公开(公告)号：US20070180909A1

公开(公告)日：2007-08-09

申请号：US11655576

申请日：2007-01-19

申请人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

发明人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

IPC分类号： G01P9/04 ,  G01P1/04

CPC分类号： G01P15/125 ,  G01C19/56 ,  G01P15/18 ,  G01P2015/0842

摘要： An angular velocity sensor amplifies a plurality of detection signals using one amplifying circuit and properly separates these detection signals after amplification. The angular velocity sensor detects displacements of a mass in the respective axial directions using an x-axis detection circuit, a y-axis detection circuit and a z-axis detection circuit respectively. A carrier wave which has a phase thereof shifted from a phase of a carrier wave of the z-axis detection circuit by 90° is applied to the x-axis detection circuit and the y-axis detection circuit, wherein the application of the carrier wave to the x-axis detection circuit and the y-axis detection circuit is performed by switching based on a clock signals. Outputs of the respective axis detection circuits are collectively inputted to a current/voltage conversion circuit. An output signal of the current/voltage conversion circuit is inputted to three synchronous detection circuits, and an x-axis detection signal component, a y-axis detection signal component and a z-axis detection signal component are separated in the respective synchronous detection circuits. In the synchronous detection circuits, by applying phase division processing to the combined signal, the z-axis detection signal component is separated from cross axis detection signal components and, further, by applying time division processing to the signal components based on switching timing of the carrier wave, the x-axis detection signal component and the y-axis detection signal component are separated from each other.

摘要翻译： 角速度传感器使用一个放大电路放大多个检测信号，并在放大后适当地分离这些检测信号。 角速度传感器分别使用x轴检测电路，y轴检测电路和z轴检测电路来检测各轴向的质量位移。 将具有从z轴检测电路的载波相位偏移90°的相位的载波施加到x轴检测电路和y轴检测电路，其中载波的应用 并且通过基于时钟信号的切换来执行y轴检测电路。 各轴检测电路的输出被共同地输入到电流/电压转换电路。 电流/电压转换电路的输出信号被输入到三个同步检测电路，并且在各个同步检测电路中分离x轴检测信号分量，y轴检测信号分量和z轴检测信号分量 。 在同步检测电路中，通过对组合信号进行相位分割处理，将z轴检测信号分量与交叉轴检测信号分量分离，并且通过对基于信号分量的切换定时对信号分量进行时分处理 载波，x轴检测信号分量和y轴检测信号分量彼此分离。

公开(公告)号：US07886597B2

公开(公告)日：2011-02-15

申请号：US11703017

申请日：2007-02-06

申请人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

发明人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

IPC分类号： G01P9/04 ,  G01P15/125

CPC分类号： G01P15/18 ,  G01C19/56 ,  G01P1/023 ,  G01P15/125 ,  G01P2015/0842

摘要： A dynamic amount sensor has a detecting circuit that detects a change in an electrostatic capacitance of each of electrostatic capacitance elements comprised of a movable electrode and a fixed electrode. A switching circuit switches the detecting circuit to first and second connecting states that detect changes in the electrostatic capacitance of the electrostatic capacitance elements in accordance with a change in an attitude of the movable electrode in corresponding first and second detecting axes directions. In the first and second connecting states, the detecting circuit includes circuits formed by connecting the electrostatic capacitance elements in series which change electrostatic capacitances symmetrically along with inclination of the movable electrode in the corresponding first and second detecting axes directions. A carrier wave applying circuit applies carrier waves whose phases are inverted from each other by 180° to the electrostatic capacitance elements which are connected in series in the first and second connecting states of the detecting circuit.

