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公开(公告)号：US5797604A
公开(公告)日：1998-08-25
申请号：US764879
申请日：1996-12-16
CPC分类号： F16J15/0893 , F16J15/0887
摘要： A metal gasket excellent in sealing performance and capable of sealing with a small pressing force. The metal gasket comprises at least one metal sheath with a C-shaped cross-section and a ring elastic core surrounded by the metal sheath. The metal gasket provides a seal upon exertion of a force in the axis center direction. The metal sheath has a locally thin cross-section over the whole annular length, and when the metal sheath subject to a force and deformed, the deflection in the axis direction of the metal sheath due to concentrated stress on the thin worked portion causes the formation projections at both sides of the deflection which projections are pressed onto the sealing face to form air-tight seals.
摘要翻译： 密封性能优良，能够以小的按压力密封的金属密封垫。 金属垫片包括至少一个具有C形横截面的金属护套和由金属护套包围的环形弹性芯。 金属垫片在轴心方向上施加力时提供密封。 金属护套在整个环形长度上具有局部薄的横截面，并且当金属护套受到力并变形时，由于在薄加工部分上的集中应力，金属护套的轴向方向上的偏转导致形成 在突出部的两侧突出部被压在密封面上以形成气密密封。
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公开(公告)号：US6056291A
公开(公告)日：2000-05-02
申请号：US84002
申请日：1998-05-26
CPC分类号： F16J15/0893 , F16J15/0887
摘要： A metal gasket excellent in sealing performance and capable of sealing with a small pressing force. The metal gasket comprises at least one metal sheath with C-shaped cross-section and a ring elastic core surrounded by the metal sheath and the metal gasket is served for sealing with aid of the contact with the sealing face tightened by exerting a force in the axis center direction, wherein the metal sheath has the worked portion with a locally thin cross-section over the whole length, and when the metal sheath is exerted with a force and deformed, the deflection in the axis direction of the metal sheath due to concentrated stress on the thin worked portion causes to form projections at the both sides of the deflection which projections are pressed onto the sealing face.
摘要翻译： 密封性能优良，能够以小的按压力密封的金属密封垫。 金属垫片包括至少一个具有C形横截面的金属护套和由金属护套包围的环形弹性芯，并且金属垫片用于密封，借助于与密封面的接触，通过在其中施加力 其中金属护套具有在整个长度上具有局部薄的横截面的加工部分，并且当金属护套施加力并变形时，由于集中的金属护套的轴向方向的偏转 在薄加工部分上的应力导致在偏转的两侧形成突起，该突起被压在密封面上。
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公开(公告)号：US6109303A
公开(公告)日：2000-08-29
申请号：US296671
申请日：1999-04-22
申请人： Hiroshi Itafuji , Toshiyasu Inagaki
发明人： Hiroshi Itafuji , Toshiyasu Inagaki
CPC分类号： F16K27/003 , Y10T137/5109 , Y10T137/87885
摘要： A process gas supply unit includes an upper module block provided with flow passages, a passage block provided with flow passages connected with the flow passages of the upper module block, and a base block provided with a connection passage connected with the flow passages of the passage block. The upper module block is attached with a component used for the supply of process gas and is down mounted on the passage block by bolts. The base block is mounted underneath the adjacent passage blocks. Accordingly, a sequence of the components are communicated through the flow passages of the upper module block and the passage block, and the connection passage of the base block.
摘要翻译： 一种处理气体供应单元，包括设置有流动通道的上部模块块，设置有与上部模块块的流动通道连接的流动通道的通道块，以及设置有与通道的流动通道连接的连接通道的基座 块。 上部模块块附有用于供应工艺气体的部件，并通过螺栓下降安装在通道块上。 基座安装在相邻通道块的下方。 因此，这些部件的顺序通过上部模块块和通道块的流动通道以及基础块的连接通道进行连通。
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公开(公告)号：US6152175A
公开(公告)日：2000-11-28
申请号：US89346
申请日：1998-06-03
CPC分类号： F16K27/003 , F17D1/04 , Y10T137/87571 , Y10T137/87684 , Y10T137/87885
摘要： A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.
摘要翻译： 没有常规管道的工艺气体供应单元。 过程气体供应单元可以包括质量流量控制器，输入阀，输出阀，净化阀，真空阀，止回阀，调节器和过滤器的组件。 模块通过螺栓从预定方向附接至至少一个部件。 模块通过螺栓从相同的预定方向安装在基板上，并且用相同的预定方向的螺栓将基板安装在安装面板上。
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公开(公告)号：US06209571B1
公开(公告)日：2001-04-03
申请号：US09074589
申请日：1998-05-08
申请人： Masahito Itoh , Toshiyasu Inagaki
发明人： Masahito Itoh , Toshiyasu Inagaki
IPC分类号： F16K5100
CPC分类号： F16K27/003 , F16K51/00 , Y10T137/4259 , Y10T137/87571 , Y10T137/87885
摘要： A process gas supply unit has a supply valve for supplying process gas to a semiconductor manufacturing apparatus, a purge valve for supplying inert gas, a check valve provided in a passage between an inert gas source and the purge valve and a common manifold provided with the supply valve, the purge valve and the check valve. Therefore, these parts are mounted on a mass flow controller as a unit and the process gas unit can be made compact and integrated as a whole.
摘要翻译： 处理气体供给单元具有用于向半导体制造装置供给处理气体的供给阀，用于供给惰性气体的净化阀，设置在惰性气体源和净化阀之间的通路中的止回阀以及设置有 供气阀，净化阀和止回阀。因此，这些部件作为一个单元安装在质量流量控制器上，整个过程气体单元可以紧凑集成。
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