WORDLINE CONTACT FORMATION FOR NAND DEVICE
    4.
    发明公开

    公开(公告)号:US20240363150A1

    公开(公告)日:2024-10-31

    申请号:US18640422

    申请日:2024-04-19

    摘要: Disclosed are approaches for wordline contact formation for 3D NAND devices. Methods may include providing a film stack of alternating first layers and second layers, forming a first lithography mask over the film stack, and performing a first series of alternating lithography and etch processes to form an array of contact opening pairs in the film stack, wherein an opening through the first lithography mask is expanded in a first direction following each etch process, and wherein a depth of the array of contact opening pairs varies in the first direction. The method may further include forming a second lithography mask over the film stack, and performing a second series of alternating lithography and etch processes, wherein an opening through the second lithography mask is expanded in a second direction following each etch process, and wherein the depth of the array of contact opening pairs varies in the second direction.

    Structures for word line multiplexing in three-dimensional memory arrays

    公开(公告)号:US12131794B2

    公开(公告)日:2024-10-29

    申请号:US17893681

    申请日:2022-08-23

    摘要: Methods, systems, and devices for structures for word line multiplexing in three-dimensional memory arrays are described. A memory die may include circuitry for access line multiplexing in regions adjacent to or between staircase regions. For example, a multiplexing region may include, for each word line of a stack of word lines, a respective first portion of a semiconductor material and a respective second portion of the semiconductor material, and may also include one or more gate material portions operable to modulate a conductivity between respective first and second portions. Each word line may be coupled with the respective first portion of the semiconductor material, such that biasing of the gate material portions may couple the word lines with the respective second portion of the semiconductor material. Such features may support various techniques for multiplexing associated with the stack of word lines, or among multiple stacks of word lines, or both.

    SWITCHES TO REDUCE ROUTING RAILS OF MEMORY SYSTEM

    公开(公告)号:US20240355364A1

    公开(公告)日:2024-10-24

    申请号:US18763048

    申请日:2024-07-03

    IPC分类号: G11C5/06

    CPC分类号: G11C5/063

    摘要: Disclosed herein are related to a memory array including a set of memory cells and a set of switches to configure the set of memory cells. In one aspect, each switch is connected between a corresponding local line and a corresponding subset of memory cells. The local clines may be connected to a global line. Local lines may be metal rails, for example, local bit lines or local select lines. A global line may be a metal rail, for example, a global bit line or a global select line. A switch may be enabled or disabled to electrically couple a controller to a selected subset of memory cells through the global line. Accordingly, the set of memory cells can be configured through the global line rather than a number of metal rails to achieve area efficiency.

    SEMICONDUCTOR DEVICE
    8.
    发明公开

    公开(公告)号:US20240341081A1

    公开(公告)日:2024-10-10

    申请号:US18388295

    申请日:2023-11-09

    IPC分类号: H10B12/00 G11C5/06

    摘要: A semiconductor device which includes a semiconductor substrate having a cell area and a peripheral area, the peripheral area including a first area and a second area adjacent to each other, first transistors on the first area, a first wiring layer on the first transistors, a first pad on the second area and a portion of the first area, a first contact plug between the first wiring layer and the first area, a second contact plug between the first pad and the first area, a second pad on the first wiring layer, a third contact plug between the second pad and the first wiring layer, and a plurality of first capacitors on the second pad and that vertically overlap the first transistors, thus reliability and electrical characteristics of the semiconductor device may be increased.

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

    公开(公告)号:US20240339135A1

    公开(公告)日:2024-10-10

    申请号:US18365726

    申请日:2023-08-04

    申请人: SK hynix Inc.

    IPC分类号: G11C5/06 H10B63/00 H10N70/00

    摘要: A semiconductor device may include a first contact plug, a word line electrically connected to the first contact plug and extending in a first direction, a second contact plug, a bit line extending in a second direction that intersects the first direction, and a memory cell disposed between the word line and the bit line and including a variable resistance layer. The bit line may include a first protruding part that protrudes into the memory cell, a second protruding part that is connected to the second contact plug, and a connection part that connects the first protruding part and the second protruding part and that extends in the second direction.

    Semiconductor structure and method for forming the same

    公开(公告)号:US12114486B2

    公开(公告)日:2024-10-08

    申请号:US17370323

    申请日:2021-07-08

    发明人: Wei Wan

    IPC分类号: H10B12/00 G11C5/06

    摘要: A semiconductor structure and a method for forming the same are provided. The method includes: providing a semiconductor substrate; determining a position of a bit line contact opening on a top surface of the semiconductor substrate and a top surface of a first dielectric layer; etching an active region, the first dielectric layer and an isolation structure exposed by the bit line contact opening according to the position of the bit line contact opening until the active region is etched to a preset depth to form a bit line contact window; and forming a second dielectric layer on a surface of the isolation structure and a surface of the first dielectric layer that have a depth greater than a depth of a surface of the active region in the bit line contact window.