公开(公告)号：US09393590B2

公开(公告)日：2016-07-19

申请号：US13862579

申请日：2013-04-15

申请人： Temple University—Of the Commonwealth System of Higher Education

发明人： Svetlana Neretina ,  Robert Alan Hughes ,  Pouyan Farzinpour

IPC分类号： B05D1/32 ,  B82B3/00 ,  B81C1/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L29/66 ,  H01L29/06 ,  H01L29/16

CPC分类号： B05D1/32 ,  B81C1/00031 ,  B82B3/0014 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L29/0676 ,  H01L29/1606 ,  H01L29/66439 ,  H01L29/66469 ,  Y10T428/24942

摘要： Small structures are formed by applying to a substrate a structural material and a layer of a sacrificial material having a lower surface energy than the structural material, to form an intermediate product. The substrate is then heated to a temperature at which the sacrificial material evaporates or sublimes and the structural material is mobilized. The sacrificial material is permitted to evaporate or sublime, an area of the substrate covered by the sacrificial material to diminish, and the structural material to agglomerate on the remaining sacrificial material to form a structure.

公开(公告)号：US20130273340A1

公开(公告)日：2013-10-17

申请号：US13862579

申请日：2013-04-15

申请人： Temple University - Of the Commonwealth System of Higher Education

发明人： Svetlana Neretina ,  Robert Alan Hughes ,  Pouyan Farzinpour

IPC分类号： B05D1/32

CPC分类号： B05D1/32 ,  B81C1/00031 ,  B82B3/0014 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L29/0676 ,  H01L29/1606 ,  H01L29/66439 ,  H01L29/66469 ,  Y10T428/24942

摘要： Small structures are formed by applying to a substrate a structural material and a layer of a sacrificial material having a lower surface energy than the structural material, to form an intermediate product. The substrate is then heated to a temperature at which the sacrificial material evaporates or sublimes and the structural material is mobilized. The sacrificial material is permitted to evaporate or sublime, an area of the substrate covered by the sacrificial material to diminish, and the structural material to agglomerate on the remaining sacrificial material to form a structure.

摘要翻译： 通过向衬底施加结构材料和具有比结构材料低的表面能的牺牲材料层形成小结构，以形成中间产物。 然后将衬底加热到​​牺牲材料蒸发或升华并且结构材料被动员的温度。 允许牺牲材料蒸发或升华，由牺牲材料覆盖的基底的区域减少，并且结构材料在剩余的牺牲材料上附聚以形成结构。