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公开(公告)号:US11994635B2
公开(公告)日:2024-05-28
申请号:US17233441
申请日:2021-04-17
发明人: Zishan Hameed , John Gats , Jin-Woo Han , Meyya Meyyappan
CPC分类号: G01T3/08 , B81B7/0058 , B81B2201/031 , B81B2203/04 , B82Y30/00
摘要: A MEMS nanotube based radiation sensor that is low cost, low power, compact, reliable and is applicable across many fields and a method for fabricating such a sensor are described. Each sensor may be connected to an array of similar but distinct sensors that leverage different materials and nanotube technology to detect radiation.