公开(公告)号：US20250167022A1

公开(公告)日：2025-05-22

申请号：US18949248

申请日：2024-11-15

Applicant: Tokyo Electron Limited

Inventor： Keita Hirase ,  Koji Tanaka ,  Yuji Kimura ,  Shota Takei ,  Masataka Gosho ,  Seiji Togawa ,  Kazuaki Kitamura ,  Yuji Hagishima ,  Tomoaki Ohara ,  Atsushi Egashira

IPC: H01L21/67 ,  B08B3/04 ,  B08B13/00 ,  G01G17/04 ,  H01L21/02 ,  H01L21/66 ,  H01L21/683 ,  H01L21/687

Abstract: A substrate standby device configured to allow a substrate to standby is provided. The substrate has a first liquid film adhering to a top surface and a bottom surface thereof. The substrate standby device includes a processing liquid supply configured to supply a processing liquid to the top surface of the substrate; a mass measuring device configured to measure a mass of the substrate; a first imaging device configured to acquire a top surface image; and a controller. The controller performs: forming a second liquid film by supplying a first amount of the processing liquid to the top surface of the substrate; measuring a mass of the second liquid film; acquiring the top surface image; and determining a state of the second liquid film based on the top surface image when the mass of the second liquid film is equal to or greater than a first threshold.