公开(公告)号：US20240274412A1

公开(公告)日：2024-08-15

申请号：US18641911

申请日：2024-04-22

Applicant: Tokyo Electron Limited

Inventor： Shinsuke OKA ,  Akira TAKAHASHI ,  Daisuke TAMURA ,  Tsubasa SHIMOMURA

IPC: H01J37/32

CPC classification number: H01J37/32642 ,  H01J37/3244 ,  H01J37/32724 ,  H01J37/32183 ,  H01J2237/2007

Abstract: With respect to a method of reducing leakage of a heat transfer gas, the method includes mounting an edge ring on a main body including an electrostatic chuck; attracting the edge ring to the electrostatic chuck; increasing a temperature of the edge ring; decreasing the temperature of the edge ring; and repeating the increasing of the temperature and the decreasing of the temperature a plurality of times.