公开(公告)号：US11041901B2

公开(公告)日：2021-06-22

申请号：US16297972

申请日：2019-03-11

Applicant: Texas Instruments Incorporated

Inventor： Pavan Pakala ,  Indumini Ranmuthu

IPC: G01R31/26 ,  G01R31/28 ,  G01R1/073 ,  G06F13/40

Abstract: A wafer test probe system, probe card, and method to test back-to-back connected first and second transistors of a wafer. The probe card includes a waveform generator circuit and probe needles to couple the waveform generator circuit to provide a first pulse signal of a first polarity using a body diode of the first transistor to test the second transistor, and to provide a second pulse signal of a second polarity using a body diode of the second transistor to the test the first transistor. One example includes a resistor connected between the waveform generator circuit and one of the probe needles. The probe card includes a probe needle to connect a sense transistor of the wafer to the first transistor during wafer probe testing.

公开(公告)号：US20200292610A1

公开(公告)日：2020-09-17

申请号：US16297972

申请日：2019-03-11

Applicant: Texas Instruments Incorporated

Inventor： Pavan Pakala ,  Indumini Ranmuthu

IPC: G01R31/26 ,  G01R31/28 ,  G06F13/40 ,  G01R1/073

Abstract: A wafer test probe system, probe card, and method to test back-to-back connected first and second transistors of a wafer. The probe card includes a waveform generator circuit and probe needles to couple the waveform generator circuit to provide a first pulse signal of a first polarity using a body diode of the first transistor to test the second transistor, and to provide a second pulse signal of a second polarity using a body diode of the second transistor to the test the first transistor. One example includes a resistor connected between the waveform generator circuit and one of the probe needles. The probe card includes a probe needle to connect a sense transistor of the wafer to the first transistor during wafer probe testing.