [B] and [C] satisfies simultaneously that [A]/([B]+[C]) is from 20/80 to 98/2, ([A]+[B])/[C] is from 99/1 to 50/50, and ([A]+[C])/[B] is from 99/1 to 21/79. Also, a resist composition comprising the same and a method for forming a pattern are provided.

    摘要翻译： [问题]提供一种主链中具有优异的耐腐蚀性和显影性的具有脂环结构的树脂，使用该树脂用高能量辐射曝光的抗蚀剂组合物，以及使用该抗蚀剂形成图案的方法 组成。 [解决方法]还提供了由含脂环骨架的结构单元[A]，[B]和选自以下通式[5]的结构单元[C]组成的氢化开环易位聚合物和/ 或[6]：其中，e和f分别表示0〜3的整数，其中，结构单元[A]的通式[1]的X 1〜X 1中的至少一个，X 的结构单元[B]的通式[3]和X 3的通式[4]的结构单元[A]，[ B]和[C]同时满足[A] /（[B] + [C]）为20/80〜98/2，（[A] + [B]）/ [C]为99/1 至50/50，（[A] + [C]）/ [B]为99/1〜21/79。 此外，提供了包含该抗蚀剂组合物的抗蚀剂组合物和形成图案的方法。

    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method
    5.
    发明授权
    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method 有权
    氢化开环易位聚合物，包含其的抗蚀剂组合物和图案化方法

    公开(公告)号：US07794915B2

    公开(公告)日：2010-09-14

    申请号：US11902775

    申请日：2007-09-25

    申请人： Tadahiro Sunaga ,  Yuichi Okawa ,  Takeshi Kinsho ,  Tomohiro Kobayashi

    发明人： Tadahiro Sunaga ,  Yuichi Okawa ,  Takeshi Kinsho ,  Tomohiro Kobayashi

    IPC分类号： G03F7/004 ,  G03F7/30 ,  C08F232/08

    CPC分类号： G03F7/0395 ,  C08G61/08 ,  C08G61/12 ,  C08G2261/142 ,  C08G2261/1426 ,  C08G2261/3325 ,  C08G2261/3342 ,  C08G2261/418 ,  C08G2261/72 ,  G03F7/0397 ,  Y10S430/106

    摘要： Provided is a resin having an alicyclic structure in a main chain, which is excellent in etching resistance and developing property, a resist composition for exposure with a high energy radiation using the resin, and a method for forming a pattern using the resist composition.Also provided is a hydrogenated ring-opening metathesis polymer which is comprised of alicyclic skeleton-containing structural units [A], [B] and a structural unit [C] selected from the following general formula [5] and/or [6]: wherein, e and f represent respectively an integer of 0 to 3, wherein the at least one of X1 of the general formula [1] of the structural unit [A], X2 of the general formula [3] and X3 of the general formula [4] of the structural unit [B] is —O—, and wherein the molar ratio of the structural units [A], [B] and [C] satisfies simultaneously that [A]/([B]+[C]) is from 20/80 to 98/2, ([A]+[B])/[C] is from 99/1 to 50/50, and ([A]+[C])/[B] is from 99/1 to 21/79. Also, a resist composition comprising the same and a method for forming a pattern are provided.

    摘要翻译： 本发明提供一种具有优异的耐蚀刻性和显影性的主链中具有脂环结构的树脂，使用该树脂用高能量辐射曝光的抗蚀剂组合物，以及使用该抗蚀剂组合物形成图案的方法。 还提供了一种氢化开环易位聚合物，其由含脂环骨架的结构单元[A]，[B]和选自以下通式[5]和/或[6]的结构单元[C]组成： 其中，e和f分别表示0〜3的整数，式中结构单元[A]的通式[1]的X1，通式[3]的X2和通式 结构单元[B]的[4]为-O-，其中结构单元[A]，[B]和[C]的摩尔比同时满足[A] /（[B] + [C] ）为20/80〜98/2，（[A] + [B]）/ [C]为99/1〜50/50，（[A] + [C]）/ [B] 99/1至21/79。 此外，提供了包含该抗蚀剂组合物的抗蚀剂组合物和形成图案的方法。

    Optical material and molded product thereof
    7.
    发明授权
    Optical material and molded product thereof 有权
    光学材料及其成型体

    公开(公告)号：US09128238B2

    公开(公告)日：2015-09-08

    申请号：US13639124

    申请日：2011-04-04

    申请人： Tadahiro Sunaga ,  Takashi Oda ,  Hirofumi Io ,  Keisuke Kawashima ,  Yasuhiro Koike