摘要翻译： 动态量传感器具有检测电路，其检测由可动电极和固定电极构成的每个静电电容元件的静电电容的变化。 切换电路将检测电路切换到根据在相应的第一和第二检测轴方向上的可动电极的姿态的变化来检测静电电容元件的静电电容的变化的第一和第二连接状态。 在第一和第二连接状态下，检测电路包括通过串联连接静电电容元件而形成的电路，该静电电容元件随着可移动电极在相应的第一和第二检测轴方向上的倾斜度对称地改变静电电容。 载波施加电路将相位相互反转180°的载波与在检测电路的第一和第二连接状态下串联连接的静电电容元件。

公开(公告)号：US07444870B2

公开(公告)日：2008-11-04

申请号：US11655576

申请日：2007-01-19

申请人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

发明人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

IPC分类号： G01P9/04

CPC分类号： G01P15/125 ,  G01C19/56 ,  G01P15/18 ,  G01P2015/0842

摘要： An angular velocity sensor amplifies a plurality of detection signals using one amplifying circuit and separates these detection signals after amplification. The angular velocity sensor detects displacements of a mass in the axial directions using x-, y- and z-axis detection circuits. A carrier wave whose phase is shifted 90° from that of a carrier wave of the z-axis detection circuit is applied to the x- and y-axis detection circuits and outputs of the axis detection circuits are collectively inputted to a current/voltage conversion circuit which outputs a combined signal to three synchronous detection circuits that separate the signal into x-, y- and z-axis detection signal components. In the synchronous detection circuits, by applying phase division processing to the combined signal, the z-axis detection signal component is separated from cross axis detection signal components and by applying time division processing to the signal components based on switching timing of the carrier wave, the x- and y-axis detection signal components are separated from each other.

摘要翻译： 角速度传感器使用一个放大电路放大多个检测信号，并在放大后分离这些检测信号。 角速度传感器使用x轴，y轴和z轴检测电路检测轴向质量的位移。 将与z轴检测电路的载波相位偏移90°的载波施加到x轴检测电路和y轴检测电路，并将轴检测电路的输出集中输入到电流/电压转换 将组合信号输出到将信号分离成x轴，y轴和z轴检测信号分量的三个同步检测电路的电路。 在同步检测电路中，通过对组合信号进行相位分割处理，将z轴检测信号分量与交叉轴检测信号分量分离，并且通过基于载波的切换定时对信号分量进行时分处理， x轴和y轴检测信号分量彼此分离。

公开(公告)号：US20070240509A1

公开(公告)日：2007-10-18

申请号：US11703017

申请日：2007-02-06

申请人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

发明人： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

IPC分类号： G01P15/125

CPC分类号： G01P15/18 ,  G01C19/56 ,  G01P1/023 ,  G01P15/125 ,  G01P2015/0842

摘要： It is an object of the invention to promote a detection sensitivity by effectively utilizing an arranged fixed electrode. Inclinations in x-axis and y-axis directions of a mass are detected in a two-axis detecting circuit. The two-axis detecting circuit is constituted by fixed electrodes having both of an x-axis detecting circuit function and a y-axis detecting circuit function and also having functions for detecting displacements in an x-axis direction and a y-axis direction. The two-axis detecting circuit switches the x-axis detecting circuit function and the y-axis detecting circuit function by switching wirings in the circuit by way of a switching circuit. Switching of a wiring state of the two-axis detecting circuit is carried out at each constant period based on a timing of a specific clock signal. In this way, the fixed electrodes can be used in both of the two circuit functions, and therefore, components in respective axes directions of an angular velocity can be detected based on a total sum of electrode sensitivities of the fixed electrodes. Thereby, a detection sensitivity can be promoted without increasing a sensor size, or increasing electrodes for detection.

摘要翻译： 本发明的目的是通过有效利用布置的固定电极来提高检测灵敏度。 在双轴检测电路中检测质量的x轴方向和y轴方向的倾斜度。 双轴检测电路由具有x轴检测电路功能和y轴检测电路功能的固定电极构成，并且还具有用于检测x轴方向和y轴方向的位移的功能。 双轴检测电路通过切换电路切换电路中的布线来切换x轴检测电路功能和y轴检测电路功能。 基于特定时钟信号的定时，以每个恒定周期进行双轴检测电路的布线状态的切换。 以这种方式，固定电极可以用于两个电路功能中，因此可以基于固定电极的电极灵敏度的总和来检测角速度的各轴方向上的分量。 因此，可以在不增加传感器尺寸或增加用于检测的电极的情况下促进检测灵敏度。

