公开(公告)号：US20240128057A1

公开(公告)日：2024-04-18

申请号：US18398213

申请日：2023-12-28

Applicant: Tokyo Electron Limited

Inventor： Kazuki MOYAMA ,  Nobuyuki NAGAYAMA ,  Mamoru MIURA

IPC: H01J37/32

CPC classification number: H01J37/32477 ,  H01J37/32715 ,  H01J37/32807

Abstract: A consumable member includes a core portion formed of the material having a first purity; and a protection portion provided at a portion worn out by plasma in the plasma processing apparatus around the core portion, and formed of the material having a second purity higher than the first purity. The material may be either quartz or ceramic.