公开(公告)号：US09036141B2

公开(公告)日：2015-05-19

申请号：US13526989

申请日：2012-06-19

申请人： Terumi Obuchi ,  Hiroshi Kikuchi ,  Yuji Inoue ,  Nobuhiro Obara ,  Kazuo Takahashi

发明人： Terumi Obuchi ,  Hiroshi Kikuchi ,  Yuji Inoue ,  Nobuhiro Obara ,  Kazuo Takahashi

IPC分类号： G01N21/00 ,  G01N21/88 ,  G01N21/95

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： A surface inspection apparatus includes a blocking unit included in a subsequent processing unit that groups data items into having an arbitrary number of data items. The subsequent processing unit acquires a data item from each of the blocks. The blocking unit changes, in accordance with an instruction transmitted from a state monitoring unit, the number of data items to be blocked. A threshold processing unit acquires data items from the blocking unit that have values larger than a threshold, and transmits the data items to a memory. The state monitoring unit monitors an available capacity of the memory. When the state monitoring unit detects a reduction in the available capacity of the memory, it causes the blocking unit to increase the number of data items to be blocked into each of the blocks so that data does not overflow from the memory.

摘要翻译： 表面检查装置包括在后续处理单元中包括的分组单元，其将数据项分组成具有任意数量的数据项。 后续处理单元从每个块获取数据项。 阻塞单元根据从状态监视单元发送的指令改变要被阻止的数据项的数量。 阈值处理单元从阻塞单元获取具有大于阈值的值的数据项，并将数据项发送到存储器。 状态监视单元监视存储器的可用容量。 当状态监视单元检测到存储器的可用容量的降低时，其使阻塞单元将要阻塞的数据项的数量增加到每个块中，使得数据不会从存储器溢出。

公开(公告)号：US08558999B2

公开(公告)日：2013-10-15

申请号：US12078097

申请日：2008-03-27

申请人： Koji Kawaki ,  Atsushi Takane ,  Hiroshi Kikuchi ,  Nobuhiro Obara ,  Yuji Inoue

发明人： Koji Kawaki ,  Atsushi Takane ,  Hiroshi Kikuchi ,  Nobuhiro Obara ,  Yuji Inoue

IPC分类号： G01N21/00

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： To provide a defect inspection apparatus and method adapted to easily assign threshold levels to scattered-light detectors and to appropriately acquire data detected by each scattered-light detector. The apparatus includes a stage device on which to rest a sample; a laser light irradiation device that irradiates the sample on the stage device with inspection light; scattered-light detectors, each of which detects a beam of light, scattered from the sample, and outputs an image signal; a threshold level setter formed so that an associated threshold level for judging whether defects are present is set only for an image signal selected from individual image signals of the scattered-light detectors or from image signals obtained by arithmetic processing based on the image signals, and a threshold level setting circuit that acquires the individual image signals, only if the image signal exceeds the threshold level set in the threshold level setter.

摘要翻译： 提供一种适于容易地将散射光检测器分配阈值并适当地采集由每个散射光检测器检测到的数据的缺陷检查装置和方法。 该装置包括：在其上放置样品的载物台; 激光照射装置，其用检查灯照射在台装置上的样品; 散射光检测器，每个检测从样品散射的光束，并输出图像信号; 阈值电平设定器形成为使得用于判断是否存在缺陷的关联阈值电平仅针对从散射光检测器的各个图像信号中选择的图像信号，或者根据基于图像信号的算术处理获得的图像信号进行设置， 只有当图像信号超过在阈值电平设定器中设定的阈值电平时，才能获取各个图像信号的阈值电平设定电路。

公开(公告)号：US20080239292A1

公开(公告)日：2008-10-02

申请号：US12078097

申请日：2008-03-27

申请人： Koji Kawaki ,  Atsushi Takane ,  Hiroshi Kikuchi ,  Nobuhiro Obara ,  Yuji Inoue

发明人： Koji Kawaki ,  Atsushi Takane ,  Hiroshi Kikuchi ,  Nobuhiro Obara ,  Yuji Inoue

IPC分类号： G01N21/00

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： To provide a defect inspection apparatus and defect inspection method adapted to make it possible to easily assign threshold levels to a plurality of scattered-light detectors and to appropriately acquire data detected by each of the scattered-light detectors.A defect inspection apparatus of this invention comprises: a stage device 50 on which to rest a wafer 1; a laser light irradiation device 30 that irradiates the wafer 1 on the stage device 50 with inspection light 31; scattered-light detectors 130-132, each of which detects a beam of light, 110-112, scattered from the wafer 1, and outputs an image signal 140a-142a; a threshold level setter 530 formed so that an associated threshold level for judging whether defects are present is set only for an image signal 151a selected from individual image signals 140a-142a of the scattered-light detectors 130-132 or from image signals 151a obtained by arithmetic processing based on the image signals 140a-142a, and; a threshold level setting circuit 160 that acquires the individual image signals 140a-142a, only if the image signal 151a exceeds the threshold level set in the threshold level setter 530.

摘要翻译： 提供一种适于使得可以容易地将多个散射光检测器分配阈值水平并适当地获取由每个散射光检测器检测的数据的缺陷检查装置和缺陷检查方法。 本发明的缺陷检查装置包括：搁置晶片1的平台装置50; 激光照射装置30，其用检查光31照射在台装置50上的晶片1; 散射光检测器130-132，每个检测从晶片1散射的光束110-112，并输出图像信号140a-142a; 形成为使得用于判断是否存在缺陷的关联阈值水平的阈值电平设定器530仅针对从散射光检测器130-132的各个图像信号140a-142a中选择的图像信号151a或从图像信号 151a，其通过基于图像信号140a至142a的算术处理获得， 只有图像信号151a超过在阈值电平设定器530中设定的阈值电平时才获取各个图像信号140a至142a的阈值电平设置电路160。