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公开(公告)号：US20240402021A1
公开(公告)日：2024-12-05
申请号：US18694153
申请日：2022-09-15
Applicant: Tokyo Electron Limited
Inventor： Tomohiro OTA , Shigeru KASAI , Yasuhiro MURATA , Fumiya FUJII
Abstract: A temperature calibration system includes: an inspection apparatus to adjust temperature of an inspection target in a placement part and inspect the inspection target; and a surface thermometer, and is configured to calibrate temperature sensors in the placement part. The inspection apparatus includes: a carriage to move the placement part in X-, Y-, and Z-axis directions; and a controller to perform a calibration process to measurement values of the temperature sensors. The surface thermometer is configured to contact a placement surface of the placement part and detect a surface temperature of the placement surface. The controller is configured to: control the carriage to contact the surface thermometer with a detection position of the placement surface of the placement part; detect the surface temperature of the detection position by the surface thermometer; and calibrate the measurement value of the temperature sensor corresponding to the detection position based on the surface temperature.
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公开(公告)号：US20220128624A1
公开(公告)日：2022-04-28
申请号：US17508232
申请日：2021-10-22
Applicant: TOKYO ELECTRON LIMITED
Inventor： Shigeru KASAI , Tomohiro OTA
Abstract: There is provided a placement table having an upper surface on which a device to be processed is placed. The placement table comprises: a top plate having a placement surface for the device; a heating unit configured to heat the top plate; a plurality of temperature sensors configured to acquire temperature of the top plate at desired measurement positions in a plan view; and a positioning unit electrically connected to the temperature sensors and configured to position the temperature sensors at the measurement positions in a plan view. The positioning unit is formed of a flexible substrate having flexibility.
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