公开(公告)号：US06332922B1

公开(公告)日：2001-12-25

申请号：US09257296

申请日：1999-02-25

申请人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

发明人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

IPC分类号： C30B3306

CPC分类号： G03F7/70958 ,  C30B29/12 ,  C30B33/00 ,  G02B1/02 ,  G03F7/70966 ,  Y10S117/906

摘要： A manufacturing method for a single crystal of calcium fluoride by which it is possible to obtain a single crystal of calcium fluoride with adequately small double refraction, which can be used in optical systems for photolithography, and in particular, a single crystal of calcium fluoride with a large diameter (ø 200 mm or larger) having superior optical properties, which can be used for photolithography with a wavelength of 250 nm or less. A manufacturing method for a single crystal of calcium fluoride, having its optical properties improved through an annealing process in which a single crystal of calcium fluoride is contained in a sealable container, and said container is sealed and vacuumed, followed by, a process of heating with a heater arranged external to said container so that the temperature inside said container is raised to a first temperature, which is lower than the melting point of said single crystal of calcium fluoride, a process by which the temperature inside said container is maintained at said first temperature for a designated period of time, and a process by which the temperature inside said container is lowered to room temperature, wherein, the maximum temperature of the annealing process is set to be a first temperature within the range of 1020 to 1150° C. Also provided is a manufacturing method for a single crystal of calcium fluoride having its optical properties improved through an annealing process such that, its maximum temperature during the thermal process is set to a first temperature which is within the range of 1020 to 1150° C., and which is maintained for a designated period of time, and its cooling speed for reaching a second temperature, which is in the range of (or around) 600 to 800° C., from said first temperature is set to be 1.2° C./hour or less, or its cooling speed for reaching a second temperature, which is in the range of (or around) 700 to 900° C., from said first temperature is set to be 1.2° C./hour or less.

公开(公告)号：US6146456A

公开(公告)日：2000-11-14

申请号：US135016

申请日：1998-08-17

申请人： Tsutomu Mizugaki ,  Shuuichi Takano

发明人： Tsutomu Mizugaki ,  Shuuichi Takano

IPC分类号： G02B1/02 ,  C30B29/12 ,  C30B33/00 ,  C30B33/02 ,  H01S5/00

CPC分类号： C30B33/00 ,  C30B29/12

摘要： An annealing method for a single crystal of fluoride is provided. The method includes the steps of removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface, thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride and gradually cooling the heated single crystal of fluoride, and removing a deteriorated layer which is formed on the surface of the single crystal of fluoride during the annealing step.

摘要翻译： 提供氟化物单晶的退火方法。 该方法包括以下步骤：从氟化物单晶表面除去附着物和吸收物中的至少一种，以清洁表面，然后对氟化物的单晶进行退火，包括加热氟化物的单晶并逐渐冷却加热的 并且在退火步骤中去除在氟化物单晶表面上形成的劣化层。

公开(公告)号：US06811606B2

公开(公告)日：2004-11-02

申请号：US09982834

申请日：2001-10-22

申请人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

发明人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

IPC分类号： C30B3302

CPC分类号： G03F7/70958 ,  C30B29/12 ,  C30B33/00 ,  G02B1/02 ,  G03F7/70966 ,  Y10S117/906

摘要： A manufacturing method for a single crystal of calcium fluoride by which it is possible to obtain a single crystal of calcium fluoride with adequately small double refraction, which can be used in optical systems for photolithography, and in particular, a single crystal of calcium fluoride with a large diameter (ø200 mm or larger) having superior optical properties, which can be used for photolithography with a wavelength of 250 nm or less. A manufacturing method for a single crystal of calcium fluoride, having its optical properties improved through an annealing process in which a single crystal of calcium fluoride is contained in a sealable container, and said container is sealed and vacuumed, followed by, a process of heating with a heater arranged external to said container so that the temperature inside said container is raised to a first temperature, which is lower than the melting point of said single crystal of calcium fluoride, a process by which the temperature inside said container is maintained at said first temperature for a designated period of time, and a process by which the temperature inside said container is lowered to room temperature, wherein, the maximum temperature of the annealing process is set to be a first temperature within the range of 1020 to 1150° C. Also provided is a manufacturing method for a single crystal of calcium fluoride having its optical properties improved through an annealing process such that, its maximum temperature during the thermal process is set to a first temperature which is within the range of 1020 to 1150° C., and which is maintained for a designated period of time, and its cooling speed for reaching a second temperature, which is in the range of (or around) 600 to 800° C., from said first temperature is set to be 1.2° C./hour or less, or its cooling speed for reaching a second temperature, which is in the range of (or around) 700 to 900° C., from said first temperature is set to be 1.2° C./hour or less.

