公开(公告)号：US20240402021A1

公开(公告)日：2024-12-05

申请号：US18694153

申请日：2022-09-15

Applicant: Tokyo Electron Limited

Inventor： Tomohiro OTA ,  Shigeru KASAI ,  Yasuhiro MURATA ,  Fumiya FUJII

IPC: G01K15/00 ,  G01K1/143 ,  G01K3/14 ,  G01R31/26 ,  G01R31/28 ,  G01R35/00

Abstract: A temperature calibration system includes: an inspection apparatus to adjust temperature of an inspection target in a placement part and inspect the inspection target; and a surface thermometer, and is configured to calibrate temperature sensors in the placement part. The inspection apparatus includes: a carriage to move the placement part in X-, Y-, and Z-axis directions; and a controller to perform a calibration process to measurement values of the temperature sensors. The surface thermometer is configured to contact a placement surface of the placement part and detect a surface temperature of the placement surface. The controller is configured to: control the carriage to contact the surface thermometer with a detection position of the placement surface of the placement part; detect the surface temperature of the detection position by the surface thermometer; and calibrate the measurement value of the temperature sensor corresponding to the detection position based on the surface temperature.