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公开(公告)号：US5583444A
公开(公告)日：1996-12-10
申请号：US618406
申请日：1996-03-19
IPC分类号： G01R19/00 , G01R1/07 , G01R15/16 , G01R15/22 , G01R31/28 , G01R31/312 , G01R31/302
CPC分类号： G01R1/071 , G01R31/312 , G01R15/22 , G01R15/241
摘要： This invention has as its object to provide a voltage measurement apparatus which has a compact probe unit, and which can perform a measurement in a non-contact manner. The voltage measurement apparatus includes detection means for detecting an electric field generated in a space by a voltage applied to the surface of a device to be measured, light-emitting means for modulating output light by superposing a detected signal obtained from the detection means on a bias current which is supplied to inductively radiate the output light, a constant current source for supplying the bias current to the light-emitting means, extraction means for extracting a signal component of the output light from the light-emitting means, and light-transmission means for guiding the output light from the light-emitting means to the extraction means, and measures the applied voltage to the surface of the device to be measured by bringing the detection means close to the device to be measured in a non-contact manner.
摘要翻译： 本发明的目的是提供一种电压测量装置，其具有紧凑的探针单元，并且可以以非接触方式进行测量。 电压测量装置包括检测装置，用于通过施加到被测量装置的表面的电压来检测在空间中产生的电场;发光装置，用于通过将从检测装置获得的检测信号叠加在一个 提供用于感应放射输出光的偏置电流，用于向发光装置提供偏置电流的恒流源，用于从发光装置提取输出光的信号分量的提取装置，以及光传输 用于将来自发光装置的输出光引导到提取装置的装置，并且通过以非接触的方式使检测装置靠近被测量装置来测量施加到要测量装置的表面的电压。
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公开(公告)号：US5703491A
公开(公告)日：1997-12-30
申请号：US703768
申请日：1996-08-27
IPC分类号： G01R19/00 , G01R1/07 , G01R15/16 , G01R15/22 , G01R31/28 , G01R31/312 , G01R31/032
CPC分类号： G01R1/071 , G01R31/312 , G01R15/22 , G01R15/241
摘要： This invention has as its object to provide a voltage measurement apparatus which has a compact probe unit, and which can perform a measurement in a non-contact manner. The voltage measurement apparatus includes detection means for detecting an electric field generated in a space by a voltage applied to the surface of a device to be measured, light-emitting means for modulating output light by superposing a detected signal obtained from the detection means on a bias current which is supplied to inductively radiate the output light, a constant current source for supplying the bias current to the light-emitting means, extraction means for extracting a signal component of the output light from the light-emitting means, and light-transmission means for guiding the output light from the light-emitting means to the extraction means, and measures the applied voltage to the surface of the device to be measured by bringing the detection means close to the device to be measured in a non-contact manner.
摘要翻译： 本发明的目的是提供一种电压测量装置，其具有紧凑的探针单元，并且可以以非接触方式进行测量。 电压测量装置包括检测装置，用于通过施加到被测量装置的表面的电压来检测在空间中产生的电场;发光装置，用于通过将从检测装置获得的检测信号叠加在一个 提供用于感应放射输出光的偏置电流，用于向发光装置提供偏置电流的恒流源，用于从发光装置提取输出光的信号分量的提取装置，以及光传输 用于将来自发光装置的输出光引导到提取装置的装置，并且通过以非接触的方式使检测装置靠近被测量装置来测量施加到要测量装置的表面的电压。
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公开(公告)号：US5237388A
公开(公告)日：1993-08-17
申请号：US762457
申请日：1991-09-19
申请人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
发明人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
CPC分类号： G01J4/04
摘要： Young's interferometer consisting of a single slit and a double slit member, and an analyzer are arranged along the axis of light to be measured. Parallel slits of the double slit member are provided with respective polarizers whose paralyzing directions are at .+-.45.degree. to the longitudinal direction of the parallel slits. The polarizing direction of the analyzer is set in parallel with the parallel slits. The incident light passes through Young's interferometer and the analyzer to form an interference fringe, which is detected by an image detector unit. An image analyzer unit produces an intensity profile of the interference fringe and determines the polarization state of the incident light, for instance, by comparing the produced intensity profile with conceivable profiles stored in advance.
