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公开(公告)号：US20190094194A1
公开(公告)日：2019-03-28
申请号：US16112680
申请日：2018-08-25
摘要： Contaminant cleaning systems and related methods are provided. Exemplary embodiments include a reactive substance generator to produce or transfer reactive substance(s) that react with contaminant(s) on an item into a cleaning chamber. An analysis section can be attached to the cleaning chamber to perform gas analysis on gas samples brought into the analysis chamber that measure reaction byproducts from the reactive substance(s) interaction with the contaminants. An exemplary valve system can selectively couple the reactive substance generator, the analysis section, and the cleaning chamber. An exemplary pumping system, in combination with the valve system, can selectively generate differential pressure/vacuum levels between the reactive substance generator vs cleaning chamber as well as between the cleaning chamber and analysis section. For example, the analysis chamber can be configured to have a higher vacuum than the cleaning chamber to facilitate passage of gas test samples into the analysis chamber.
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公开(公告)号：US10746713B2
公开(公告)日：2020-08-18
申请号：US16112680
申请日：2018-08-25
摘要： Contaminant cleaning systems and related methods are provided. Exemplary embodiments include a reactive substance generator to produce or transfer reactive substance(s) that react with contaminant(s) on an item into a cleaning chamber. An analysis section can be attached to the cleaning chamber to perform gas analysis on gas samples brought into the analysis chamber that measure reaction byproducts from the reactive substance(s) interaction with the contaminants. An exemplary valve system can selectively couple the reactive substance generator, the analysis section, and the cleaning chamber. An exemplary pumping system, in combination with the valve system, can selectively generate differential pressure/vacuum levels between the reactive substance generator vs cleaning chamber as well as between the cleaning chamber and analysis section. For example, the analysis chamber can be configured to have a higher vacuum than the cleaning chamber to facilitate passage of gas test samples into the analysis chamber.
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3.发明申请CONTAMINANT CLEANING SYSTEMS AND RELATED METHODS USING ONE OR MORE REACTIVE SUBSTANCES, REACTION BYPRODUCT MEASUREMENTS, AND DIFFERENTIAL PRESSURE OR VACUUM TRANSFER OF THE REACTIVE SUBSTANCES AND REACTION BYPRODUCTS 审中-公开污染物清洁系统和使用一个或多个反应物质的相关方法，通过产品测量的反应以及反应物质的差异压力或真空转移以及副产物的反应公开(公告)号：US20170050223A1
公开(公告)日：2017-02-23
申请号：US15243769
申请日：2016-08-22
CPC分类号： G01N33/0009 , H01J37/32862 , H01J37/32981
摘要： Contaminant cleaning systems and related methods are provided. Exemplary embodiments include a reactive substance generator to produce or transfer reactive substance(s) that react with contaminant(s) on an item into a cleaning chamber. An analysis section can be attached to the cleaning chamber to perform gas analysis on gas samples brought into the analysis chamber that measure reaction byproducts from the reactive substance(s) interaction with the contaminants. An exemplary valve system can selectively couple the reactive substance generator, the analysis section, and the cleaning chamber. An exemplary pumping system, in combination with the valve system, can selectively generate differential pressure/vacuum levels between the reactive substance generator vs cleaning chamber as well as between the cleaning chamber and analysis section. For example, the analysis chamber can be configured to have a higher vacuum than the cleaning chamber to facilitate passage of gas test samples into the analysis chamber.
摘要翻译： 提供污染物清洁系统及相关方法。 示例性实施例包括用于产生或转移与物品上的污染物反应进入清洁室的反应物质的反应物质发生器。 分析部分可以连接到清洁室，以对进入分析室的气体样品进行气体分析，测量来自反应物质与污染物的相互作用的反应副产物。 示例性的阀系统可以选择性地联接反应物质发生器，分析部分和清洁室。 与阀系统组合的示例性泵送系统可以选择性地在反应物质发生器与清洁室之间以及清洁室和分析部之间产生差压/真空水平。 例如，分析室可被配置为具有比清洁室更高的真空度，以便气体测试样品通过分析室。
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