公开(公告)号：US20250034711A1

公开(公告)日：2025-01-30

申请号：US18778472

申请日：2024-07-19

Applicant: Tokyo Electron Limited

Inventor： Gaku WATANABE ,  Morihito INAGAKI

IPC: C23C16/458 ,  C23C16/455 ,  C23C16/52

Abstract: A substrate processing apparatus includes a processing container, a rotary table, a stage, an imaging device, and a controller. The rotary table includes a rotary table side marker capable of being positioned within an imaging range of the imaging device. The stage includes a stage side marker capable of being positioned within the imaging range of the imaging device. The controller recognizes a circumferential position of the rotary table based on the rotary table side marker included in the imaging information, and corrects a position of the rotary table when the rotary table side marker is misaligned. Further, the controller recognizes a circumferential position of the stage based on the stage side marker included in the imaging information, and corrects a position of the stage when the stage side marker is misaligned.

公开(公告)号：US20240297061A1

公开(公告)日：2024-09-05

申请号：US18589816

申请日：2024-02-28

Applicant: Tokyo Electron Limited

Inventor： Ryoya TOMINAGA ,  Akashi FUJIO ,  Masami DODO ,  Gaku WATANABE ,  Hiroyuki WADA

IPC: H01L21/68 ,  H01L21/687

CPC classification number: H01L21/681 ,  H01L21/68742 ,  H01L21/68764 ,  H01L21/68771

Abstract: A substrate processing apparatus includes a vacuum container, a rotary table, a stage, a lifter, and a controller that controls an operation of the lifter. The controller automatically sets a control position in the operation of the lifter. The controller, in (A), repeatedly raises the lifter by a first pitch and then determines whether or not the lifter has come into contact with a substrate, thereby bring the lifter to come into contact with the substrate to set a next position. The controller, in (B), repeatedly raises the lifter from the next position by a second pitch shorter than the first pitch and then determines whether or not the lifter has come into contact with the substrate, thereby detecting a touch position and calculating the control position based on the touch position.