公开(公告)号：US20240364238A1

公开(公告)日：2024-10-31

申请号：US18631495

申请日：2024-04-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： TAKAMITSU MIYAZAKI

IPC: H02N2/06 ,  H02N2/02 ,  H04N23/67 ,  H04N23/68

CPC classification number: H02N2/062 ,  H02N2/026 ,  H04N23/67 ,  H04N23/683

Abstract: A control apparatus controls an actuator with a plurality of control signals, and includes a memory storing instructions, and a processor configured to execute the instructions to perform linear control to output a first operation amount based on a state amount of the actuator detected by a detector, perform nonlinear control to output a second operation amount based on the detected state amount, and output the plurality of control signals based on the first operation amount and the second operation amount.

公开(公告)号：US12117739B2

公开(公告)日：2024-10-15

申请号：US17629202

申请日：2020-06-30

Applicant: ASML Netherlands B.V.

Inventor： Bas Jansen ,  Koen Martin Willem Jan Bos ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/00 ,  H02N2/00 ,  H02N2/02 ,  H02N2/06

CPC classification number: G03F7/70783 ,  G03F7/70266 ,  G03F7/70716 ,  G03F7/70891 ,  H02N2/009 ,  H02N2/028 ,  H02N2/062

Abstract: Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.

公开(公告)号：US11664747B2

公开(公告)日：2023-05-30

申请号：US17338871

申请日：2021-06-04

Applicant: Silergy Semiconductor Technology (Hangzhou) LTD

Inventor： Zhiwei Xu ,  Chiqing Fang ,  Chen Zhao

IPC: H02N2/06 ,  H02M3/158 ,  H02M3/335

CPC classification number: H02N2/062 ,  H02M3/158 ,  H02M3/33584

Abstract: A driving circuit for driving a piezoelectric load, can include: a rechargeable power supply; a power stage circuit coupled between the rechargeable power supply and the piezoelectric load; where during a first operation interval of an operation period, the rechargeable power supply charges the piezoelectric load through the power stage circuit, such that a power supply voltage signal provided to the piezoelectric load in the first operation interval corresponds to a reference voltage in a first interval; and where during a second operation interval of the operation period, the piezoelectric load charges the rechargeable power supply through the power stage circuit, such that the power supply voltage signal in the second operation interval corresponds to the reference voltage in a second interval.

公开(公告)号：US20230162635A1

公开(公告)日：2023-05-25

申请号：US18152816

申请日：2023-01-11

Applicant: FUJIFILM Corporation

Inventor： Hirotoshi YOSHIZAWA ,  Shinichiro SONODA ,  Yoshikazu HISHINUMA ,  Nobuya TANAKA

IPC: G09G3/02 ,  G02B26/08 ,  G02B26/10 ,  H02N2/02 ,  H02N2/06 ,  G01B7/30

CPC classification number: G09G3/025 ,  G02B26/0858 ,  G02B26/101 ,  H02N2/028 ,  H02N2/062 ,  G01B7/30

Abstract: A processor applies a first driving signal having a first driving frequency to a first actuator, applies a second driving signal having a second driving frequency to a second actuator, generates a first angle detection signal by performing first frequency filter processing based on the first driving frequency on an output signal of a first angle detection sensor, generates a second angle detection signal by performing second frequency filter processing based on the second driving frequency on an output signal of a second angle detection sensor, derives a first angle, which is an angle of a mirror portion around a first axis, based on the first angle detection signal, derives a second angle, which is an angle of the mirror portion around a second axis, based on the second angle detection signal, adjusts the first driving signal based on the first angle, and adjusts the second driving signal based on the second angle.

公开(公告)号：US20230144997A1

公开(公告)日：2023-05-11

申请号：US17980557

申请日：2022-11-04

Applicant: SEIKO EPSON CORPORATION

Inventor： Ryuichi SATO

IPC: H02N2/14 ,  H02N2/02 ,  H02N2/06 ,  H02N2/10 ,  B25J9/12

CPC classification number: H02N2/142 ,  H02N2/026 ,  H02N2/062 ,  H02N2/103 ,  B25J9/12

Abstract: A method of controlling a piezoelectric driving apparatus including a vibration section that has a piezoelectric element and a transmission section that transmits vibration of the vibration section to a driven body, and, by energization of the piezoelectric element, vibrates the vibration section in a combination of longitudinal vibration and bending vibration to cause the transmission section to perform an elliptical motion and to move the driven body by the elliptical motion, the method of controlling the piezoelectric driving apparatus including switching, according to an external force received by the driven body, a drive algorithm of the piezoelectric driving apparatus between a first drive mode in which a separation amplitude, which is an amplitude of the longitudinal vibration, is changed while a feed amplitude, which is an amplitude of the bending vibration, is constant and a second drive mode in which both the feed amplitude and the separation amplitude are changed.

公开(公告)号：US20180138833A1

公开(公告)日：2018-05-17

申请号：US15574178

申请日：2016-06-03

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： Daan Anton van den Ende ,  Valentina Lavezzo ,  Eduard Gerard Marie Pelssers ,  Mark Thomas Johnson ,  Cornelis Petrus Hendriks

IPC: H02N2/06

CPC classification number: H02N2/062 ,  H01L41/042 ,  H01L41/053 ,  H01L41/0926 ,  H01L41/098 ,  H01L41/193

Abstract: An actuation device comprises at least one electroactive polymer (EAP) layer (52) attached to a carrier (50) and a mechanical structure (56, 58) which defines at least two stable states. The EAP layer is adapted, when driven, to interact with the mechanical structure to switch between the at least two stable states, wherein the mechanical structure retains the electroactive polymer layer in the selected stable state in a non-driven state. In this way, two or more stable states for the device are defined, which can be retained when the EAP is no longer driven.

