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公开(公告)号：US5583444A
公开(公告)日：1996-12-10
申请号：US618406
申请日：1996-03-19
IPC分类号： G01R19/00 , G01R1/07 , G01R15/16 , G01R15/22 , G01R31/28 , G01R31/312 , G01R31/302
CPC分类号： G01R1/071 , G01R31/312 , G01R15/22 , G01R15/241
摘要： This invention has as its object to provide a voltage measurement apparatus which has a compact probe unit, and which can perform a measurement in a non-contact manner. The voltage measurement apparatus includes detection means for detecting an electric field generated in a space by a voltage applied to the surface of a device to be measured, light-emitting means for modulating output light by superposing a detected signal obtained from the detection means on a bias current which is supplied to inductively radiate the output light, a constant current source for supplying the bias current to the light-emitting means, extraction means for extracting a signal component of the output light from the light-emitting means, and light-transmission means for guiding the output light from the light-emitting means to the extraction means, and measures the applied voltage to the surface of the device to be measured by bringing the detection means close to the device to be measured in a non-contact manner.
摘要翻译： 本发明的目的是提供一种电压测量装置，其具有紧凑的探针单元，并且可以以非接触方式进行测量。 电压测量装置包括检测装置，用于通过施加到被测量装置的表面的电压来检测在空间中产生的电场;发光装置，用于通过将从检测装置获得的检测信号叠加在一个 提供用于感应放射输出光的偏置电流，用于向发光装置提供偏置电流的恒流源，用于从发光装置提取输出光的信号分量的提取装置，以及光传输 用于将来自发光装置的输出光引导到提取装置的装置，并且通过以非接触的方式使检测装置靠近被测量装置来测量施加到要测量装置的表面的电压。
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公开(公告)号：US5703491A
公开(公告)日：1997-12-30
申请号：US703768
申请日：1996-08-27
IPC分类号： G01R19/00 , G01R1/07 , G01R15/16 , G01R15/22 , G01R31/28 , G01R31/312 , G01R31/032
CPC分类号： G01R1/071 , G01R31/312 , G01R15/22 , G01R15/241
摘要： This invention has as its object to provide a voltage measurement apparatus which has a compact probe unit, and which can perform a measurement in a non-contact manner. The voltage measurement apparatus includes detection means for detecting an electric field generated in a space by a voltage applied to the surface of a device to be measured, light-emitting means for modulating output light by superposing a detected signal obtained from the detection means on a bias current which is supplied to inductively radiate the output light, a constant current source for supplying the bias current to the light-emitting means, extraction means for extracting a signal component of the output light from the light-emitting means, and light-transmission means for guiding the output light from the light-emitting means to the extraction means, and measures the applied voltage to the surface of the device to be measured by bringing the detection means close to the device to be measured in a non-contact manner.
摘要翻译： 本发明的目的是提供一种电压测量装置，其具有紧凑的探针单元，并且可以以非接触方式进行测量。 电压测量装置包括检测装置，用于通过施加到被测量装置的表面的电压来检测在空间中产生的电场;发光装置，用于通过将从检测装置获得的检测信号叠加在一个 提供用于感应放射输出光的偏置电流，用于向发光装置提供偏置电流的恒流源，用于从发光装置提取输出光的信号分量的提取装置，以及光传输 用于将来自发光装置的输出光引导到提取装置的装置，并且通过以非接触的方式使检测装置靠近被测量装置来测量施加到要测量装置的表面的电压。
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公开(公告)号：US5237388A
公开(公告)日：1993-08-17
申请号：US762457
申请日：1991-09-19
申请人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
发明人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
CPC分类号： G01J4/04
摘要： Young's interferometer consisting of a single slit and a double slit member, and an analyzer are arranged along the axis of light to be measured. Parallel slits of the double slit member are provided with respective polarizers whose paralyzing directions are at .+-.45.degree. to the longitudinal direction of the parallel slits. The polarizing direction of the analyzer is set in parallel with the parallel slits. The incident light passes through Young's interferometer and the analyzer to form an interference fringe, which is detected by an image detector unit. An image analyzer unit produces an intensity profile of the interference fringe and determines the polarization state of the incident light, for instance, by comparing the produced intensity profile with conceivable profiles stored in advance.
