公开(公告)号：US07408688B2

公开(公告)日：2008-08-05

申请号：US11265206

申请日：2005-11-03

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/08

CPC分类号： G09G3/346 ,  G02B26/0841 ,  G09G3/2014 ,  G09G2300/0857 ,  G09G2310/0262

摘要： A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

摘要翻译： 公开了一种用于驱动光学偏转装置阵列的方法，包括在一系列用于光偏转操作的处理中，至少第一级写入和记录数据的状态，用于指示板构件倾斜方向在 第一倾斜方向或第二倾斜方向，形成在所述多个光学偏转装置中的每一个正下方或相邻的半导体存储器件中; 第二级的状态基于数据的指示，并且偏转光，将任意的光学偏转装置的板构件的倾斜方向切换到第一倾斜方向; 以及第三级的状态，根据数据的指示和偏转光将任意光学偏转装置的板状部件的倾斜方向切换到第二倾斜方向。

公开(公告)号：US07480090B2

公开(公告)日：2009-01-20

申请号：US11582995

申请日：2006-10-19

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： An optical deflecting device includes a plate-like member having a light reflective area and a conductor layer. The plate-like member rotates with substantially the middle portion thereof made a fulcrum to change an inclination direction thereof and thereby a reflection direction of a light flux incident to the light reflective area is changed. A first electrode group and a second electrode group are arranged so as to oppose the conductor layer of the plate-like member, respectively, and to sandwich a position corresponding to a position of the fulcrum of the plate-like member. Each electrode group includes a control electrode controlling starting of the plate-like member and a drive electrode driving the plate-like member.

摘要翻译： 光学偏转装置包括具有光反射区域和导体层的板状构件。 板状构件以其大致中部旋转，作为支点而改变其倾斜方向，从而改变入射到光反射区域的光束的反射方向。 第一电极组和第二电极组分别布置成与板状构件的导体层相对，并且夹持与板状构件的支点的位置相对应的位置。 每个电极组包括控制板状构件起动的控制电极和驱动板状构件的驱动电极。

公开(公告)号：US07607786B2

公开(公告)日：2009-10-27

申请号：US11406372

申请日：2006-04-19

申请人： Takeshi Nanjyo ,  Seiichi Katoh ,  Koichi Ohtaka

发明人： Takeshi Nanjyo ,  Seiichi Katoh ,  Koichi Ohtaka

IPC分类号： G03B21/28 ,  G03B21/26 ,  G02B7/182

CPC分类号： H04N5/7441 ,  G02B26/0841 ,  G03B21/008 ,  H04N9/3105

摘要： A light deflector includes a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member and the stopper, the plate-shaped member having a light reflection area, no fixed end, and a conductive layer; and a plurality of electrodes provided on the substrate, the electrodes facing the conductive layer of the plate-shaped member.

摘要翻译： 光偏转器包括基板; 设置在所述基板的边缘部分的多个控制构件，所述控制构件具有止动件所在的上部; 支撑构件，其设置在所述基板的上表面上，所述支点构件具有顶部; 可移动地设置在由基板，支点构件和止挡件形成的空间中的板状构件，所述板状构件具有光反射区域，无固定端和导电层; 以及设置在基板上的多个电极，电极面对板状部件的导电层。

公开(公告)号：US07349145B2

公开(公告)日：2008-03-25

申请号：US11255112

申请日：2005-10-21

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/00 ,  G02B26/08 ,  G02B6/00

CPC分类号： G02B26/0841

摘要： An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a plurality of electrodes. The plurality of regulating members, the fulcrum member, and the plurality of electrodes are provided on the substrate, with the plate member approximately opposite to the plurality of electrodes and movable in a space formed by the substrate, the fulcrum member, and the stoppers. The plate member includes unfixed edge portions, a light reflecting region, and a conductive layer electrically connected to the fulcrum member. By fixing at least a part of the plurality of electrodes to predetermined potentials and changing a potential of the fulcrum member, the plate member is displaced around the fulcrum member by electrostatic attraction force, and a light incident in the light reflecting region in a direction is deflected and reflected in another direction.

