Fluid ejection devices and methods of fabrication
    4.
    发明授权
    Fluid ejection devices and methods of fabrication 有权
    流体喷射装置和制造方法

    公开(公告)号:US07909428B2

    公开(公告)日:2011-03-22

    申请号:US11495241

    申请日:2006-07-28

    Abstract: A fluid ejection device includes a fluidic layer assembly mounted to a substrate, the fluidic layer assembly having a raised portion formed on a side that faces away from the substrate. A first nozzle is formed through a portion of the fluidic layer assembly other than the raised portion, and a second, larger nozzle is formed through the raised portion. A method of fabricating a fluid ejection device includes applying a first layer of a photoresist material to a substrate and a second layer of a photoresist material to the first layer. A sequence of exposures defines a first region of soluble material in the first layer that becomes the first nozzle and second and third regions of soluble material in the first and second layers, respectively, that jointly become the second nozzle. A region of insoluble material in the second layer becomes the raised portion.

    Abstract translation: 流体喷射装置包括安装到基底的流体层组件,流体层组件具有形成在远离基底的一侧上的凸起部分。 第一喷嘴通过除了凸起部分之外的流体层组件的一部分形成,并且通过凸起部分形成第二较大的喷嘴。 制造流体喷射装置的方法包括将光致抗蚀剂材料的第一层施加到基底,将第二层光致抗蚀剂材料施加到第一层。 曝光序列限定第一层中的可溶性材料的第一区域,其分别成为共同成为第二喷嘴的第一和第二层中的第一喷嘴和可溶性材料的第二和第三区域。 第二层中不溶物的区域变成凸起部分。

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