公开(公告)号：US20140093984A1

公开(公告)日：2014-04-03

申请号：US14021029

申请日：2013-09-09

申请人： Tokyo Electron Limited

发明人： Kouichi Itou ,  Masahiro Nasu ,  Daisuke Honma

IPC分类号： H01L21/677 ,  H01L21/02 ,  H01L21/67 ,  B05C13/00

CPC分类号： H01L21/67745 ,  B05C13/00 ,  G05B19/41865 ,  G05B2219/32258 ,  G05B2219/32272 ,  H01L21/02043 ,  H01L21/67155 ,  Y02P90/20

摘要： In a substrate processing apparatus 1 which performs a process on a substrate W, each of multiple processing modules 2 includes at least a first processing member 21 and a second processing member 22, and substrate transfer devices 15 and 17 transfer substrates W into the multiple processing modules 2. Further, a controller 3 configured to control the substrate processing apparatus 1 stores member operating possibility information on whether it is possible to use the first processing member 21 and the second processing member 22 provided in each of the multiple processing modules 2, and the controller 3 creates, based on the member operating possibility information and process recipe information on processes to be performed on the substrates W, a transfer schedule in which the substrate transfer devices 15 and 17 transfer the substrates W into the multiple processing modules 2 in parallel.

摘要翻译： 在对基板W进行处理的基板处理装置1中，多个处理模块2中的至少一个包括第一处理部件21和第二处理部件22，基板搬送装置15,17将基板W转印到多个处理 模块2.此外，被配置为控制基板处理装置1的控制器3存储关于是否可以使用设置在多个处理模块2中的第一处理部件21和第二处理部件22的部件操作可能性信息，以及 控制器3基于关于在基板W上执行的处理的构件操作可能性信息和处理配方信息，创建基板传送装置15和17将基板W并行地传送到多个处理模块2中的传送调度 。

公开(公告)号：US09484235B2

公开(公告)日：2016-11-01

申请号：US14021029

申请日：2013-09-09

申请人： Tokyo Electron Limited

发明人： Kouichi Itou ,  Masahiro Nasu ,  Daisuke Honma

IPC分类号： H01L21/677 ,  B05C13/00 ,  H01L21/02 ,  H01L21/67 ,  G05B19/418

CPC分类号： H01L21/67745 ,  B05C13/00 ,  G05B19/41865 ,  G05B2219/32258 ,  G05B2219/32272 ,  H01L21/02043 ,  H01L21/67155 ,  Y02P90/20

摘要： In a substrate processing apparatus 1 which performs a process on a substrate W, each of multiple processing modules 2 includes at least a first processing member 21 and a second processing member 22, and substrate transfer devices 15 and 17 transfer substrates W into the multiple processing modules 2. Further, a controller 3 configured to control the substrate processing apparatus 1 stores member operating possibility information on whether it is possible to use the first processing member 21 and the second processing member 22 provided in each of the multiple processing modules 2, and the controller 3 creates, based on the member operating possibility information and process recipe information on processes to be performed on the substrates W, a transfer schedule in which the substrate transfer devices 15 and 17 transfer the substrates W into the multiple processing modules 2 in parallel.

摘要翻译： 在对基板W进行处理的基板处理装置1中，多个处理模块2中的至少一个包括第一处理部件21和第二处理部件22，基板搬送装置15,17将基板W转印到多个处理 模块2.此外，被配置为控制基板处理装置1的控制器3存储关于是否可以使用设置在多个处理模块2中的第一处理部件21和第二处理部件22的部件操作可能性信息，以及 控制器3基于关于要在基板W上执行的处理的成员操作可能性信息和处理配方信息，创建基板传送装置15和17将基板W并行地传送到多个处理模块2中的传送调度 。