摘要翻译： 光学偏转装置包括：基板; 多个调节构件，包括包括止动件的上部部分; 用作电极的支点构件; 板材; 和多个电极。 多个调节构件，支点构件和多个电极设置在基板上，其中板构件与多个电极大致相反，并且可在由基板，支点构件和止挡件形成的空间中移动。 板构件包括未固定的边缘部分，光反射区域和电连接到支点构件的导电层。 通过将多个电极的至少一部分固定到预定电位并改变支点构件的电位，板构件通过静电吸引力在支点构件周围移动，并且沿着一个方向入射到光反射区域的光是 偏转并反射在另一个方向。

公开(公告)号：US20070091416A1

公开(公告)日：2007-04-26

申请号：US11582995

申请日：2006-10-19

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： An optical deflecting device includes a plate-like member having a light reflective area and a conductor layer. The plate-like member rotates with substantially the middle portion thereof made a fulcrum to change an inclination direction thereof and thereby a reflection direction of a light flux incident to the light reflective area is changed. A first electrode group and a second electrode group are arranged so as to oppose the conductor layer of the plate-like member, respectively, and to sandwich a position corresponding to a position of the fulcrum of the plate-like member. Each electrode group includes a control electrode controlling starting of the plate-like member and a drive electrode driving the plate-like member.

摘要翻译： 光学偏转装置包括具有光反射区域和导体层的板状构件。 板状构件以其大致中部旋转，作为支点而改变其倾斜方向，从而改变入射到光反射区域的光束的反射方向。 第一电极组和第二电极组分别布置成与板状构件的导体层相对，并且夹持与板状构件的支点的位置相对应的位置。 每个电极组包括控制板状构件起动的控制电极和驱动板状构件的驱动电极。

公开(公告)号：US20060103912A1

公开(公告)日：2006-05-18

申请号：US11255112

申请日：2005-10-21

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/00 ,  G02F1/03

CPC分类号： G02B26/0841

摘要： An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a plurality of electrodes. The plurality of regulating members, the fulcrum member, and the plurality of electrodes are provided on the substrate, with the plate member approximately opposite to the plurality of electrodes and movable in a space formed by the substrate, the fulcrum member, and the stoppers. The plate member includes unfixed edge portions, a light reflecting region, and a conductive layer electrically connected to the fulcrum member. By fixing at least a part of the plurality of electrodes to predetermined potentials and changing a potential of the fulcrum member, the plate member is displaced around the fulcrum member by electrostatic attraction force, and a light incident in the light reflecting region in a direction is deflected and reflected in another direction.

摘要翻译： 光学偏转装置包括：基板; 多个调节构件，包括包括止动件的上部部分; 用作电极的支点构件; 板材; 和多个电极。 多个调节构件，支点构件和多个电极设置在基板上，其中板构件与多个电极大致相反，并且可在由基板，支点构件和止挡件形成的空间中移动。 板构件包括未固定的边缘部分，光反射区域和电连接到支点构件的导电层。 通过将多个电极的至少一部分固定到预定电位并改变支点构件的电位，板构件通过静电吸引力在支点构件周围移动，并且沿着一个方向入射到光反射区域的光是 偏转并反射在另一个方向。

公开(公告)号：US08014058B2

公开(公告)日：2011-09-06

申请号：US12146067

申请日：2008-06-25

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/12 ,  G02B26/00

CPC分类号： G09G3/346 ,  G02B26/0841 ,  G09G3/2014 ,  G09G2300/0857 ,  G09G2310/0262

摘要： A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

摘要翻译： 公开了一种用于驱动光学偏转装置阵列的方法，包括在一系列用于光偏转操作的处理中，至少第一级写入和记录数据的状态，用于指示板构件倾斜方向在 第一倾斜方向或第二倾斜方向，形成在所述多个光学偏转装置中的每一个正下方或相邻的半导体存储器件中; 第二级的状态基于数据的指示，并且偏转光，将任意的光学偏转装置的板构件的倾斜方向切换到第一倾斜方向; 以及第三级的状态，根据数据的指示和偏转光将任意光学偏转装置的板状部件的倾斜方向切换到第二倾斜方向。