公开(公告)号：US20070051182A1

公开(公告)日：2007-03-08

申请号：US11515649

申请日：2006-09-05

申请人： Akira Egawa ,  Mitsuo Yarita ,  Takeshi Uchiyama

发明人： Akira Egawa ,  Mitsuo Yarita ,  Takeshi Uchiyama

IPC分类号： G01B7/16

CPC分类号： G01P15/123 ,  G01P15/0922 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/084

摘要： Detection accuracy of a sensor is improved by reducing an influence of an exogenous noise. Acceleration acting on an object is detected based on a change of posture of a mass part supported by a flexible substrate. The flexible substrate is fixed at a frame and the mass part is fixed by soldering at the center thereof. When a force such as acceleration acts on the mass part, the posture of the mass part changes and the flexible substrate also becomes deformed. The change of posture of the mass part and the deformation of the flexible substrate are detected based on the amount of change of a circuit constant of a piezoresistive element as a detecting element provided at a beam part. A signal processing circuit for processing a signal detected by the detecting element is formed on an IC chip, by which the mass part is configured. Configuration of the mass part by the IC chip makes, it possible to configure so that a distance between the signal processing circuit and the detecting element can be short and to reduce an influence of an exogenous noise.

摘要翻译： 通过减少外来噪声的影响，提高了传感器的检测精度。 基于由柔性基板支撑的质量部件的姿势的变化来检测作用在物体上的加速度。 柔性基板固定在框架上，质量部分通过焊接在其中心固定。 当诸如加速度的力作用在质量部分上时，质量部分的姿态改变，并且柔性基板也变形。 基于作为设置在梁部的检测元件的压阻元件的电路常数的变化量来检测质量部分的姿态变化和柔性基板的变形。 在IC芯片上形成用于处理由检测元件检测出的信号的信号处理电路，通过该IC芯片构成质量部。 通过IC芯片构成质量部件，可以构成为使信号处理电路与检测元件之间的距离短，能够减少外部噪声的影响。

公开(公告)号：US20050242413A1

公开(公告)日：2005-11-03

申请号：US11099163

申请日：2005-04-05

申请人： Mitsuo Yarita ,  Minoru Sudou ,  Kenji Kato

发明人： Mitsuo Yarita ,  Minoru Sudou ,  Kenji Kato

IPC分类号： G01C19/56 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC分类号： G01C19/56 ,  G01P15/125

摘要： A capacitive dynamic quantity sensor whose size is small and whose reliability and mass productivity are high is provided. In order to realize signal transmission from a lower electrode to an upper electrode, silicon columns which are electrically isolated from one another but not mechanically isolated from one another are formed to connect both electrodes.

摘要翻译： 提供尺寸小，可靠性和批量生产率高的电容式动态量传感器。 为了实现从下电极到上电极的信号传输，形成彼此电隔离但不机械隔离的硅柱，以连接两个电极。

公开(公告)号：US07225675B2

公开(公告)日：2007-06-05

申请号：US10920017

申请日：2004-08-17

申请人： Kenji Kato ,  Minoru Sudo ,  Mitsuo Yarita

发明人： Kenji Kato ,  Minoru Sudo ,  Mitsuo Yarita

IPC分类号： G01P15/125

CPC分类号： G01C19/5719 ,  G01P15/125 ,  G01P2015/084

摘要： A capacitance type dynamic quantity sensor has a first substrate, a second substrate disposed over the first substrate, and first and second electrodes each disposed on a main surface of a respective one of the first and second substrates. Each of the first and second electrodes has through-holes formed in a portion thereof. A third substrate is disposed between and connected to the main surface of each of the first and second substrates. A vibration member is mounted on the third substrate so as to confront the first and second electrodes with gaps therebetween. The vibration member is mounted on the third substrate to undergo vibrational movement in response to application of an acceleration or an angular velocity to the vibration member so that the capacitance type dynamic quantity sensor detects a dynamic quantity in accordance with a change in capacitance between the first and second electrodes due to vibrational movement of the vibration member.

