摘要:
There is provided an inertial drive actuator in which, a small-sizing is easy, including a first displacement generating mechanism of which, one end is adjacent to a fixed member, and a first displacement is generated in the other end thereof, a second displacement generating mechanism of which, one end is adjacent to the fixed member, and which generates a second displacement in the other end thereof, a driving mechanism which applies a voltage for displacing the first displacement generating mechanism and the second displacement generating mechanism, a vibration substrate which is connected to the other end of the first displacement generating mechanism and the other end of the second displacement generating mechanism, and which is displaceable in a plane in which, there exist a direction of the first displacement and a direction of the second displacement, a mobile object which is disposed to be facing the vibration substrate, and which moves with respect to the vibration substrate by an inertia with respect to a displacement of the vibration substrate, and a friction controlling mechanism which changes a frictional force between the mobile object and the vibration substrate.
摘要:
An inertial drive actuator includes a fixed member, a displacement generating mechanism of which, one end is adjacent to the fixed member, and a displacement is generated at the other end thereof, a driving mechanism which applies a voltage for displacing the displacement generating mechanism, a vibration substrate which is connected to the other end of the displacement generating mechanism, and which is displaceable in a direction of displacement, a mobile object which is disposed to be facing a vibration substrate electrode provided to the vibration substrate, and which moves with respect to the vibration substrate by an inertia, and a friction controlling mechanism which changes a frictional force between the mobile object and the vibration substrate. A regulating member which regulates the movement of the mobile object is provided to at least one of the fixed member and the vibration substrate such that the mobile object moves in a direction of displacement of the vibration substrate or in a direction other than the direction of displacement.
摘要:
A method includes an electrostatic capacitance detecting step of detecting electrostatic capacitances of opposing parts of a moving body side electrode and an oscillating plate electrode; an electrostatic capacitance storing step of storing the electrostatic capacitances at the first movement limit position and the second movement limit position detected at the electrostatic capacitance detecting step; a ratio calculating step of calculating a ratio of the electrostatic capacitances at the first movement limit position and the second movement limit position stored at the electrostatic capacitance storing step to a movement limit distance that is a distance between the first movement limit position and the second movement limit position; and an absolute position calculating step of calculating an absolute position of the moving body between the first movement limit position and the second movement limit position from the ratio.
摘要:
A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance is proposed. The calibration method includes driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving.