公开(公告)号：US20160363486A1

公开(公告)日：2016-12-15

申请号：US15116569

申请日：2015-03-02

Applicant: Tokyo Electron Limited

Inventor： Takari YAMAMOTO ,  Kenichiro YAMADA ,  Yoshiki YAMAKAWA ,  Yuji MIZUMA ,  Hirokazu TANIGUCHI ,  Masatoshi TABIRA

IPC: G01K11/12 ,  G01K1/08

CPC classification number: G01K11/125 ,  G01K1/08 ,  G01K1/14

Abstract: Provided is an optical temperature sensor including a temperature sensing element having light transmission characteristics that vary with temperature, a hollow holding member that holds the temperature sensing element, and an optical fiber that is arranged inside the holding member, the optical fiber including a tip face that is disposed to face the temperature sensing element at a position separated from the temperature sensing element by a predetermined distance. The temperature sensing element allows light emitted from the tip face of the optical fiber to be incident thereon, allows the incident light to be transmitted therethrough, and allows reflected light of the transmitted light that has been reflected by a measuring object to be transmitted therethrough.

Abstract translation: 提供了一种光学温度传感器，其包括具有随温度变化的透光特性的温度感测元件，保持温度感测元件的中空保持部件和布置在保持部件内部的光纤，该光纤包括尖端面 其设置成在与温度感测元件分离预定距离的位置处面对温度感测元件。 温度检测元件允许从光纤的前端面发射的光入射到其上，允许入射光透射通过，允许被测量对象反射的透射光的反射光透过。