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公开(公告)号：US20230278322A1
公开(公告)日：2023-09-07
申请号：US18145107
申请日：2022-12-22
Applicant: Tokyo Electron Limited
Inventor： Kei Tashiro , Katsuhiro Iino
Abstract: A bonding method includes attracting and holding a first substrate by using a first holder; attracting and holding a second substrate by using a second holder; and forming a combined substrate by moving the first holder and the second holder relative to each other to bring the first substrate and the second substrate into contact with each other. The bonding method includes heating the first substrate and the second substrate or the combined substrate; and cooling the heated combined substrate by using a cooling unit. In the cooling, bending of the combined substrate is controlled by forming a temperature difference in the combined substrate.
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公开(公告)号：US11931995B2
公开(公告)日：2024-03-19
申请号：US18145107
申请日：2022-12-22
Applicant: Tokyo Electron Limited
Inventor： Kei Tashiro , Katsuhiro Iino
Abstract: A bonding method includes attracting and holding a first substrate by using a first holder; attracting and holding a second substrate by using a second holder; and forming a combined substrate by moving the first holder and the second holder relative to each other to bring the first substrate and the second substrate into contact with each other. The bonding method includes heating the first substrate and the second substrate or the combined substrate; and cooling the heated combined substrate by using a cooling unit. In the cooling, bending of the combined substrate is controlled by forming a temperature difference in the combined substrate.
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3.发明授权Wiping pad, and nozzle maintenance apparatus and coating treatment apparatus using wiping pad 有权擦拭垫，喷嘴维护装置和使用擦拭垫的涂布处理装置公开(公告)号：US09468946B2
公开(公告)日：2016-10-18
申请号：US14374685
申请日：2013-01-17
Applicant: Tokyo Electron Limited
Inventor： Toshifumi Inamasu , Yukio Ogasawara , Kei Tashiro
CPC classification number: B05C11/00 , B05B15/52 , B05B15/531 , B05B15/55 , B05C5/0254 , B08B1/006 , B41J2/16517 , B41J2/16535 , H01L21/67051
Abstract: A wiping pad includes: a scraping edge provided to cross a long side direction of a discharge port and come into contact with the discharge port and nozzle side surfaces, and a lead-out passage provided ahead of the scraping edge in a moving direction along a nozzle long side direction to drain a treatment solution scraped away with the scraping edge, wherein the lead-out passage is a V-shaped groove formed along the moving direction on a pad upper surface side, and the V-shaped groove has the scraping edge formed at a rear end edge portion thereof and is formed to gradually increase in groove width and depth toward a front thereof from the scraping edge.
Abstract translation: 擦拭垫包括：设置成与排出口的长边方向交叉并且与排出口和喷嘴侧表面接触的刮削边缘，以及沿着沿着移动方向的刮削边缘的前方设置的引出通道， 喷嘴长边方向排出用刮削刃刮掉的处理液，其中，所述引出通道是沿着垫上表面侧上的移动方向形成的V形槽，并且所述V形槽具有刮削刃 形成在其后端缘部，并且形成为从刮削刃朝向其前方逐渐增加槽宽度和深度。
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4.发明申请WIPING PAD, AND NOZZLE MAINTENANCE APPARATUS AND COATING TREATMENT APPARATUS USING WIPING PAD 有权刮水板和喷嘴维护装置和涂层处理装置使用WIPING PAD公开(公告)号：US20140373779A1
公开(公告)日：2014-12-25
申请号：US14374685
申请日：2013-01-17
Applicant: Tokyo Electron Limited
Inventor： Toshifumi Inamasu , Yukio Ogasawara , Kei Tashiro
CPC classification number: B05C11/00 , B05B15/52 , B05B15/531 , B05B15/55 , B05C5/0254 , B08B1/006 , B41J2/16517 , B41J2/16535 , H01L21/67051
Abstract: A wiping pad includes: a scraping edge provided to cross a long side direction of a discharge port and come into contact with the discharge port and nozzle side surfaces, and a lead-out passage provided ahead of the scraping edge in a moving direction along a nozzle long side direction to drain a treatment solution scraped away with the scraping edge, wherein the lead-out passage is a V-shaped groove formed along the moving direction on a pad upper surface side, and the V-shaped groove has the scraping edge formed at a rear end edge portion thereof and is formed to gradually increase in groove width and depth toward a front thereof from the scraping edge.
Abstract translation: 擦拭垫包括：设置成与排出口的长边方向交叉并且与排出口和喷嘴侧表面接触的刮削边缘，以及沿着沿着移动方向的刮削边缘的前方设置的引出通道， 喷嘴长边方向排出用刮削刃刮掉的处理液，其中，所述引出通道是沿着垫上表面侧上的移动方向形成的V形槽，并且所述V形槽具有刮削刃 形成在其后端缘部，并且形成为从刮削刃朝向其前方逐渐增加槽宽度和深度。
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