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公开(公告)号：US07785989B2
公开(公告)日：2010-08-31
申请号：US12337014
申请日：2008-12-17
CPC分类号： H01L29/045 , H01L31/0392 , H01L31/06875 , H01L31/0735 , H01L31/078 , H01L31/1844 , H01L31/1852 , H01L31/1892 , Y02E10/544 , Y02P70/521 , Y10S438/977
摘要： A method of manufacturing a solar cell by providing a gallium arsenide carrier with a prepared bonding surface; providing a sapphire substrate; bonding the gallium arsenide carrier and the sapphire substrate to produce a composite structure; detaching the bulk of the gallium arsenide carrier from the composite structure, leaving a gallium arsenide growth substrate on the sapphire substrate; and depositing a sequence of layers of semiconductor material forming a solar cell on the growth substrate. For some solar cells, the method further includes mounting a surrogate second substrate on top of the sequence of layers of semiconductor material forming a solar cell; and removing the growth substrate.
摘要翻译： 一种制造太阳能电池的方法，其通过提供具有制备的接合表面的砷化镓载体; 提供蓝宝石衬底; 键合砷化镓载体和蓝宝石衬底以产生复合结构; 从复合结构中分离大部分砷化镓载体，在蓝宝石衬底上留下砷化镓生长衬底; 以及在生长衬底上沉积形成太阳能电池的半导体材料层序列。 对于一些太阳能电池，该方法还包括将替代第二衬底安装在形成太阳能电池的半导体材料层序列之上; 并除去生长底物。
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公开(公告)号：US08039291B2
公开(公告)日：2011-10-18
申请号：US12816205
申请日：2010-06-15
IPC分类号： H01L21/00
CPC分类号： H01L31/0735 , H01L31/06875 , H01L31/0725 , H01L31/078 , H01L31/18 , H01L31/1892 , Y02E10/544
摘要： A method of forming a multijunction solar cell including an upper subcell, a middle subcell, and a lower subcell by providing a first substrate for the epitaxial growth of semiconductor material; forming a first solar subcell on the substrate having a first band gap; forming a second solar subcell over the first solar subcell having a second band gap smaller than the first band gap; forming a graded interlayer over the second subcell; forming a third solar subcell over the graded interlayer having a fourth band gap smaller than the second band gap such that the third subcell is lattice mismatched with respect to the second subcell; attaching a surrogate second substrate over the third solar subcell and removing the first substrate; and etching a first trough around the periphery of the solar cell to the surrogate second substrate so as to form a mesa structure on the surrogate second substrate and facilitate the removal of the solar cell from the surrogate second substrate.
摘要翻译： 一种通过提供用于半导体材料的外延生长的第一衬底来形成包括上部子电池，中间子电池和下部子电池的多结太阳能电池的方法; 在具有第一带隙的基板上形成第一太阳能子电池; 在所述第一太阳能子电池上形成具有小于所述第一带隙的第二带隙的第二太阳能子电池; 在所述第二子电池上形成分级中间层; 在所述渐变中间层上形成具有小于所述第二带隙的第四带隙的第三太阳能子电池，使得所述第三子电池相对于所述第二子电池晶格失配; 在所述第三太阳能子电池上附接替代的第二衬底并移除所述第一衬底; 以及将围绕所述太阳能电池的周边的第一槽蚀刻到所述代理第二基板，以便在所述替代第二基板上形成台面结构，并且便于从所述替代第二基板移除所述太阳能电池。
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3.发明授权公开(公告)号：US07960201B2
公开(公告)日：2011-06-14
申请号：US12362201
申请日：2009-01-29
IPC分类号： H01L21/00
CPC分类号： H01L31/06875 , H01L31/022425 , H01L31/03042 , H01L31/0693 , H01L31/1852 , Y02E10/544 , Y02P70/521
摘要： A method of manufacturing a solar cell by providing a first substrate; depositing on a first substrate a sequence of layers of semiconductor material forming a solar cell including at least a top subcell and a bottom subcell; mounting a surrogate substrate on top of the sequence of layers adjacent to the bottom subcell; removing the first substrate to expose the surface of the top subcell; removing the surrogate substrate; and holding the solar cell on a vacuum chuck to support it for subsequent fabrication operations, such as attaching interconnects to the solar cells to form an interconnected array.
