公开(公告)号：US07381969B2

公开(公告)日：2008-06-03

申请号：US11409759

申请日：2006-04-24

申请人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

发明人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

IPC分类号： H01J37/18

CPC分类号： H01L21/67201 ,  Y10S414/139

摘要： A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a pressure sensor and multiple valves to atmosphere where at least one such valves is a passthrough valve for removal of and insertion of workpieces from and into a load lock interior. A second fast acting valve also opens to atmosphere. A pressure rise inside the loadlock interior is monitored and when the pressure reaches a threshold pressure above atmosphere the fast acting valve is opened to atmosphere. This second fast acting valve is configured to relieve overpressure from the passthrough valve prior to opening of said passthrough valve. Workpiece movement is accomplished with the aid of a robot which reaches into the loadlock interior as it is either depositing workpieces or retrieving them. This system and process minimizes particle contamination of the load lock interior as well as contamination in the region outside the loadlock near the passthrough valve and any scheduled workpieces.

摘要翻译： 用于对加载锁加压的控制。 该控制通过将气源连接到负载锁内部来启动负载锁内部的加压。 代表性的加载锁包括压力传感器和多个阀，其中至少一个这样的阀是用于从工作装置锁定内部移除和插入工件的直通阀。 第二个快动作阀也向大气敞开。 监控负载锁内部的压力上升，当压力达到高于大气压的阈值压力时，快速作用阀向大气开放。 该第二快动阀构造成在打开所述通气阀之前减轻通气阀的过压。 工件运动是借助于一个机器人来实现的，该机器人可以通过放置工件或检索它们而进入到装载锁内部。 该系统和过程最大限度地减少了负载锁内部的颗粒污染以及穿通阀附近的负载锁定区域和任何预定工件的污染。

公开(公告)号：US20070246658A1

公开(公告)日：2007-10-25

申请号：US11409759

申请日：2006-04-24

申请人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

发明人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

IPC分类号： H01J37/18

CPC分类号： H01L21/67201 ,  Y10S414/139

摘要： A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a pressure sensor and multiple valves to atmosphere where at least one such valves is a passthrough valve for removal of and insertion of workpieces from and into a load lock interior. A second fast acting valve also opens to atmosphere. A pressure rise inside the loadlock interior is monitored and when the pressure reaches a threshold pressure above atmosphere the fast acting valve is opened to atmosphere. This second fast acting valve is configured to relieve overpressure from the passthrough valve prior to opening of said passthrough valve. Workpiece movement is accomplished with the aid of a robot which reaches into the loadlock interior as it is either depositing workpieces or retrieving them. This system and process minimizes particle contamination of the load lock interior as well as contamination in the region outside the loadlock near the passthrough valve and any scheduled workpieces.

摘要翻译： 用于对加载锁加压的控制。 该控制通过将气源连接到负载锁内部来启动负载锁内部的加压。 代表性的加载锁包括压力传感器和多个阀，其中至少一个这样的阀是用于从工作装置锁定内部移除和插入工件的直通阀。 第二个快动作阀也向大气敞开。 监控负载锁内部的压力上升，当压力达到高于大气压的阈值压力时，快速作用阀向大气开放。 该第二快动阀构造成在打开所述通气阀之前减轻通气阀的过压。 工件运动是借助于一个机器人来实现的，该机器人可以通过放置工件或检索它们而进入到装载锁内部。 该系统和过程最大限度地减少了负载锁内部的颗粒污染以及穿通阀附近的负载锁定区域和任何预定工件的污染。