Stage control method, a stage control system, and a semiconductor manufacturing equipment
    1.
    发明授权
    Stage control method, a stage control system, and a semiconductor manufacturing equipment 有权
    舞台控制方法,舞台控制系统以及半导体制造装置

    公开(公告)号:US07130026B2

    公开(公告)日:2006-10-31

    申请号:US11047675

    申请日:2005-02-02

    IPC分类号: G03B27/58 G03B27/32 H02P1/00

    CPC分类号: G03B27/58

    摘要: A method of controlling a stage comprising: acquiring a first moving speed of the stage based upon position information from a laser interferometer for measuring a position of the stage; controlling the moving speed of the stage based upon the first speed; determining a second moving speed of the stage based upon the number of rotation of a motor for moving the stage; controlling the moving speed of the stage based upon the second moving speed; and acquiring a ratio of the second moving speed to the first moving speed based upon the first moving speed.

    摘要翻译: 一种控制舞台的方法,包括:基于来自用于测量舞台位置的激光干涉仪的位置信息,获取舞台的第一移动速度; 基于第一速度控制舞台的移动速度; 基于用于移动所述载物台的马达的转动次数来确定所述载物台的第二移动速度; 基于第二移动速度控制舞台的移动速度; 并且基于所述第一移动速度获取所述第二移动速度与所述第一移动速度的比率。

    Stage control method, a stage control system, and a semiconductor manufacturing equipment
    2.
    发明申请
    Stage control method, a stage control system, and a semiconductor manufacturing equipment 有权
    舞台控制方法,舞台控制系统以及半导体制造装置

    公开(公告)号:US20050174554A1

    公开(公告)日:2005-08-11

    申请号:US11047675

    申请日:2005-02-02

    CPC分类号: G03B27/58

    摘要: A method of controlling a stage comprising: acquiring a first moving speed of the stage based upon position information from a laser interferometer for measuring a position of the stage; controlling the moving speed of the stage based upon the first speed; determining a second moving speed of the stage based upon the number of rotation of a motor for moving the stage; controlling the moving speed of the stage based upon the second moving speed; and acquiring a ratio of the second moving speed to the first moving speed based upon the first moving speed.

    摘要翻译: 一种控制舞台的方法,包括:基于来自用于测量舞台位置的激光干涉仪的位置信息,获取舞台的第一移动速度; 基于第一速度控制舞台的移动速度; 基于用于移动所述载物台的马达的转动次数来确定所述载物台的第二移动速度; 基于第二移动速度控制舞台的移动速度; 并且基于所述第一移动速度获取所述第二移动速度与所述第一移动速度的比率。

    Circuit board module, circuit board chassis and electromagnetic shielding plate therefor
    3.
    发明授权
    Circuit board module, circuit board chassis and electromagnetic shielding plate therefor 有权
    电路板模块,电路板机箱和电磁屏蔽板

    公开(公告)号:US07102897B2

    公开(公告)日:2006-09-05

    申请号:US10834856

    申请日:2004-04-30

    IPC分类号: H05K9/00

    摘要: The disclosure is concerned with An electromagnetic shielding plate comprising an electromagnetic shielding member of electrical conductivity and a front panel disposed to an end of the electromagnetic shielding member. The disclosure is also concerned with a circuit board chassis, which comprises a casing, guide rails disposed in the inside of the casing for inserting circuit boards and a plurality of electromagnetic shielding plates each comprising an electromagnetic shielding member and a front panel, the electromagnetic shielding plates being located between the circuit boards, wherein the electromagnetic shielding plates and the casing are electrically connected by means of front panels.

    摘要翻译: 本公开涉及一种电磁屏蔽板,其包括导电性的电磁屏蔽构件和设置在电磁屏蔽构件的端部的前面板。 本发明还涉及一种电路板底盘,其包括壳体,设置在壳体内部的用于插入电路板的导轨和多个电磁屏蔽板,每个电磁屏蔽板包括电磁屏蔽构件和前面板,电磁屏蔽 板位于电路板之间,其中电磁屏蔽板和壳体通过前面板电连接。

    Video Signal Switching System
    4.
    发明申请
    Video Signal Switching System 审中-公开
    视频信号切换系统

    公开(公告)号:US20090097496A1

    公开(公告)日:2009-04-16

    申请号:US12226831

    申请日:2006-05-02

    IPC分类号: H04L12/56

    摘要: A video signal switching system wherein existing network components and the like are used to perform a switching process, thereby reducing the costs and improving the versatility as well. As a solution, a video signal switching system is provided which comprises a plurality of input port components that acquire non-packet digital consecutive signals; a plurality of output port components that output the non-packet digital consecutive signals; a packetizing unit that packetizes the acquired non-packet digital consecutive signals into packets after associating them with the input port identification information of the input port components having acquired them; a switch unit that distributes the packets to the output port components in accordance with the input port identification information associated with those packets; and a restoring unit that restores the packet signals distributed by the switch unit to the non-packet digital consecutive signals.

    摘要翻译: 使用现有网络部件等进行切换处理的视频信号切换系统,从而降低成本并提高多功能性。 作为解决方案,提供了一种视频信号切换系统,其包括获取非分组数字连续信号的多个输入端口组件; 输出非分组数字连续信号的多个输出端口组件; 分组单元,在将所获取的非分组数字连续信号与已经获取的非输入端口组件的输入端口识别信息相关联之后将其分组为分组; 开关单元,其根据与这些分组相关联的输入端口识别信息将分组分发到输出端口组件; 以及恢复单元,其将由开关单元分配的分组信号恢复到非分组数字连续信号。