摘要翻译： 一种通过提供第一基板来制造太阳能电池的方法; 在第一衬底上沉积形成包括至少顶部子电池和底部子电池的太阳能电池的半导体材料层序列; 将代替衬底安装在与底部子电池相邻的层序列的顶部上; 去除第一基板以暴露顶部子电池的表面; 去除替代底物; 并且将太阳能电池保持在真空吸盘上以支持其用于随后的制造操作，例如将互连件附接到太阳能电池以形成互连的阵列。
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4.发明申请String Interconnection and Fabrication of Inverted Metamorphic Multijunction Solar Cells 有权反相变质多功能太阳能电池的串联和制造公开(公告)号：US20100233839A1
公开(公告)日：2010-09-16
申请号：US12362201
申请日：2009-01-29
IPC分类号： H01L31/18
CPC分类号： H01L31/06875 , H01L31/022425 , H01L31/03042 , H01L31/0693 , H01L31/1852 , Y02E10/544 , Y02P70/521
摘要： A method of manufacturing a solar cell by providing a first substrate; depositing on a first substrate a sequence of layers of semiconductor material forming a solar cell including at least a top subcell and a bottom subcell; mounting a surrogate substrate on top of the sequence of layers adjacent to the bottom subcell; removing the first substrate to expose the surface of the top subcell; removing the surrogate substrate; and holding the solar cell on a vacuum chuck to support it for subsequent fabrication operations, such as attaching interconnects to the solar cells to form an interconnected array.
摘要翻译： 一种通过提供第一基板来制造太阳能电池的方法; 在第一衬底上沉积形成包括至少顶部子电池和底部子电池的太阳能电池的半导体材料层序列; 将代替衬底安装在与底部子电池相邻的层序列的顶部上; 去除第一基板以暴露顶部子电池的表面; 去除替代底物; 并且将太阳能电池保持在真空吸盘上以支持其用于随后的制造操作，例如将互连件附接到太阳能电池以形成互连的阵列。
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公开(公告)号：US20100041178A1
公开(公告)日：2010-02-18
申请号：US12190449
申请日：2008-08-12
IPC分类号： H01L31/18
CPC分类号： H01L31/0735 , H01L31/06875 , H01L31/0725 , H01L31/078 , H01L31/18 , H01L31/1892 , Y02E10/544
摘要： A method of forming a multifunction solar cell including an upper subcell, a middle subcell, and a lower subcell by providing a first substrate for the epitaxial growth of semiconductor material; forming a first solar subcell on the substrate having a first band gap; forming a second solar subcell over the first solar subcell having a second band gap smaller than the first band gap; forming a graded interlayer over the second subcell, the graded interlayer having a third band gap greater than the second band gap; forming a third solar subcell over the graded interlayer having a fourth band gap smaller than the second band gap such that the third subcell is lattice mismatched with respect to the second subcell; attaching a surrogate second substrate over the third solar subcell and removing the first substrate; and etching a first trough around the periphery of the solar cell to the surrogate second substrate so as to form a mesa structure on the surrogate second substrate and facilitate the removal of said solar cell from the surrogate second substrate.
摘要翻译： 一种通过提供用于半导体材料的外延生长的第一衬底来形成包括上部子电池，中间子电池和下部子电池的多结太阳能电池的方法; 在具有第一带隙的基板上形成第一太阳能子电池; 在所述第一太阳能子电池上形成具有小于所述第一带隙的第二带隙的第二太阳能子电池; 在所述第二子电池上形成渐变中间层，所述渐变中间层具有大于所述第二带隙的第三带隙; 在所述渐变中间层上形成具有小于所述第二带隙的第四带隙的第三太阳能子电池，使得所述第三子电池相对于所述第二子电池晶格失配; 在所述第三太阳能子电池上附接替代的第二衬底并移除所述第一衬底; 以及将围绕所述太阳能电池的周边的第一槽蚀刻到所述代理第二基板，以便在所述替代第二基板上形成台面结构，并且便于从所述替代第二基板移除所述太阳能电池。
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公开(公告)号：US20100248411A1
公开(公告)日：2010-09-30
申请号：US12816205
申请日：2010-06-15
IPC分类号： H01L31/18
CPC分类号： H01L31/0735 , H01L31/06875 , H01L31/0725 , H01L31/078 , H01L31/18 , H01L31/1892 , Y02E10/544
摘要： A method of forming a multijunction solar cell including an upper subcell, a middle subcell, and a lower subcell by providing a first substrate for the epitaxial growth of semiconductor material; forming a first solar subcell on the substrate having a first band gap; forming a second solar subcell over the first solar subcell having a second band gap smaller than the first band gap; forming a graded interlayer over the second subcell; forming a third solar subcell over the graded interlayer having a fourth band gap smaller than the second band gap such that the third subcell is lattice mismatched with respect to the second subcell; attaching a surrogate second substrate over the third solar subcell and removing the first substrate; and etching a first trough around the periphery of the solar cell to the surrogate second substrate so as to form a mesa structure on the surrogate second substrate and facilitate the removal of the solar cell from the surrogate second substrate.