公开(公告)号：US20170054388A1

公开(公告)日：2017-02-23

申请号：US15239510

申请日：2016-08-17

Applicant: New Scale Technologies, Inc.

Inventor： David A. Henderson ,  Qin Xu ,  Daniele Piazza

IPC: H02N2/06 ,  H03H9/17 ,  H03H9/205

CPC classification number: H03H9/176 ,  H02N2/025 ,  H02N2/062 ,  H02N2/067 ,  H03H9/205

Abstract: A stick-slip stage device includes a carriage assembly configured to support a payload, the carriage assembly comprising at least three piezoelectric stick-slip actuators each having one or more contact points. At least two rails are positioned on opposing sides of the carriage assembly and configured to interact with one or more of the contact points to form a guideway for movement of the carriage assembly. A fixed structure connects the at least two rails and is configured to generate a friction force between the at least two rails and one or more of the contact points of the at least three piezoelectric stick-slip actuators. A method of making a stick-slip stage device is also disclosed.

Abstract translation: 滑动平台装置包括构造成支撑有效载荷的托架组件，滑架组件包括至少三个压电粘滑滑动致动器，每个具有一个或多个接触点。 至少两个轨道定位在滑架组件的相对侧上并且被配置成与一个或多个接触点相互作用以形成用于滑架组件移动的导轨。 固定结构连接至少两个轨道，并且被构造成在所述至少两个轨道与所述至少三个压电粘滑致动器的一个或多个接触点之间产生摩擦力。 还公开了一种制作粘滑阶段装置的方法。

公开(公告)号：US20170019601A1

公开(公告)日：2017-01-19

申请号：US15208320

申请日：2016-07-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Jun Sumioka

IPC: H04N5/232 ,  H02N2/06 ,  G02B21/26 ,  G02B27/64 ,  H04N5/243 ,  G02B7/09

CPC classification number: H04N5/23296 ,  G02B7/09 ,  G02B21/26 ,  H02N2/0015 ,  H02N2/0075 ,  H02N2/008 ,  H02N2/026 ,  H02N2/06 ,  H02N2/062 ,  H04N5/2254 ,  H04N5/23212

Abstract: A control apparatus of a vibration actuator performs control of the vibration actuator using a control amount calculated using both of a first deviation which is a difference between a command value and a relative position, and a gain changed in accordance with a second deviation which is a difference between a target position and the relative position, so as to reduce the gain in accordance with reduction of the second deviation.

Abstract translation: 振动执行器的控制装置使用使用作为指令值和相对位置之间的差的第一偏差和根据作为指令值的相对位置之间的第二偏差而改变的增益计算的控制量来执行振动致动器的控制 目标位置和相对位置之间的差异，以便根据第二偏差的减小来减小增益。

公开(公告)号：US20170017137A1

公开(公告)日：2017-01-19

申请号：US15207347

申请日：2016-07-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hiromitsu Morita

IPC: G03B13/34 ,  H02N2/14 ,  G02B7/04

CPC classification number: G03B13/34 ,  G02B7/04 ,  G03B3/10 ,  H02N2/0015 ,  H02N2/026 ,  H02N2/062 ,  H02N2/14

Abstract: When stopping a vibration type actuator at a final target stopping position, driving frequency and phase difference of AC signals input to a piezoelectric element are set in accordance with a first deviation obtained from a command position sequentially determined and a relative position of a vibrating member and driven element, and also pulse duty is adjusted in accordance with a second deviation obtained from a final target stopping position and the relative position.

Abstract translation: 当在最终目标停止位置停止振动型致动器时，输入到压电元件的交流信号的驱动频率和相位差根据从顺序确定的指令位置获得的第一偏差和振动元件的相对位置 并且还根据从最终目标停止位置和相对位置获得的第二偏差来调节脉冲占空比。

公开(公告)号：US20160336879A1

公开(公告)日：2016-11-17

申请号：US15222387

申请日：2016-07-28

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shinya Kudo

IPC: H02N2/06 ,  H02N2/02

CPC classification number: H02N2/06 ,  H02N2/0015 ,  H02N2/008 ,  H02N2/026 ,  H02N2/062 ,  H02N2/103 ,  H02N2/142

Abstract: Provided is a control apparatus of a vibration-type actuator for generating an elliptical motion of contact portions by a common alternating current including a frequency determining unit for setting a frequency of the alternating current. The frequency determining unit sets the frequency of the alternating current for changing an ellipticity of the elliptical motion, within a frequency range such that ellipticity changing frequency ranges set for the vibrators are overlapped, and the ellipticity changing frequency ranges are set for the vibrators as frequency ranges between an upper limit and a lower limit, such that the lower limit is a maximum resonant frequency at a time of changing the ellipticity, and the upper limit is larger than the lower limit and is a maximum frequency for the relative movement of the driving member.

Abstract translation: 提供了一种用于通过公共交流产生接触部分的椭圆运动的振动型致动器的控制装置，包括用于设定交流电频率的频率确定单元。 频率确定单元设置用于改变椭圆运动的椭圆率的交流电流的频率，使得对于振动器设置的椭圆变化频率范围重叠的频率范围内，并且将振动器的椭圆变化频率范围设置为频率 范围在上限和下限之间，使得下限是改变椭圆率时的最大谐振频率，并且上限大于下限，并且是驱动的相对运动的最大频率 会员。