公开(公告)号：US20070206268A1

公开(公告)日：2007-09-06

申请号：US11681021

申请日：2007-03-01

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/00 ,  A61B3/00

CPC分类号： G02B26/0841

摘要： Bearing portions having an approximately arc shape are provided on a lower surface of a plate-shaped member. In the bearing portions, stoppers of a regulating member are embedded. With the engagement of the lower surface of the plate-shaped member and the apex of a pivot member and the engagement of an inner surface of the bearing portions and a lower surface of the stoppers, the plate-shaped member is rotatably supported with the apex of the pivot member as a center. With a side surface of the regulating member 109 facing a side surface of the bearing portions, the position of the plate-shaped member in a rotation axis direction is regulated.

摘要翻译： 具有大致圆弧形状的轴承部分设置在板状构件的下表面上。 在轴承部中嵌入有限制部件的止动件。 通过板状构件的下表面和枢转构件的顶点的接合以及支承部分的内表面和止动件的下表面的接合，板形构件可旋转地支撑有顶点 枢轴构件为中心。 在调节构件109的面对轴承部的侧面的侧面，限制板状构件在旋转轴方向上的位置。

公开(公告)号：US20060109539A1

公开(公告)日：2006-05-25

申请号：US11265206

申请日：2005-11-03

申请人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

发明人： Seiichi Katoh ,  Takeshi Nanjyo ,  Koichi Ohtaka

IPC分类号： G02B26/00

CPC分类号： G09G3/346 ,  G02B26/0841 ,  G09G3/2014 ,  G09G2300/0857 ,  G09G2310/0262

摘要： A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

摘要翻译： 公开了一种用于驱动光学偏转装置阵列的方法，包括在一系列用于光偏转操作的处理中，至少第一级写入和记录数据的状态，用于指示板构件倾斜方向在 第一倾斜方向或第二倾斜方向，形成在所述多个光学偏转装置中的每一个正下方或相邻的半导体存储器件中; 第二级的状态基于数据的指示，并且偏转光，将任意的光学偏转装置的板构件的倾斜方向切换到第一倾斜方向; 以及第三级的状态，根据数据的指示和偏转光将任意光学偏转装置的板状部件的倾斜方向切换到第二倾斜方向。

公开(公告)号：US07777935B2

公开(公告)日：2010-08-17

申请号：US11776305

申请日：2007-07-11

申请人： Takeshi Nanjyo ,  Seiichi Katoh ,  Koichi Ohtaka

发明人： Takeshi Nanjyo ,  Seiichi Katoh ,  Koichi Ohtaka

IPC分类号： G02B26/00 ,  G02B26/12 ,  G02F1/1335 ,  G02F1/1343

CPC分类号： G02B26/0841 ,  G02B26/101

摘要： An actuator is disclosed that has a contacting part smaller than a processing limit of a lithography technique, and is able to reduce a contacting area or a contacting length of the contacting part during operation, reduce a sticking force induced by contact, and decrease a driving voltage of the actuator. The actuator includes an operating part and a contacting part in contact with the operating part. The contacting part is formed by overlapping a first pattern on an end of a second pattern. The first pattern has a solid structure and the size of an upper portion of the solid structure of the first pattern on the second pattern is less than a processing resolving power or resolution.

摘要翻译： 公开了一种致动器，其具有小于光刻技术的加工极限的接触部分，并且能够在操作期间减小接触部件的接触面积或接触长度，减少由接触引起的粘附力并减小驱动 执行器的电压。 致动器包括与操作部件接触的操作部件和接触部件。 接触部分通过在第二图案的端部上重叠第一图案而形成。 第一图案具有固体结构，并且第二图案上的第一图案的实心结构的上部的尺寸小于处理分辨率或分辨率。