HIGHER ORDER LAMB WAVE ACOUSTIC DEVICES WITH COMPLEMENTARILY-ORIENTED PIEZOELECTRIC LAYERS

    公开(公告)号:US20230039934A1

    公开(公告)日:2023-02-09

    申请号:US17863586

    申请日:2022-07-13

    IPC分类号: H03H9/02 H03H9/13 H03H9/30

    摘要: A device includes a stack of at least two piezoelectric layers configured to propagate a Lamb wave in a mode having an order corresponding to a number of piezoelectric layers of the stack. The stack includes a first piezoelectric layer and a second piezoelectric layer disposed on the first piezoelectric layer. The first piezoelectric layer has a first cut plane orientation, and the second piezoelectric layer has a second cut plane orientation complementary to the first cut plane orientation. The device further includes an interdigitated transducer (IDT) disposed on at least a top surface of the stack or a bottom surface of the stack. In some embodiments, the device is an acoustic resonator. In some embodiments, the device is an acoustic delay line.

    Wireless power transfer at chip scale

    公开(公告)号:US11211820B2

    公开(公告)日:2021-12-28

    申请号:US15979065

    申请日:2018-05-14

    摘要: An inductive wireless power transfer apparatus includes a source coil coupled to a power source such that current flows through the source coil when the source coil is excited by the power source. The apparatus further includes a first capacitor coupled in series to the source coil. The apparatus further includes an intermediate coil surrounding the source coil and positioned within an identical plane as the source coil, and a second capacitor coupled in series to the intermediate coil. The capacitances of the first capacitor and the second capacitor are set to tune out self-inductances of the source coil and the intermediate coil. In embodiments, the source coil is to inductively power the intermediate coil, which is to inductively power a load coil positioned a distance away from the intermediate coil.

    Spurious-mode-free, laterally-vibrating microelectromechanical system resonators

    公开(公告)号:US10476469B2

    公开(公告)日:2019-11-12

    申请号:US15434829

    申请日:2017-02-16

    摘要: A micro-resonator includes a first electrode positioned on a piezoelectric plate at a first end of the piezoelectric plate, the first electrode including a first set of fingers and a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate. The second electrode including a second set of fingers interdigitated with the first set of fingers with an overlapping distance without touching the first set of fingers, the overlapping distance being less than seven-tenths the length of one of the first set of fingers or the second set of fingers. At least one of the first end or the second end of the piezoelectric plate may define a curved shape.

    Uncooled, high sensitivity spectral selective infrared detector

    公开(公告)号:US10168221B2

    公开(公告)日:2019-01-01

    申请号:US15462238

    申请日:2017-03-17

    摘要: An infrared (IR) detector comprises a radio frequency (RF) resonator including a bottom electrode to provide acoustic excitation, a piezoelectric layer connected to the bottom electrode and suspended over a cavity defined within a semiconductor substrate, and a top layer comprising a mid-IR metamaterial and which is connected to the piezoelectric layer of the RF resonator. The top layer and the piezoelectric layer are sized to impedance match with a particular IR wavelength, to minimize reflection and maximize absorption of a particular IR wavelength, and thus make the top layer polarization sensitive to the particular IR wavelength.

    INTERDIGITAL TRANSDUCERS ON A PIEZOELECTRIC THIN-FILM FOR SIGNAL COMPRESSION

    公开(公告)号:US20190131953A1

    公开(公告)日:2019-05-02

    申请号:US16175439

    申请日:2018-10-30

    摘要: A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer (IDT) having first interdigitated electrodes is disposed at different locations along the horizontal axis and on the first side of the piezoelectric thin-film. Each opposing pair of the first interdigitated electrodes is to selectively transduce a particular frequency range of an input electrical signal that varies in frequency over time into an acoustic wave of a laterally vibrating mode based on a pitch between electrodes of the opposing pair. An output IDT that includes second interdigitated electrodes is disposed at different locations along the horizontal axis and on the second side of the piezoelectric thin-film. Each opposing pair of the second interdigitated electrodes is to convert the acoustic wave transduced by the respective opposing pair of the first interdigitated electrodes into a compressed pulse.