公开(公告)号：US20040174092A1

公开(公告)日：2004-09-09

申请号：US10691238

申请日：2003-10-22

申请人： Toyo Communication Equipment Co., Ltd.

发明人： Hirokazu Iwata

IPC分类号： H01L041/04

CPC分类号： H03H9/0547 ,  H03H3/04 ,  H03H9/1021 ,  H03H9/17 ,  H03H2003/022 ,  H03H2003/0485

摘要： In the case where an ultraminiature piezoelectric substrate, which has a resonating portion formed by making a concavity by etching in the surface of the piezoelectric substrate made of an anisotropic crystal material, is mass-produced by batch operation using a large-area piezoelectric substrate wafer, an annular portion surrounding each concavity is formed sufficiently thick to prevent cracking from occurring when the wafer is severed. A piezoelectric substrate 2 of an anisotropic piezoelectric crystal material has a thin resonating portion 4 and a thick annular portion 5 integrally surrounding the outer marginal edge of the resonating portion to form a concavity 3 in at least one of major surfaces of the substrate; the inner wall 5a of the annular portion in the one crystal orientation slopes gently more than the inner wall in the other crystal orientation perpendicular to said one crystal orientation, and the piezoelectric substrate is longer in said one crystal orientation than in the other crystal orientation.

摘要翻译： 在通过使用大面积压电基板晶片的批量操作来批量生产具有通过在由各向异性晶体材料制成的压电基板的表面中通过蚀刻形成凹陷而形成的谐振部分的超微压电基板的情况下 围绕每个凹部的环形部分形成得足够厚以防止当晶片断开时发生裂纹。 各向异性压电晶体材料的压电基片2具有薄的谐振部分4和一个围绕谐振部分的外边缘的厚的环形部分5，以在基片的至少一个主表面中形成凹陷3; 一个晶体取向中的环形部分的内壁5a在垂直于所述一个晶体取向的另一个晶体取向中比内壁轻轻地倾斜，并且压电基片在所述一个晶体取向上比在另一个晶体取向上更长。

公开(公告)号：US20020030424A1

公开(公告)日：2002-03-14

申请号：US09746600

申请日：2000-12-21

申请人： TOYO COMMUNICATION EQUIPMENT CO., LTD.

发明人： Hirokazu Iwata

IPC分类号： H01L041/04

CPC分类号： H03H9/174 ,  H03H9/132 ,  H03H9/177 ,  H03H9/564

摘要： Disclosed is a piezoelectric resonator that has a piezoelectric plate that has formed thereon a pair of main electrodes and has formed thereon a second electrode surrounding the peripheral edge of the main electrode with a gap being provided between the second electrode and a peripheral edge of the main electrode. The material of the main electrode and the material of the second electrode are differentiated from each other. As the material of the second electrode there is used a material the density of that is lower than the material of the main electrode. With this construction, there is obtained means for suppressing the occurrence of spurious due to an inharmonic mode generating in the high frequency piezoelectric resonator.

摘要翻译： 公开了一种压电谐振器，其具有在其上形成有一对主电极并且在其上形成有围绕主电极的周缘的第二电极的压电板，在第二电极和主体的周边之间设置有间隙 电极。 主电极的材料和第二电极的材料彼此不同。 作为第二电极的材料，使用其密度低于主电极的材料的材料。 利用这种结构，获得了用于抑制由于在高频压电谐振器中产生不协调模式而引起的寄生的发生的装置。