摘要翻译： 由单个狭缝和双缝隙构件组成的杨氏干涉仪和分析器沿着待测量的光轴设置。 双缝构件的平行狭缝设置有各自的偏振器，其麻痹方向与平行狭缝的纵向方向成+/- 45度。 分析仪的偏振方向与平行狭缝平行设置。 入射光通过杨氏干涉仪和分析仪，形成一个由图像检测器单元检测的干涉条纹。 图像分析器单元产生干涉条纹的强度分布并且确定入射光的偏振状态，例如通过将产生的强度分布与预先存储的可想到的曲线进行比较。
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公开(公告)号：US5499190A
公开(公告)日：1996-03-12
申请号：US5091
申请日：1993-01-15
IPC分类号： G01R13/34 , G01R31/308 , G04F13/02 , H03K5/26
CPC分类号： G01R13/347 , G01R31/308 , G04F13/02 , H03K5/26
摘要： A system for measuring timing relationship between two signals for accurately measuring a timing relationship between signals includes an electro-optic measuring unit and a waveform storage and processing unit. The electro-optic measuring unit samples electrical signals from a device under measurement via a strobe light so as to measure the signal waveform. The electro-optic unit uses a laser diode as a light source. The waveform storage and processing unit stores the electrical signal waveforms measured by the electro-optic measuring unit in digital form. The waveform storage and processing unit also calculates a correlation between two stored electrical signal waveforms via a correlation calculation unit, and also detects a peak of the correlation to detect a timing relationship between the signals.
摘要翻译： 用于测量用于精确测量信号之间的定时关系的两个信号之间的定时关系的系统包括电光测量单元和波形存储和处理单元。 电光测量单元通过闪光灯对来自被测器件的电信号进行采样，以测量信号波形。 电光单元使用激光二极管作为光源。 波形存储和处理单元以数字形式存储由电光测量单元测量的电信号波形。 波形存储和处理单元还经由相关计算单元计算两个存储的电信号波形之间的相关性，并且还检测相关的峰值以检测信号之间的定时关系。
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公开(公告)号：US5444365A
公开(公告)日：1995-08-22
申请号：US113239
申请日：1993-08-30
IPC分类号： G01R15/24 , G01R1/07 , G01R19/00 , G01R31/302 , G01R31/319 , G01R1/04
CPC分类号： G01R1/071 , Y10S435/808
摘要： A change in voltage can be sensitively detected at a local part of a measured object. A set of laser medium and E-O probe are disposed between a pair of mirrors, a first one and a second one, forming a laser resonator. A linearly polarized light is emitted from the laser medium. The polarized light enters the E-O probe, and returns after being reflected by the second mirror. When a voltage is given to the E-O probe from the measured object, depending on the voltage, a refractive index of the E-O probe is changed, the light emitted from the E-O probe is ovally polarized, and a resonance status of the laser resonator then varies. Therefore, the light intensity emitted through the partially penetrating first mirror to the outside of the laser resonator corresponds to the voltage at the measured object in the proximity of the E-O probe. Consequently, a voltage distribution on the measured object such as IC with fine structures can be two-dimensionally detected.
摘要翻译： 可以在测量对象的局部部分敏感地检测电压变化。 一组激光介质和E-O探头设置在一对反射镜之间，第一和第二反射镜形成激光谐振器。 从激光介质发射线偏振光。 偏振光进入E-O探头，并在被第二个反射镜反射之后返回。 当从测量对象向EO探针施加电压时，根据电压，EO探针的折射率改变，从EO探针发射的光被卵巢极化，然后激光谐振器的共振状态变化 。 因此，通过部分穿透的第一反射镜发射到激光谐振器的外部的光强度对应于E-O探头附近的测量对象处的电压。 因此，可以二维地检测诸如具有精细结构的IC的测量对象上的电压分布。
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公开(公告)号：US5319654A
公开(公告)日：1994-06-07
申请号：US39763
申请日：1993-03-30
CPC分类号： H01S3/113
摘要： An object of this invention is to provide a pulsed laser beam source device which is easy to handle and is operative stably. Pumping light is irradiated to a laser medium from a light source for optical pumping. The stimulated laser medium pumps radiation of a set wavelength. This radiation is stimulated to be amplified while reciprocating between resonator mirrors. A multi layer film is inserted in an optical path of the radiation. Feeble light of the radiation from the laser medium is absorbed by the multi-layer to be weaker, and that part of the radiation having intensities above a set intensity is compressed in terms of time to be emitted outside. The emitted radiation has a very short pulse duration.