摘要翻译： 由单个狭缝和双缝隙构件组成的杨氏干涉仪和分析器沿着待测量的光轴设置。 双缝构件的平行狭缝设置有各自的偏振器，其麻痹方向与平行狭缝的纵向方向成+/- 45度。 分析仪的偏振方向与平行狭缝平行设置。 入射光通过杨氏干涉仪和分析仪，形成一个由图像检测器单元检测的干涉条纹。 图像分析器单元产生干涉条纹的强度分布并且确定入射光的偏振状态，例如通过将产生的强度分布与预先存储的可想到的曲线进行比较。
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公开(公告)号：US5499190A
公开(公告)日：1996-03-12
申请号：US5091
申请日：1993-01-15
IPC分类号： G01R13/34 , G01R31/308 , G04F13/02 , H03K5/26
CPC分类号： G01R13/347 , G01R31/308 , G04F13/02 , H03K5/26
摘要： A system for measuring timing relationship between two signals for accurately measuring a timing relationship between signals includes an electro-optic measuring unit and a waveform storage and processing unit. The electro-optic measuring unit samples electrical signals from a device under measurement via a strobe light so as to measure the signal waveform. The electro-optic unit uses a laser diode as a light source. The waveform storage and processing unit stores the electrical signal waveforms measured by the electro-optic measuring unit in digital form. The waveform storage and processing unit also calculates a correlation between two stored electrical signal waveforms via a correlation calculation unit, and also detects a peak of the correlation to detect a timing relationship between the signals.
摘要翻译： 用于测量用于精确测量信号之间的定时关系的两个信号之间的定时关系的系统包括电光测量单元和波形存储和处理单元。 电光测量单元通过闪光灯对来自被测器件的电信号进行采样，以测量信号波形。 电光单元使用激光二极管作为光源。 波形存储和处理单元以数字形式存储由电光测量单元测量的电信号波形。 波形存储和处理单元还经由相关计算单元计算两个存储的电信号波形之间的相关性，并且还检测相关的峰值以检测信号之间的定时关系。
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公开(公告)号：US5444365A
公开(公告)日：1995-08-22
申请号：US113239
申请日：1993-08-30
IPC分类号： G01R15/24 , G01R1/07 , G01R19/00 , G01R31/302 , G01R31/319 , G01R1/04
CPC分类号： G01R1/071 , Y10S435/808
摘要： A change in voltage can be sensitively detected at a local part of a measured object. A set of laser medium and E-O probe are disposed between a pair of mirrors, a first one and a second one, forming a laser resonator. A linearly polarized light is emitted from the laser medium. The polarized light enters the E-O probe, and returns after being reflected by the second mirror. When a voltage is given to the E-O probe from the measured object, depending on the voltage, a refractive index of the E-O probe is changed, the light emitted from the E-O probe is ovally polarized, and a resonance status of the laser resonator then varies. Therefore, the light intensity emitted through the partially penetrating first mirror to the outside of the laser resonator corresponds to the voltage at the measured object in the proximity of the E-O probe. Consequently, a voltage distribution on the measured object such as IC with fine structures can be two-dimensionally detected.
