公开(公告)号：US20050128460A1

公开(公告)日：2005-06-16

申请号：US10735846

申请日：2003-12-16

申请人： Petrus Marinus Van Den Biggelaar ,  Henrikus Cox ,  Yin Tso ,  Sjoerd Donders ,  Theodorus Knoops

发明人： Petrus Marinus Van Den Biggelaar ,  Henrikus Cox ,  Yin Tso ,  Sjoerd Donders ,  Theodorus Knoops

IPC分类号： G03F7/20 ,  H01L21/027 ,  G03B27/58

CPC分类号： G03F7/70508 ,  G03F7/70725

摘要： In a lithographic projection apparatus and a device manufacturing method, a movable part is controlled to produce a motion, an absolute value of at least one of a fourth and a higher derivative to time of the position of the motion being limited to less than a maximal value. Specifying at least one of a fourth and a higher derivative to time of the position may help to improve settling behavior to obtain more accurate positioning. Further, a movable part may be controlled to produce an acceleration of the movable part having a high at least one of a third and a higher derivative to time of the position of the motion at a start portion of the acceleration and a corresponding low at least one of a third and a higher derivative to time of the position of the motion at an end portion of the acceleration, the absolute value of the high at least one of the third and the higher derivative to time of the position of the motion being larger than the absolute value of the corresponding low at least one of the third and the higher derivative to time of the position of the motion.

摘要翻译： 在光刻投影装置和装置制造方法中，可动部被控制以产生运动，将运动位置的第四和更高的导数与时间中的至少一个的绝对值限制为小于最大值 值。 指定位置的时间的第四和更高的派生中的至少一个有助于改善沉降行为以获得更准确的定位。 此外，可以控制可移动部分，以产生具有高于加速度起始部分处的运动位置的第三和更高导数的至少一个的可移动部分的加速度，并且至少一个对应的低 对加速度的端部处的运动位置的时间的三分之一或更高的导数之一，运动位置的第三和更高的导数与时间的高度的绝对值较大 比相应的低的运动的位置的时间的第三和更高的导数中的至少一个的绝对值。

公开(公告)号：US07016019B2

公开(公告)日：2006-03-21

申请号：US10735846

申请日：2003-12-16

申请人： Petrus Marinus Christianus Maria Van Den Biggelaar ,  Henrikus Herman Marie Cox ,  Yin Tim Tso ,  Sjoerd Nicolaas Lambertus Donders ,  Theodorus Knoops

发明人： Petrus Marinus Christianus Maria Van Den Biggelaar ,  Henrikus Herman Marie Cox ,  Yin Tim Tso ,  Sjoerd Nicolaas Lambertus Donders ,  Theodorus Knoops

IPC分类号： G03B27/58 ,  G03B27/42

CPC分类号： G03F7/70508 ,  G03F7/70725

摘要： In a lithographic projection apparatus and a device manufacturing method, a movable part is controlled to produce a motion, an absolute value of at least one of a fourth and a higher derivative to time of the position of the motion being limited to less than a maximal value. Specifying at least one of a fourth and a higher derivative to time of the position may help to improve settling behavior to obtain more accurate positioning. Further, a movable part may be controlled to produce an acceleration of the movable part having a high at least one of a third and a higher derivative to time of the position of the motion at a start portion of the acceleration and a corresponding low at least one of a third and a higher derivative to time of the position of the motion at an end portion of the acceleration, the absolute value of the high at least one of the third and the higher derivative to time of the position of the motion being larger than the absolute value of the corresponding low at least one of the third and the higher derivative to time of the position of the motion.

摘要翻译： 在光刻投影装置和装置制造方法中，可动部被控制以产生运动，将运动位置的第四和更高的导数与时间中的至少一个的绝对值限制为小于最大值 值。 指定位置的时间的第四和更高的派生中的至少一个有助于改善沉降行为以获得更准确的定位。 此外，可以控制可移动部分，以产生具有高于加速度起始部分处的运动位置的第三和更高导数的至少一个的可移动部分的加速度，并且至少一个对应的低 对加速度的端部处的运动位置的时间的三分之一或更高的导数之一，运动位置的第三和更高的导数与时间的高度的绝对值较大 比相应的低的运动的位置的时间的第三和更高的导数中的至少一个的绝对值。

公开(公告)号：US4026539A

公开(公告)日：1977-05-31

申请号：US539335

申请日：1975-01-08

申请人： Theodorus Knoops

发明人： Theodorus Knoops

IPC分类号： B07C3/00 ,  B65H29/00 ,  B65H29/60 ,  B65H39/11 ,  G03G15/00

CPC分类号： G03G15/6538 ,  B07C3/00 ,  B65H29/00 ,  B65H29/60 ,  B65H39/11 ,  B65H2408/111

摘要： Device for the assorted collection of sheets, comprising a transport track and bins situated along this track. The bins are provided with guide organs and each bin can be moved so that its guide organ protrudes into the track so as to guide a sheet into a bin. In the transport track the sheets are transported by means of belts running around a vacuum holddown device so as to hold the sheets onto the belts. The device may be arranged to receive copy sheets exiting from a copying apparatus and may be operated selectively in a first mode in which all similar copy sheets are delivered to a particular bin, or in a second mode in which sheets are collated into a predetermined number of bins. Control circuitry is provided which includes a memory unit for storing a signal condition indicative of delivery of a copy sheet into the last bin of the predetermined number of bins and a manually operable switch for actuating the device to collate a subsequent series of sheets into bins subsequent to the last bin previously utilized.

摘要翻译： 用于各种收集纸张的装置，包括沿着该轨道定位的运输轨道和箱。 箱体设置有导向器官，并且可以移动每个仓，使得其引导器器突出到轨道中，以将片材引导到垃圾箱中。 在运输轨道中，纸张通过围绕真空压紧装置运行的带运输，以便将纸张保持在带上。 该设备可以被布置成接收从复印设备退出的复印纸，并且可以在所有类似的复印纸被传送到特定纸箱的第一模式中选择性地操作，或者在将纸张整理成预定数量的第二模式 的箱子。 提供了控制电路，其包括用于存储指示将复印纸传送到预定数量的箱的最后一个箱中的信号条件的存储器单元和用于致动该装置以将随后的一系列纸张整理成料仓的手动操作的开关 到之前使用的最后一个垃圾桶。