摘要翻译： 电容型动态量传感器具有第一基板，设置在第一基板上的第二基板，以及各自设置在第一基板和第二基板的相应一个的主表面上的第一电极和第二电极。 第一和第二电极中的每一个具有形成在其一部分中的通孔。 第三基板设置在第一和第二基板中的每一个的主表面上并连接到第一基板和第二基板。 振动部件安装在第三基板上，以便与第一和第二电极之间的间隙相对。 响应于对振动构件施加加速度或角速度，振动构件安装在第三基板上以进行振动运动，使得电容式动态量传感器根据第一 以及由于振动构件的振动而引起的第二电极。

公开(公告)号：US06464406B1

公开(公告)日：2002-10-15

申请号：US09526147

申请日：2000-03-15

申请人： Mitsuo Yarita ,  Masahiro Nakajima ,  Hiroyuki Tokita ,  Junji Taira

发明人： Mitsuo Yarita ,  Masahiro Nakajima ,  Hiroyuki Tokita ,  Junji Taira

IPC分类号： G02B638

CPC分类号： G02B6/3825

摘要： A universal optical connector adapter that can be used to connect optical connector plugs of the same or different types having ferrules fixed at ends of optical fibers. The universal adapter has first and second housings each having at one end a coupling portion for detachably coupling with an optical connector plug of a given type and on an opposite end a base plate having a reference plane. A cylindrical coupling member is rotatably held inward of the coupling portion of the first housing and incorporates a sleeve for fitting ferrules into opposite sides thereof. A male thread is provided on an outer periphery of the coupling cylindrical member and a female thread is provided in the coupling portion of the second housing on a side opposite to that in which an optical connector plug is coupled. The female thread is removably couplable with the male thread. The first and second housings can be coupled together so that the reference planes are closely contacted and the male thread and female thread are removable.

摘要翻译： 一种通用光学连接器适配器，可用于连接相同或不同类型的光纤连接器插头，其具有固定在光纤端部的套圈。 通用适配器具有第一和第二壳体，每个壳体的一端具有用于与给定类型的光学连接器插头可拆卸地联接的连接部分，并且在相对端部具有参考平面的基板。 圆柱形联接构件可旋转地保持在第一壳体的联接部分的内侧，并且包括用于将套圈配合到其相对侧中的套筒。 外螺纹设置在联接圆柱形构件的外周上，并且阴螺纹设置在第二壳体的联接部分的与光连接器插头连接的相反侧的一侧。 内螺纹与外螺纹可拆卸地连接。 第一和第二壳体可以联接在一起，使得参考平面紧密接触并且外螺纹和阴螺纹是可移除的。

公开(公告)号：US07294895B2

公开(公告)日：2007-11-13

申请号：US11099163

申请日：2005-04-05

申请人： Mitsuo Yarita ,  Minoru Sudou ,  Kenji Kato

发明人： Mitsuo Yarita ,  Minoru Sudou ,  Kenji Kato

IPC分类号： H01L29/82

CPC分类号： G01C19/56 ,  G01P15/125

摘要： A capacitive dynamic quantity sensor whose size is small and whose reliability and mass productivity are high is provided. In order to realize signal transmission from a lower electrode to an upper electrode, silicon columns which are electrically isolated from one another but not mechanically isolated from one another are formed to connect both electrodes.

摘要翻译： 提供尺寸小，可靠性和批量生产率高的电容式动态量传感器。 为了实现从下电极到上电极的信号传输，形成彼此电隔离但不机械隔离的硅柱，以连接两个电极。

公开(公告)号：US07224193B2

公开(公告)日：2007-05-29

申请号：US11127017

申请日：2005-05-11

申请人： Minoru Sudou ,  Mitsuo Yarita ,  Kenji Kato

发明人： Minoru Sudou ,  Mitsuo Yarita ,  Kenji Kato

IPC分类号： H02M11/00

CPC分类号： G01R27/2605 ,  G01D5/24

摘要： A CV conversion circuit capable of measuring a plurality of capacitances with a simple circuit is provided. A time-division signal is applied to each capacitor, whereby a plurality of capacitances of the capacitors can be measured in series by a circuit with a small number of components.

摘要翻译： 提供了能够以简单的电路测量多个电容的CV转换电路。 时分信号被施加到每个电容器，由此可以通过具有少量部件的电路串联测量电容器的多个电容。