摘要翻译： 可以在测量对象的局部部分敏感地检测电压变化。 一组激光介质和E-O探头设置在一对反射镜之间，第一和第二反射镜形成激光谐振器。 从激光介质发射线偏振光。 偏振光进入E-O探头，并在被第二个反射镜反射之后返回。 当从测量对象向EO探针施加电压时，根据电压，EO探针的折射率改变，从EO探针发射的光被卵巢极化，然后激光谐振器的共振状态变化 。 因此，通过部分穿透的第一反射镜发射到激光谐振器的外部的光强度对应于E-O探头附近的测量对象处的电压。 因此，可以二维地检测诸如具有精细结构的IC的测量对象上的电压分布。
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6.发明授权Polarization interferometer optical voltage detector utilizing movement of interference fringe 失效利用干涉条纹移动的偏振干涉仪光电压检测器
公开(公告)号：US5420686A
公开(公告)日：1995-05-30
申请号：US200568
申请日：1994-02-22
CPC分类号： G01R15/242 , G01R1/071
摘要： Polarized light is input to an optical modulator typically consisting of an electrooptic crystal. The polarization state of the input light is changed in accordance with a voltage being applied to the optical modulator. Receiving the light output from the optical modulator, a polarization interferometer produces an interference fringe on the input surface of a photodetector such as a streak camera and a CCD line sensor. Based on an output signal of the photodetector, an analyzing device calculates a pitch and a movement distance of the interference fringe to determine the voltage being applied to the optical modulator.
摘要翻译： 偏振光被输入到通常由电光晶体组成的光学调制器。 输入光的偏振状态根据施加于光调制器的电压而变化。 接收来自光调制器的光输出，偏振干涉仪在诸如条纹照相机和CCD线传感器的光电检测器的输入表面上产生干涉条纹。 基于光检测器的输出信号，分析装置计算干涉条纹的间距和移动距离，以确定施加到光调制器的电压。
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公开(公告)号：US5500587A
公开(公告)日：1996-03-19
申请号：US118257
申请日：1993-09-09
CPC分类号： G01R1/071
摘要： An E-O probe with improved spatial resolution has a light transmissive base part, an electro-optic material which is fixed to the base part and has an index of refraction which varies in response to an electrical field from a measured object, and a mirror which is fixed to the electro-optic material and reflects an incident beam penetrating the base part and the electro-optic material. The mirror is formed to be smaller than the incident beam in diameter. The electro-optic material is formed very thin.
摘要翻译： 具有改善的空间分辨率的EO探针具有透光基部，电光材料，其固定到基部，并且具有响应于来自测量对象的电场而变化的折射率，以及反射镜 固定到电光材料并且反射穿过基部和电光材料的入射光束。 镜子形成为比入射光束的直径小。 电光材料形成得非常薄。
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8.发明授权Sampling-type optical voltage detector utilizing movement of interference fringe 失效采用干涉条纹移动的采样式光电压检测器
公开(公告)号：US5384638A
公开(公告)日：1995-01-24
申请号：US858279
申请日：1992-03-26
摘要： Polarized light pulses are applied to an optical modulator including an electrooptic crystal. A polarization state of the applied light is changed in accordance with a voltage of an electrical signal applied to the optical modulator. A polarization interferometer receives the light output from the optical modulator, and generates an interference fringe on the input surface of a photodetector such as a one-dimensional CCD. A processing device calculates a pitch and a movement distance of the interference fringe, based on an output signal of the photodetector, to determine the voltage. A waveform of the electrical signal is determined by sampling the electrical signal with multiple light pulses, while varying a phase relationship between the electrical signal and the light pulses.
