HIGHER ORDER LAMB WAVE ACOUSTIC DEVICES WITH COMPLEMENTARILY-ORIENTED PIEZOELECTRIC LAYERS

    公开(公告)号:US20230039934A1

    公开(公告)日:2023-02-09

    申请号:US17863586

    申请日:2022-07-13

    IPC分类号: H03H9/02 H03H9/13 H03H9/30

    摘要: A device includes a stack of at least two piezoelectric layers configured to propagate a Lamb wave in a mode having an order corresponding to a number of piezoelectric layers of the stack. The stack includes a first piezoelectric layer and a second piezoelectric layer disposed on the first piezoelectric layer. The first piezoelectric layer has a first cut plane orientation, and the second piezoelectric layer has a second cut plane orientation complementary to the first cut plane orientation. The device further includes an interdigitated transducer (IDT) disposed on at least a top surface of the stack or a bottom surface of the stack. In some embodiments, the device is an acoustic resonator. In some embodiments, the device is an acoustic delay line.

    INTERDIGITAL TRANSDUCERS ON A PIEZOELECTRIC THIN-FILM FOR SIGNAL COMPRESSION

    公开(公告)号:US20190131953A1

    公开(公告)日:2019-05-02

    申请号:US16175439

    申请日:2018-10-30

    摘要: A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer (IDT) having first interdigitated electrodes is disposed at different locations along the horizontal axis and on the first side of the piezoelectric thin-film. Each opposing pair of the first interdigitated electrodes is to selectively transduce a particular frequency range of an input electrical signal that varies in frequency over time into an acoustic wave of a laterally vibrating mode based on a pitch between electrodes of the opposing pair. An output IDT that includes second interdigitated electrodes is disposed at different locations along the horizontal axis and on the second side of the piezoelectric thin-film. Each opposing pair of the second interdigitated electrodes is to convert the acoustic wave transduced by the respective opposing pair of the first interdigitated electrodes into a compressed pulse.