摘要翻译： 本发明的目的是提供一种易于操作并且稳定操作的脉冲激光束源装置。 泵浦光从用于光泵浦的光源照射到激光介质。 受激的激光介质泵送设定波长的辐射。 该辐射被激发以在谐振镜之间往复放大。 多层膜被插入到辐射的光路中。 来自激光介质的辐射的微弱光被多层吸收较弱，并且具有高于设定强度的强度的部分辐射在时间上被压缩以被外部发射。 发射的辐射具有非常短的脉冲持续时间。
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7.发明授权Polarization interferometer optical voltage detector utilizing movement of interference fringe 失效利用干涉条纹移动的偏振干涉仪光电压检测器
公开(公告)号：US5420686A
公开(公告)日：1995-05-30
申请号：US200568
申请日：1994-02-22
CPC分类号： G01R15/242 , G01R1/071
摘要： Polarized light is input to an optical modulator typically consisting of an electrooptic crystal. The polarization state of the input light is changed in accordance with a voltage being applied to the optical modulator. Receiving the light output from the optical modulator, a polarization interferometer produces an interference fringe on the input surface of a photodetector such as a streak camera and a CCD line sensor. Based on an output signal of the photodetector, an analyzing device calculates a pitch and a movement distance of the interference fringe to determine the voltage being applied to the optical modulator.
摘要翻译： 偏振光被输入到通常由电光晶体组成的光学调制器。 输入光的偏振状态根据施加于光调制器的电压而变化。 接收来自光调制器的光输出，偏振干涉仪在诸如条纹照相机和CCD线传感器的光电检测器的输入表面上产生干涉条纹。 基于光检测器的输出信号，分析装置计算干涉条纹的间距和移动距离，以确定施加到光调制器的电压。
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8.发明授权Sampling-type optical voltage detector utilizing movement of interference fringe 失效采用干涉条纹移动的采样式光电压检测器
公开(公告)号：US5384638A
公开(公告)日：1995-01-24
申请号：US858279
申请日：1992-03-26
摘要： Polarized light pulses are applied to an optical modulator including an electrooptic crystal. A polarization state of the applied light is changed in accordance with a voltage of an electrical signal applied to the optical modulator. A polarization interferometer receives the light output from the optical modulator, and generates an interference fringe on the input surface of a photodetector such as a one-dimensional CCD. A processing device calculates a pitch and a movement distance of the interference fringe, based on an output signal of the photodetector, to determine the voltage. A waveform of the electrical signal is determined by sampling the electrical signal with multiple light pulses, while varying a phase relationship between the electrical signal and the light pulses.
摘要翻译： 偏振光脉冲被施加到包括电光晶体的光学调制器。 所施加的光的偏振状态根据施加到光学调制器的电信号的电压而改变。 偏振干涉仪接收来自光调制器的光输出，并在诸如一维CCD的光电检测器的输入表面上产生干涉条纹。 处理装置基于光电检测器的输出信号计算干涉条纹的间距和移动距离，以确定电压。 电信号的波形通过用多个光脉冲对电信号进行采样来确定，同时改变电信号和光脉冲之间的相位关系。
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公开(公告)号：US5307199A
公开(公告)日：1994-04-26
申请号：US735792
申请日：1991-07-25
CPC分类号： G02F1/293
摘要： The optical apparatus includes first and second deflection members, a mask, a pumping light source, and a controller. The first and second deflection members are formed of nonlinear optical material whose refractive index is changed upon light radiation. The mask is arranged on an optical path extending from a front side of the first deflection member to a rear side of a second deflection member. The mask has a predetermined transmission pattern. The pumping light source radiates first and second beams on predetermined regions of the first and second deflection members. This changes the refractive indices of the predetermined regions to bend the optical path. The controller variably controls the intensity of the first and second beams.
摘要翻译： 光学装置包括第一和第二偏转构件，掩模，泵浦光源和控制器。 第一偏转构件和第二偏转构件由折射率在光辐射下变化的非线性光学材料形成。 掩模布置在从第一偏转构件的前侧延伸到第二偏转构件的后侧的光路上。 掩模具有预定的传输图案。 泵浦光源在第一和第二偏转构件的预定区域上辐射第一和第二光束。 这改变了预定区域的折射率以弯曲光路。 控制器可变地控制第一和第二光束的强度。
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公开(公告)号：US5220579A
公开(公告)日：1993-06-15
申请号：US735647
申请日：1991-07-25
IPC分类号： H01S3/0915 , H01S3/106 , H01S3/108 , H01S3/11
CPC分类号： H01S3/117 , H01S3/108 , H01S3/0805
摘要： A pulse laser has a laser resonator, a laser medium in the laser resonator, and a deflecting device. The laser medium emits an emission light. The deflecting device switches an optical path of the emission light to output the emission light as a laser pulse. The deflecting device includes a deflecting member and a pumping device. The deflecting member is arranged in the optical path of the emission light. The deflection member has a refractive index which changes based on a pumping light incident thereon. The pumping device radiates the pumping light on a predetermined region of the deflection member and varies the refractive index of the predetermined region to switch the optical path of the emission light.
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