摘要翻译： 一种通过提供用于半导体材料的外延生长的第一衬底来形成包括上部子电池，中间子电池和下部子电池的多结太阳能电池的方法; 在具有第一带隙的基板上形成第一太阳能子电池; 在所述第一太阳能子电池上形成具有小于所述第一带隙的第二带隙的第二太阳能子电池; 在所述第二子电池上形成分级中间层; 在所述渐变中间层上形成具有小于所述第二带隙的第四带隙的第三太阳能子电池，使得所述第三子电池相对于所述第二子电池晶格失配; 在所述第三太阳能子电池上附接替代的第二衬底并移除所述第一衬底; 以及将围绕所述太阳能电池的周边的第一槽蚀刻到所述代理第二基板，以便在所述替代第二基板上形成台面结构，并且便于从所述替代第二基板移除所述太阳能电池。
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公开(公告)号：US07741146B2
公开(公告)日：2010-06-22
申请号：US12190449
申请日：2008-08-12
IPC分类号： H01L21/00
CPC分类号： H01L31/0735 , H01L31/06875 , H01L31/0725 , H01L31/078 , H01L31/18 , H01L31/1892 , Y02E10/544
摘要： A method of forming a multifunction solar cell including an upper subcell, a middle subcell, and a lower subcell by providing a first substrate for the epitaxial growth of semiconductor material; forming a first solar subcell on the substrate having a first band gap; forming a second solar subcell over the first solar subcell having a second band gap smaller than the first band gap; forming a graded interlayer over the second subcell, the graded interlayer having a third band gap greater than the second band gap; forming a third solar subcell over the graded interlayer having a fourth band gap smaller than the second band gap such that the third subcell is lattice mismatched with respect to the second subcell; attaching a surrogate second substrate over the third solar subcell and removing the first substrate; and etching a first trough around the periphery of the solar cell to the surrogate second substrate so as to form a mesa structure on the surrogate second substrate and facilitate the removal of said solar cell from the surrogate second substrate.
摘要翻译： 一种通过提供用于半导体材料的外延生长的第一衬底来形成包括上部子电池，中间子电池和下部子电池的多结太阳能电池的方法; 在具有第一带隙的基板上形成第一太阳能子电池; 在所述第一太阳能子电池上形成具有小于所述第一带隙的第二带隙的第二太阳能子电池; 在所述第二子电池上形成渐变中间层，所述渐变中间层具有大于所述第二带隙的第三带隙; 在所述渐变中间层上形成具有小于所述第二带隙的第四带隙的第三太阳能子电池，使得所述第三子电池相对于所述第二子电池晶格失配; 在所述第三太阳能子电池上附接替代的第二衬底并移除所述第一衬底; 以及将围绕所述太阳能电池的周边的第一槽蚀刻到所述代理第二基板，以便在所述替代第二基板上形成台面结构，并且有助于从所述代理第二基板去除所述太阳能电池。
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公开(公告)号：US20100151618A1
公开(公告)日：2010-06-17
申请号：US12337014
申请日：2008-12-17
CPC分类号： H01L29/045 , H01L31/0392 , H01L31/06875 , H01L31/0735 , H01L31/078 , H01L31/1844 , H01L31/1852 , H01L31/1892 , Y02E10/544 , Y02P70/521 , Y10S438/977
摘要： A method of manufacturing a solar cell by providing a gallium arsenide carrier with a prepared bonding surface; providing a sapphire substrate; bonding the gallium arsenide carrier and the sapphire substrate to produce a composite structure; detaching the bulk of the gallium arsenide carrier from the composite structure, leaving a gallium arsenide growth substrate on the sapphire substrate; and depositing a sequence of layers of semiconductor material forming a solar cell on the growth substrate. For some solar cells, the method further includes mounting a surrogate second substrate on top of the sequence of layers of semiconductor material forming a solar cell; and removing the growth substrate.