公开(公告)号：US6123764A

公开(公告)日：2000-09-26

申请号：US201802

申请日：1998-12-01

申请人： Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

发明人： Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

IPC分类号： F26B5/04 ,  B01J6/00 ,  B01J19/00 ,  C01F11/22 ,  C30B11/00 ,  C30B29/12 ,  B30B11/02

CPC分类号： C30B11/00 ,  C30B29/12

摘要： A manufacturing method for a single crystal of calcium fluoride includes the steps of degassing calcium fluoride powder particles to desorb impurities from surfaces of the calcium fluoride powder particles, preprocessing the degassed calcium fluoride powder particles by fusing the degassed calcium fluoride powder particles in a crucible to obtain a preprocessed product, and re-fusing the preprocessed product in a crucible to grow a single crystal of calcium fluoride.

摘要翻译： 氟化钙的单晶的制造方法包括以下步骤：将氟化钙粉末颗粒脱气以从氟化钙粉末颗粒的表面解吸杂质，通过将坩埚中脱气的氟化钙粉末颗粒熔合而将脱气的氟化钙粉末颗粒进行预处理， 获得预处理产品，并将坩埚中的预处理产品重新熔化，以生长单晶的氟化钙。

公开(公告)号：US06061174A

公开(公告)日：2000-05-09

申请号：US40663

申请日：1998-03-18

申请人： Masaki Shiozawa ,  Tsutomu Mizugaki ,  Shigeru Sakuma ,  Norio Komine ,  Seishi Fujiwara ,  Hiroki Jinbo

发明人： Masaki Shiozawa ,  Tsutomu Mizugaki ,  Shigeru Sakuma ,  Norio Komine ,  Seishi Fujiwara ,  Hiroki Jinbo

IPC分类号： C03C3/06 ,  C30B11/00 ,  C30B29/12 ,  G02B1/02 ,  G02B13/14 ,  G03F7/20 ,  H01L21/027 ,  H01S3/225 ,  G02B5/20 ,  G02B27/42 ,  F21V9/06

CPC分类号： G02B13/22 ,  C30B11/00 ,  C30B29/12 ,  G02B1/08 ,  G02B13/143 ,  G03F7/70216 ,  G03F7/70958

摘要： An optical member is provided for use in an image-focusing optical system for guiding light having a wavelength shorter than about 300 nm. The optical member includes a calcium fluoride crystal having a sodium concentration of less than about 0.2 ppm.

摘要翻译： 提供一种用于图像聚焦光学系统中用于引导波长短于约300nm的光的光学部件。 光学构件包括钠浓度小于约0.2ppm的氟化钙晶体。

公开(公告)号：US5978070A

公开(公告)日：1999-11-02

申请号：US26507

申请日：1998-02-19

申请人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Masaki Shiozawa

发明人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Masaki Shiozawa

IPC分类号： C30B11/00 ,  G02B1/02 ,  G03F7/20 ,  G03B27/52

CPC分类号： G03F7/70958 ,  C30B11/00 ,  C30B29/12 ,  G02B1/02 ,  G03F7/70058 ,  G03F7/70241

摘要： A projection exposure apparatus capable of projecting and exposing mask pattern images onto a substrate by means of a optical projection system, the apparatus includes an optical illumination system capable of illuminating a mask utilizing an excimer laser illuminating light source in a wavelength range of 230 nm or less, and an optical projection system including optical members that include a calcium fluoride crystal with a total alkaline earth metal impurity content of 1.times.10.sup.18 atom/cm.sup.3 or less, and which projects images of the mask pattern onto a substrate. The calcium fluoride crystal is manufactured by a method including the steps of adding a fluorinating agent to a powdered calcium fluoride forming a mixture, placing the mixture in a growing crucible inside a vacuum furnace, and evacuating the vacuum furnace. Once the vacuum furnace is evacuated, the temperature is elevated a first time inside the vacuum furnace to a temperature exceeding a melting point of the mixture and is maintained at a predetermined constant temperature inside the vacuum furnace until a polycrystalline material is formed. The polycrystalline material is then cooled and the temperature inside the vacuum furnace is elevated until the polycrystalline material is melted, wherein crystal growth of the polycrystalline material is promoted and a crystal ingot is formed.

摘要翻译： 一种投影曝光装置，其能够通过光学投影系统将掩模图案图像投影并曝光到基板上，该装置包括：能够利用在230nm的波长范围内的准分子激光照明光源照射掩模的光学照明系统，或 以及包括光学部件的光学投影系统，其包括总碱土金属杂质含量为1×10 18原子/ cm 3以下的氟化钙晶体，并将掩模图案的图像投影到基板上。 氟化钙晶体通过以下方法制造：将氟化剂添加到形成混合物的粉末状氟化钙中的步骤，将混合物放置在真空炉内的生长坩埚内，抽空真空炉。 一旦真空炉抽真空，将真空炉内的温度首次升高到超过混合物熔点的温度，并保持在真空炉内部的预定恒定温度，直至形成多晶材料。 然后将多晶材料冷却，使真空炉内的温度升高直到多晶材料熔融，其中促进多晶材料的晶体生长并形成晶锭。