    发明人： Tadahiro Sunaga ,  Takashi Oda ,  Hirofumi Io ,  Keisuke Kawashima ,  Yasuhiro Koike

    IPC分类号： C08F32/00 ,  C08F32/08 ,  G02B1/04

    CPC分类号： G02B1/04 ,  C08G2261/3324 ,  C08G2261/3325 ,  C08G2261/418 ,  C08G2261/724 ,  C08L23/18

    摘要： Disclosed is an optical material including a cyclic olefin copolymer containing at least a repeating structural unit [A] represented by the general formula (1) and a repeating structural unit [B] represented by the general formula (2) and having a molar ratio [A]/[B] of from 95/5 to 1/99, wherein the absolute value of the ratio ΔOB/ΔF is from 0.001 to 0.250 in which ΔOB represents the amount of a change in the absolute value of the orientation birefringence calculated from the phase difference (nm) at a wavelength of 633 nm/film thickness (μm) in a stretched film obtained from the optical material, and ΔF represents the amount of a change in the absolute value of the orientation coefficient determined from the dichroic ratio of parallel light intensity I∥ to perpendicular light intensity I⊥, each relative to the orientation direction according to Raman spectroscopy.

    摘要翻译： 公开了包含至少包含由通式（1）表示的重复结构单元[A]和由通式（2）表示的重复结构单元[B]并且具有摩尔比[ A] / [B]为95/5〜1/99，其中，比率＆Dgr; OB /＆Dgr; F的绝对值为0.001〜0.250，其中Dgr; OB表示绝对值的变化量 由从光学材料获得的拉伸膜中的波长633nm /膜厚度（μm）的相位差（nm）计算出的取向双折射，＆Dgr; F表示从光学材料获得的拉伸膜中的 取向系数由平行光强度I∥的二向色度与垂直光强度I⊥确定，各自相对于根据拉曼光谱的取向方向。

    Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same
    8.
    发明授权
    Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same 有权
    氟化环烯烃聚合物，氟化环烯烃单体及其聚合物的制备方法及其用途

    公开(公告)号：US06875819B2

    公开(公告)日：2005-04-05

    申请号：US10312506

    申请日：2002-04-25

    申请人： Tadahiro Sunaga ,  Hiroshi Kouno ,  Kazumori Kawamura ,  Takashi Ochiai ,  Shigeto Shigematsu ,  Takashi Nakano ,  Tomoyuki Morita ,  Yoshihiro Yamamoto ,  Hirofumi Io

    发明人： Tadahiro Sunaga ,  Hiroshi Kouno ,  Kazumori Kawamura ,  Takashi Ochiai ,  Shigeto Shigematsu ,  Takashi Nakano ,  Tomoyuki Morita ,  Yoshihiro Yamamoto ,  Hirofumi Io

    IPC分类号： C08G61/08 ,  C08F8/04

    CPC分类号： C08G61/08

    摘要： The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 μm−1 at 157 nm of ultraviolet rays. wherein R1 to R12 are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; X1 is —CRaRb—, —NRa— or —PRa— (Ra and Rb are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, —O—, —S—, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of R1 to R12 and X1 is fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.

    摘要翻译： 本发明提供一种在不大于193nm的真空紫外区域中具有优异透光性的含氟聚合物，有利地用于制备含氟聚合物的单体，制备含氟聚合物的方法，以及 使用含氟聚合物。 含氟聚合物至少具有由下式（1）表示的重复单元结构，并且在157nm处的紫外线具有不大于3.0μm-1的吸收系数。其中R 1至R“ 12>各自为氟，碳原子数1〜20的含氟烷基等; X 1为-CR a R b - ， - NR a - 或-PR a - （R 5'和R b各自为氟，含氟烷基为 1〜20个碳原子，氢，-O - ， - S-，1〜20个碳原子的烷基等）; R 1至R 12和X 1中的至少一个为氟或含氟基团; n为0或1〜3的整数。

    OPTICAL MATERIAL AND MOLDED PRODUCT THEREOF
    9.
    发明申请
    OPTICAL MATERIAL AND MOLDED PRODUCT THEREOF 有权
    光学材料及其模制产品

