公开(公告)号：US20210234248A1

公开(公告)日：2021-07-29

申请号：US17155618

申请日：2021-01-22

Applicant: Tokyo Electron Limited

Inventor： Isao TAKAHASHI ,  Hiroyuki MIYASHITA ,  Yuki OSADA ,  Mitsuya INOUE ,  Mitsutoshi ASHIDA

IPC: H01P5/18 ,  H05H1/46

Abstract: A directional coupler includes: a hollow coaxial line including a central conductor forming a main line and an outer conductor surrounding the central conductor and having an opening formed therein; a dielectric substrate covering the opening and provided with film-shaped ground conductors, wherein a film-shaped ground conductor covers a rear surface of the dielectric substrate facing the central conductor via the opening and a film-shaped ground conductor covers a front surface of the dielectric substrate, respectively, and are grounded; and a coupling line provided on the rear surface of the dielectric substrate in a region surrounded by the ground conductor formed on the rear surface and serving as an auxiliary line, wherein the ground conductor formed on the front surface is provided with a conductor-removed portion in which a portion of a conductor film in a region facing the coupling line via the dielectric substrate is removed.