摘要翻译： 偏振光脉冲被施加到包括电光晶体的光学调制器。 所施加的光的偏振状态根据施加到光学调制器的电信号的电压而改变。 偏振干涉仪接收来自光调制器的光输出，并在诸如一维CCD的光电检测器的输入表面上产生干涉条纹。 处理装置基于光电检测器的输出信号计算干涉条纹的间距和移动距离，以确定电压。 电信号的波形通过用多个光脉冲对电信号进行采样来确定，同时改变电信号和光脉冲之间的相位关系。
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9.发明授权Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 失效定位用于测量电压的装置的电光探针的方法
公开(公告)号：US5552716A
公开(公告)日：1996-09-03
申请号：US213005
申请日：1994-03-14
IPC分类号： G01R19/00 , G01R31/302 , G01R31/308 , G01R29/12
CPC分类号： G01R31/308
摘要： An method of positioning an E-O probe applied to an apparatus for the measurement of voltage. In the first step, the relative position of the E-O probe against the magnifying optical system in the first condition of being focused the magnifying optical system on the base of the E-O probe, and the focal point difference between the focal plane of the magnifying optical system in the second condition that the E-O probe is substantially out of the optical path for observation of the surface of the device and the focal plane in the first condition are stored. The relative position and the focal point difference are fixed in the apparatus for the measurement of voltage regardless of the device to be measured. Next, in the second step, the focus of the magnifying optical system is adjusted to the observation position of the surface of the device in the second condition, and then in the third step, the magnifying optical system, the E-O probe, and the probe stage are separated from the device by the focal point difference stored in the first step by the Z-axis stage, and in the fourth step, the E-O probe is moved to the relative position of the E-O probe stored in the first step relative to the magnifying optical system by the probe stage.
摘要翻译： 将用于测量电压的设备的E-O探头定位的方法。 在第一步骤中，在将放大光学系统聚焦在EO探针的基座上的第一条件下，EO探针对放大光学系统的相对位置以及放大光学系统的焦平面之间的焦点差 在第二条件下，EO探针基本上不在用于观察装置的表面的光路中，并且在第一条件下存储焦平面。 无论要测量的装置如何，相对位置和焦点差都固定在用于测量电压的装置中。 接下来，在第二步骤中，放大光学系统的焦点在第二条件下被调整到装置的表面的观察位置，然后在第三步骤中，放大光学系统，EO探针和探针 通过Z轴级在第一步骤中存储的焦点差与装置分离阶段，并且在第四步骤中，将EO探针移动到相对于第一步骤中存储的EO探针的相对位置 通过探针台放大光学系统。
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公开(公告)号：US5592101A
公开(公告)日：1997-01-07
申请号：US94974
申请日：1993-07-22
IPC分类号： G01R1/07 , G01R31/308 , G01R29/12
CPC分类号： G01R1/071 , G01R31/308
摘要： An electric field measuring apparatus for causing an optical probe head having an electro-optic member with an electro-optic material to oppose a sample such as a semiconductor integrated circuit device and for optically measuring a voltage of an opposite portion of the sample. The electro-optic material consists of an LiTaO.sub.3 electro-optic crystal or the like, the polarization characteristics of which change depending on the electric-field strength of the sample. The electro-optic member is supported on a guide mechanism to be reciprocally movable within a predetermined stroke range in a direction of the sample. The guide mechanism is reciprocated in the direction of the sample to control the distance between the electro-optic material and the sample. In measurement, light is incident on the electro-optic material whose polarization characteristics change depending on the electric-field strength, and the light intensity of a predetermined polarized component of the light reflected by the electro-optic material is detected, thereby measuring the electric-field strength and voltage of the sample. When if the electro-optic member is brought into contact with the sample, the sample is not damaged due to the stroke set in the guide mechanism. The simple structure of the guide mechanism realizes improvement of operability. The electro-optic member can therefore safety approach the sample to increase the measurement sensitivity.
摘要翻译： 一种电场测量装置，用于使具有电光材料的光学元件的光学探针头与诸如半导体集成电路器件的样品相对，并用于光学测量样品的相对部分的电压。 电光材料由LiTaO 3电光晶体等构成，其极化特性根据样品的电场强度而变化。 电光元件被支撑在引导机构上，以在样本的方向上在预定行程范围内往复移动。 引导机构在样品的方向上往复运动，以控制电光材料和样品之间的距离。 在测量中，光入射到电光材料上，其偏振特性根据电场强度而变化，并且检测由电光材料反射的光的预定偏振分量的光强度，由此测量电 场强和样品电压。 如果电光元件与样品接触，则由于引导机构中设置的行程，样品不会损坏。 引导机构的简单结构实现了可操作性的提高。 因此，电光元件可以安全地接近样品以提高测量灵敏度。
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