    公开(公告)号：US20130030136A1

    公开(公告)日：2013-01-31

    申请号：US13639124

    申请日：2011-04-04

    申请人： Tadahiro Sunaga ,  Takashi Oda ,  Hirofumi Io ,  Keisuke Kawashima ,  Yasuhiro Koike

    发明人： Tadahiro Sunaga ,  Takashi Oda ,  Hirofumi Io ,  Keisuke Kawashima ,  Yasuhiro Koike

    IPC分类号： C08F232/08

    CPC分类号： G02B1/04 ,  C08G2261/3324 ,  C08G2261/3325 ,  C08G2261/418 ,  C08G2261/724 ,  C08L23/18

    摘要： Disclosed is an optical material including a cyclic olefin copolymer containing at least a repeating structural unit [A] represented by the general formula (1) and a repeating structural unit [B] represented by the general formula (2) and having a molar ratio [A]/[B] of from 95/5 to 1/99, wherein the absolute value of the ratio ΔOB/ΔF is from 0.001 to 0.250 in which ΔOB represents the amount of a change in the absolute value of the orientation birefringence calculated from the phase difference (nm) at a wavelength of 633 nm/film thickness (μm) in a stretched film obtained from the optical material, and ΔF represents the amount of a change in the absolute value of the orientation coefficient determined from the dichroic ratio of parallel light intensity I∥ to perpendicular light intensity I⊥, each relative to the orientation direction according to Raman spectroscopy.

    摘要翻译： 公开了一种光学材料，其包括至少含有由通式（1）表示的重复结构单元[A]和由通式（2）表示的重复结构单元[B]并具有摩尔比[ A] / [B]为95/5〜1/99，其中，比率＆Dgr; OB /＆Dgr; F的绝对值为0.001〜0.250，其中Dgr; OB表示绝对值的变化量 由从光学材料获得的拉伸膜中的波长633nm /膜厚度（μm）的相位差（nm）计算出的取向双折射，＆Dgr; F表示从光学材料获得的拉伸膜中的 取向系数由平行光强度I∥的二向色度与垂直光强度I⊥确定，各自相对于根据拉曼光谱的取向方向。

    Hydrogenated ring-opening metathesis copolymer and process for producing the same
    10.
    发明授权
    Hydrogenated ring-opening metathesis copolymer and process for producing the same 有权
    氢化开环易位共聚物及其制备方法

    公开(公告)号：US06800720B2

    公开(公告)日：2004-10-05

    申请号：US10009565

    申请日：2002-03-28

    申请人： Yoshihiro Yamamoto ,  Tadahiro Sunaga ,  Tetsuya Hamada ,  Keiichi Ikeda ,  Ritsuko Shibahara ,  Hirofumi Io ,  Takashi Ochiai

    发明人： Yoshihiro Yamamoto ,  Tadahiro Sunaga ,  Tetsuya Hamada ,  Keiichi Ikeda ,  Ritsuko Shibahara ,  Hirofumi Io ,  Takashi Ochiai

    IPC分类号： C08G6502

    CPC分类号： C08G61/06 ,  C08G61/02 ,  C08G61/08 ,  G03F7/0395 ,  G03F7/0397

    摘要： A hydrogenated ring-opening metathesis polymer which contains at least a structural unit [B] of the following general formula [3] and/or a structural unit [C] of the following general formula [4]: wherein, R8 to R11 and R13 to R16 each independently represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, and X2s and X3s are the same or different and represent —O— or —CR122— wherein, R12 represents a hydrogen atom or a linear or branched alkyl group having 1 to 10 carbon atoms). One of Y1 and Y2 represents —(C═O)— and the other of Y1 and Y2 represents —CR182— wherein, R18 represents a hydrogen atom or a linear or branched alkyl group having 1 to 10 carbon atoms and m and n represent an integer of 0 or 1 to 3.

    摘要翻译： 含有至少下述通式[3]的结构单元[B]和/或下述通式[4]的结构单元[C]的氢化开环易位聚合物：其中R 8〜 R 11和R 13〜R 16各自独立地表示氢原子或具有1〜10个碳原子的直链，支链或环状烷基，X 2和X 3分别为 相同或不同，表示-O-或-CR 12 - ，其中R 12表示氢原子或具有1至10个碳原子的直链或支链烷基）。 Y 1和Y 2中的一个表示 - （C = O） - ，Y 1和Y 2中的另一个表示-CR 18 2-，其中R 18表示氢原子 或具有1〜10个碳原子的直链或支链烷基，m和n表示0或1〜3的整数。