公开(公告)号：US20220130645A1

公开(公告)日：2022-04-28

申请号：US17510704

申请日：2021-10-26

Applicant: Tokyo Electron Limited

Inventor： Takaki KOBUNE

IPC: H01J37/32

Abstract: A plasma processing apparatus includes a cylindrical chamber defining a processing space in which a substrate is processed, and a member constituting an outer circumference of the cylindrical chamber. The member includes at least one flow path inlet configured to allow a heat transfer medium to flow in therethrough, at least one flow path outlet configured to allow the heat transfer medium to flow out therethrough, at least one flow path connecting the flow path inlet and the flow path outlet to one another to allow the heat transfer medium to flow therethrough, and at least one folded-back portion formed in the flow path. The flow path inlet and the flow path outlet are located close to each other, and the flow path is formed at a specific angle in a circumferential direction of the member.

公开(公告)号：US20220254611A1

公开(公告)日：2022-08-11

申请号：US17666871

申请日：2022-02-08

Applicant: Tokyo Electron Limited

Inventor： Lifu LI ,  Takaki KOBUNE

IPC: H01J37/32 ,  G05D3/00 ,  H05B1/02

Abstract: A plasma processing apparatus includes: a plasma processing chamber; a first conductive member disposed in the plasma processing chamber and having a first surface; a second conductive member having a second surface facing the first surface of the first conductive member; a third member disposed on at least one selected from the group of the first conductive member and the second conductive member and having a shape that varies according to a temperature change of the third member; and a control mechanism configured to change a temperature of the third member.

公开(公告)号：US20220344127A1

公开(公告)日：2022-10-27

申请号：US17720359

申请日：2022-04-14

Applicant: Tokyo Electron Limited

Inventor： Takaki KOBUNE

IPC: H01J37/32

Abstract: An electrode for a plasma processing apparatus is provided. The electrode comprises: a first conductive member; and a second member disposed in the first member and made of a material having a secondary electron emission coefficient different from a secondary electron emission coefficient of the first member.

公开(公告)号：US20220319815A1

公开(公告)日：2022-10-06

申请号：US17708600

申请日：2022-03-30

Applicant: Tokyo Electron Limited

Inventor： Lifu LI ,  Takaki KOBUNE ,  Hiroshi TSUJIMOTO

IPC: H01J37/32

Abstract: An upper electrode assembly used in a plasma processing apparatus is provided. The upper electrode assembly comprises: an electrode plate; a metal plate; and a heat transfer sheet disposed between the electrode plate and the metal plate and having a vertically oriented portion. The vertically oriented portion has a plurality of vertically oriented graphene structures oriented along a vertical direction.