Spatial Light Modulators
    2.
    发明申请

    公开(公告)号:US20220224868A1

    公开(公告)日:2022-07-14

    申请号:US17146363

    申请日:2021-01-11

    Abstract: In a described example, a device includes: a semiconductor substrate; a memory array on the semiconductor substrate, the memory array comprising rows and columns of memory cells in a Manhattan pattern, the memory cells having a pitch in a direction along the columns; and an array of micromirrors in a diamond pattern over the memory cells, the micromirrors coupled to corresponding memory cells, the micromirrors having a diagonal pitch length in the direction along the columns that is between 1.8 times the pitch and 2.2 times the pitch.

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