公开(公告)号：US06975442B2

公开(公告)日：2005-12-13

申请号：US10474410

申请日：2002-04-12

申请人： Thomas Gessner ,  Wolfram Doetzel ,  Christian Kaufmann ,  Jan Mehner ,  Ramon Hahn ,  Steffen Kurt

发明人： Thomas Gessner ,  Wolfram Doetzel ,  Christian Kaufmann ,  Jan Mehner ,  Ramon Hahn ,  Steffen Kurt

IPC分类号： B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  H04N1/113

CPC分类号： G02B26/105 ,  B81B3/004 ,  B81B2201/047 ,  G02B26/0841

摘要： A resonance scanner, wherein a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1), said drive plate (4) being attached within the frame (3) by two first torsion springs (6) such that the drive plate (4) can oscillate about a common first axis of torsion (8) of both torsion springs (6), said mirror (5) being attached within the drive plate (4) by two second torsion springs (7) such that the mirror (5) can oscillate about a common second axis of torsion (9) of both torsion springs (7), and said first axis of torsion (8) and said second axis of torsion (9) being parallel to each other; wherein, further, only the frame (3) of the actuator part (1) is attached to side walls (10) of a box-shaped stator part (2), a drive means (stator electrodes 15 or coil 24) is arranged at a bottom (11) of the stator part (2) only in the region of the geometrical surface area of the drive plate (4) and said bottom (11) has a recess (13) in the region of the geometrical surface area of the mirror (5), which recess (13) is dimensioned at least such that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11), said drive means (stator electrodes 15 or coil 24) applying a force only directly to the drive plate (4) and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (5), which differs from the eigenfrequency of the drive plate (4).

摘要翻译： 一种共振扫描器，其中框架（3），驱动板（4），反射镜（5）和扭转弹簧（6,7）形成致动器部分（1），所述驱动板（4）附接在框架 （3）通过两个第一扭转弹簧（6），使得驱动板（4）能够围绕两个扭转弹簧（6）的公共第一扭转轴线（8）摆动，所述反射镜（5）附接在驱动板 （4）通过两个第二扭转弹簧（7），使得所述反射镜（5）可围绕两个扭转弹簧（7）的公共第二扭转轴线（9）摆动，并且所述第一扭转轴线（8）和所述第二扭转弹簧 扭转轴（9）彼此平行; 其特征在于，只有将致动器部件（1）的框架（3）安装在箱形定子部件（2）的侧壁（10）上，驱动装置（定子电极15或线圈24） 定子部分（2）的底部（11）仅在驱动板（4）的几何表面区域和所述底部（11）的区域中具有在所述驱动板（4）的几何表面积的区域中的凹部（13） 反射镜（5），该凹部（13）的尺寸至少使得反射镜（5）的最大机械偏转不受底部（11）限制，所述驱动装置（定子电极15或线圈24）施加力 仅直接到驱动板（4）并且具有周期性功能的所述力，其周期被调谐到与驱动板（4）的本征频率不同的反射镜（5）的本征频率。

公开(公告)号：US08186225B2

公开(公告)日：2012-05-29

申请号：US12301874

申请日：2007-05-09

申请人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

发明人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

IPC分类号： G01L11/00

CPC分类号： G01L21/22

摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.

摘要翻译： 本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5） ）和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过 质量元件（1）。 至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件（1）。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。

公开(公告)号：US20100024562A1

公开(公告)日：2010-02-04

申请号：US12301874

申请日：2007-05-09

申请人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

发明人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

IPC分类号： G01L21/22

CPC分类号： G01L21/22

摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.

摘要翻译： 本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5） ）和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过 质量元件（1）。 至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件（1）。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。