摘要翻译： 一种制造太阳能电池的方法，其通过提供具有制备的接合表面的砷化镓载体; 提供蓝宝石衬底; 键合砷化镓载体和蓝宝石衬底以产生复合结构; 从复合结构中分离大部分砷化镓载体，在蓝宝石衬底上留下砷化镓生长衬底; 以及在生长衬底上沉积形成太阳能电池的半导体材料层序列。 对于一些太阳能电池，该方法还包括将替代第二衬底安装在形成太阳能电池的半导体材料层序列之上; 并除去生长底物。
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9.发明申请公开(公告)号：US20090078308A1
公开(公告)日：2009-03-26
申请号：US11860142
申请日：2007-09-24
IPC分类号： H01L31/06
CPC分类号： H01L31/06875 , H01L31/18 , Y02E10/544 , Y02P70/521
摘要： A multijunction solar cell including a first solar subcell having a first band gap; a second solar subcell disposed over the first subcell and having a second band gap smaller than the first band gap; a grading interlayer disposed over the second subcell and having a third band gap greater than the second band gap; a third solar subcell disposed over the interlayer that is lattice mismatched with respect to the middle subcell and having a fourth band gap smaller than the second band gap; and either a thin (approximately 2-6 mil) substrate and/or a rigid coverglass supporting the first, second, and third solar subcells.
摘要翻译： 一种多结太阳能电池，包括具有第一带隙的第一太阳能子电池; 第二太阳能子电池，设置在所述第一子电池上，并具有小于所述第一带隙的第二带隙; 分级夹层，设置在所述第二子电池上方，并具有大于所述第二带隙的第三带隙; 设置在所述中间层上的第三太阳能子电池，所述第三太阳能子电池相对于所述中间子电池晶格失配并且具有小于所述第二带隙的第四带隙; 以及支撑第一，第二和第三太阳能子电池的薄（约2-6密耳）衬底和/或刚性覆盖玻璃。
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公开(公告)号：US08263856B2
公开(公告)日：2012-09-11
申请号：US12537361
申请日：2009-08-07
申请人： Arthur Cornfeld , Jacqueline Diaz
发明人： Arthur Cornfeld , Jacqueline Diaz
IPC分类号： H01L31/00
CPC分类号： H01L31/06875 , H01L31/022441 , H01L31/1892 , Y02E10/544 , Y02P70/521
摘要： A method of manufacturing a solar cell by providing a first substrate; depositing sequentially on the first substrate a plurality of semiconductor layers, the plurality of semiconductor layers comprising a first layer and a last layer in the direction of deposition; forming a backside contact layer on the last semiconductor layer; forming on the last semiconductor layer a back cathode contact isolated from at least a first portion of the backside contact layer, the first portion forming the anode contact; attaching a second substrate on the backside contact layer and removing the first substrate to expose the first semiconductor layer and to define a front surface and an opposite back surface of a solar cell; forming a front cathode contact on the front surface of the solar cell; etching a first trench through the plurality of semiconductor layers to define an active portion of the solar cell with a first mesa structure including the front cathode contact and the anode contact and being surrounded by the first trench, the first mesa having a first sidewall in the first trench and a lateral peripheral region beyond the sidewall, and forming in the lateral peripheral region an electrically conductive layer extending from the front surface where it is electrically connected to the front cathode contact along the first sidewall of the first trench to be electrically connected to the back cathode contact.
摘要翻译： 一种通过提供第一基板来制造太阳能电池的方法; 在所述第一基板上顺序地沉积多个半导体层，所述多个半导体层在沉积方向上包括第一层和最后一层; 在最后一个半导体层上形成背面接触层; 在所述最后半导体层上形成从所述背面接触层的至少第一部分隔离的后阴极接触，所述第一部分形成所述阳极接触; 将第二基板附接在所述背面接触层上，并且移除所述第一基板以暴露所述第一半导体层并限定太阳能电池的前表面和相对的后表面; 在太阳能电池的前表面上形成正极阴极接触; 蚀刻通过所述多个半导体层的第一沟槽以限定具有第一台面结构的所述太阳能电池的有源部分，所述第一台面结构包括所述前阴极接触件和所述阳极接触件并被所述第一沟槽包围，所述第一台面具有所述第一侧壁 第一沟槽和超出侧壁的横向周边区域，并且在侧面周边区域中形成从前表面延伸的导电层，其中它沿着第一沟槽的第一侧壁与前阴极接触电连接以电连接到 背阴极接触。
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