公开(公告)号：US07979987B2

公开(公告)日：2011-07-19

申请号：US11949509

申请日：2007-12-03

申请人： Thomas R. Strand ,  Manish Giri ,  Jeremy Donaldson ,  William A. Keese ,  Mohammed Shaarawi ,  Randall Orson Willard

发明人： Thomas R. Strand ,  Manish Giri ,  Jeremy Donaldson ,  William A. Keese ,  Mohammed Shaarawi ,  Randall Orson Willard

IPC分类号： B41J2/145

CPC分类号： B41J2/1631 ,  B41J2/1603 ,  B41J2/1606 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1645 ,  Y10T29/49401

摘要： A method of manufacturing a fluid ejection device includes providing a barrier layer and an orifice layer on a substrate, laminating a layer of photo-resist over a substantially planar surface of the orifice layer, forming an orifice in the orifice layer, and forming a counterbore in the layer of photo-resist, with forming a counterbore in the layer of photo-resist including exposing a portion of the substantially planar surface of the orifice layer within the counterbore.

摘要翻译： 制造流体喷射装置的方法包括在基底上设置阻挡层和孔口层，在孔层的基本上平坦的表面上层叠光致抗蚀剂层，在孔层中形成孔口，并形成沉孔 在光致抗蚀剂层中，在光致抗蚀剂层中形成沉孔，包括暴露在沉孔内的孔层的基本上平坦的表面的一部分。

公开(公告)号：US07325309B2

公开(公告)日：2008-02-05

申请号：US10864220

申请日：2004-06-08

申请人： Thomas R. Strand ,  Manish Giri ,  Jeremy Donaldson ,  William A. Keese ,  Mohammed Shaarawi ,  Randall Orson Willard

发明人： Thomas R. Strand ,  Manish Giri ,  Jeremy Donaldson ,  William A. Keese ,  Mohammed Shaarawi ,  Randall Orson Willard

IPC分类号： H05B3/10

CPC分类号： B41J2/1631 ,  B41J2/1603 ,  B41J2/1606 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1645 ,  Y10T29/49401

摘要： Methods of manufacturing a fluid ejection device comprise, in one embodiment, forming filler structures on a substrate and laminating a dry film onto the substrate over the filler structures. The dry film defines a barrier layer around the filler structures and an orifice layer above the filler structures. The filler structures are removed to form voids within the barrier layer.

摘要翻译： 在一个实施例中，制造流体喷射装置的方法包括在衬底上形成填充结构并且在填料结构上将干膜层压到衬底上。 干膜限定了围绕填料结构的阻挡层和在填料结构之上的孔层。 去除填料结构以在阻挡层内形成空隙。

公开(公告)号：US5627373A

公开(公告)日：1997-05-06

申请号：US664578

申请日：1996-06-17

申请人： William A. Keese

发明人： William A. Keese

IPC分类号： H01J37/26 ,  H01J37/252

CPC分类号： H01J37/265 ,  H01J2237/1501 ,  H01J2237/1532 ,  H01J2237/28

摘要： A border of a circular specimen defining a high contrast feature is imaged. Multiple border portions are sampled at a magnification showing each portion as a straight edge. For alignment a location indicator signal is generated at each of minimum and maximum focal range. Image translation is detected from the two signals, and alignment automatically adjusted. The process repeats for subsequent border portions at a 90.degree. interval until image translation falls for a sample is less than a threshold. For astigmatism correction border portions are sampled about the entire specimen circumference at a 30.degree. interval. An axis of beam distortion is identified based upon a maximum image translation axis among the samples. Distortion is adjusted along such axis. Then, astigmatism connection signal strength is indexed and astigmatism correction is repeated iteratively until correction for a current iteration is less than a given threshold.

摘要翻译： 成像定义高对比度特征的圆形样本的边界。 以显示每个部分为直边的放大倍率对多个边界部分进行采样。 为了对准，在最小和最大焦距范围的每一个处产生位置指示器信号。 从两个信号中检测出图像转换，并对齐自动调整。 该过程对于随后的边界部分以90度间隔重复，直到样品的图像平移下降小于阈值。 对于散光校正边界部分以30度间隔围绕整个样本周长取样。 基于样本中的最大图像平移轴来识别光束失真的轴。 扭曲沿着此轴调整。 然后，对像散连接信号强度进行索引，并且迭代地重复像散校正，直到当前迭代的校正小于给定阈值。