摘要:
A piezoelectric/electrostrictive device includes: a ceramic substrate having a thick portion and a thin diaphragm portion; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode, and the thin diaphragm portion of the ceramic substrate is constituted to vibrate in conjunction with the driving of the piezoelectric/electrostrictive element. Furthermore, shape and dimension relations defined in the following (A) to (C) are satisfied: (A) a shape of the thin diaphragm portion 12 is an outward protruding arch shape, and an outward protrusion height of the arch shape is in a range of 5 to 50 μm; (B) a mounting width of the thin diaphragm portion is in a range of 600 to 2000 μm; and (C) a ratio (height/width) of the height to the width of the thick portion is in a range of 0.25 to 3. According to the piezoelectric/electrostrictive device, vibration of a thin diaphragm portion is effectively prevented from being damped, and the device maintains displacement (amplitude) to be high and is superior in response and highprecision (highresolution, high-sensitivity) detection is possible.
摘要:
A piezoelectric/electrostrictive device includes: a ceramic substrate having a frame-like thick portion, a thin diaphragm portion, and a cavity formed by the thick portion and the thin diaphragm portion to communicate with the outside; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. Furthermore, the thin diaphragm portion is provided with an outward protruding arch shape, and in the piezoelectric/electrostrictive element, there remains a tensile stress parallel to a fixed surface of the element to the thin diaphragm portion. The piezoelectric/electrostrictive device is superior in response, and in the device high-precision (high-resolution, high-sensitivity) detection is possible, while effectively preventing decay of vibration of a thin diaphragm portion and maintaining displacement (amplitude) to be high.
摘要:
There is disclosed a diaphragm structure 1 in which defects such as minute cracks are not easily generated in a thin portion even in the case where the structure is heated and loaded in order to elminate a warpage, a distortion or the like and which is suitable as a substrate for constituting a piezoelectric/electrostrictive element. The structure includes: a ceramic substrate 3 in which at least one opening 2 is formed, and a thin diaphragm portion 4 having a shape protruding on a side opposite to the opening 2 and constituted of a ceramic fired integrally with the ceramic substrate 3 in such a manner as to cover the opening 2. An opening shape of the opening 2 is a shape including at least one tip portion 5 in a longitudinal direction, having a curved shape, and a tapered portion 6 whose opening width gradually narrows toward the tip portion 5 and which is constituted of a curve or a straight line, and a portion of the diaphragm portion 4 corresponding to the tapered portion 6 has such a shape that a protruding height gradually lowers toward the tip portion 5.
摘要:
There is disclosed a diaphragm structure that includes: a ceramic substrate 3 in which at least one opening 2 is formed, and a thin diaphragm portion 4 having a shape protruding on a side opposite to the opening 2 and constituted of a ceramic fired integrally with the ceramic substrate 3 in such a manner as to cover the opening 2. An opening shape of the opening 2 is a shape including at least one tip portion 5 in a longitudinal direction, having a curved shape, and a tapered portion 6 whose opening width gradually narrows toward the tip portion 5 and which is constituted of a curve or a straight line, and a portion of the diaphragm portion 4 corresponding to the tapered portion 6 has such a shape that a protruding height gradually lowers toward the tip portion 5.
摘要:
A piezoelectric/electrostrictive device includes: a ceramic substrate having a frame-like thick portion, a thin diaphragm portion, and a cavity formed by the thick portion and the thin diaphragm portion to communicate with the outside; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. Furthermore, the thin diaphragm portion is provided with an outward protruding arch shape, and in the piezoelectric/electrostrictive element, there remains a tensile stress parallel to a fixed surface of the element to the thin diaphragm portion. The piezoelectric/electrostrictive device is superior in response, and in the device high-precision (high-resolution, high-sensitivity) detection is possible, while effectively preventing decay of vibration of a thin diaphragm portion and maintaining displacement (amplitude) to be high.
摘要:
In a solid oxide fuel cell, air supplied from the outside through an air supply port Pain firstly flows through an air supply channel Hain in the downward direction to flow in air channels Sa. The air flowing into the air channels Sa flows through the air channels Sa in the lateral direction to flow out to an air discharge channel Haout. The air flowing out to the air discharge channel Haout flows through the air discharge channel Haout in the upward direction to be discharged to the outside from an air discharge port Paout. When a pressure loss ratio ΔPc/ΔPm, which is a ratio of a pressure loss ΔPc of air generated in the air channel Sa to the pressure loss ΔPm of air generated in the air supply channel Hain (or the air discharge channel Haout) during the operation of a fuel cell (at working temperature), is within 1 to 2500, the flow rate of the air flowing into each air channel can be equalized as much as possible, thereby being capable of preventing the reduction in the output.
摘要:
A piezoelectric/electrostrictive device includes: a ceramic substrate having a thick portion and a thin diaphragm portion; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode, and the thin diaphragm portion of the ceramic substrate is constituted to vibrate in conjunction with the driving of the piezoelectric/electrostrictive element. Furthermore, shape and dimension relations defined in the following (A) to (C) are satisfied: (A) a shape of the thin diaphragm portion 12 is an outward protruding arch shape, and an outward protrusion height of the arch shape is in a range of 5 to 50 μm; (B) a mounting width of the thin diaphragm portion is in a range of 600 to 2000 μm; and (C) a ratio (height/width) of the height to the width of the thick portion is in a range of 0.25 to 3.
摘要:
On each of upper and lower surfaces of a flat-plate-like support substrate having a longitudinal direction and having fuel gas flow channels formed therein, a plurality of power-generating elements A connected electrically in series are disposed at predetermined intervals along the longitudinal direction. On each of the upper and lower surfaces of the support substrate, a plurality of recesses are formed at predetermined intervals along the longitudinal direction. Each of the recesses is a rectangular-parallelepiped-like depression defined by four side walls arranged in a circumferentially closed manner and a bottom wall. That is, in the support substrate, frames are formed to surround the respective recesses. Fuel electrodes of the power-generating elements A are embedded in the respective recesses, and inter connectors are embedded in respective recesses formed on the outer surfaces of the fuel electrodes.
摘要:
A passage detection apparatus is configured to detect the change in the properties (propagation state of sound wave, dielectric constant, etc.) of a specific space, which changes according to the passage of an object in the specific space and the size of the object. The passage detection apparatus includes a pair of detection units and configured to transmit and receive signals to and from an external device. The specific space is formed by the space between the detection unit and the detection unit. The detection unit is supported by a first substrate. The detection unit is supported by a second substrate that is parallel to the first substrate, and arranged at the position corresponding to the detection unit supported by the first substrate.
摘要:
A gripping jig for assembling whereby a force is applied to a molded body in a direction perpendicular to an assembling direction. When an assembling load is applied to the molded body, the force is adjustable with an adjustment screw such that the molded body is guided to move in the assembling direction. Since the force is applied from a direction different from the assembling direction, the molded body can move in the assembling direction, and since the force is adjustable, application of the assembling load to the molded body and the movement of the molded body can be adjusted. Since a plurality of the molded bodies are fixed and assembled respectively, when there are variations in size of the molded bodies, an excessive assembling load is is avoided with each molded body guided to move, so that a more uniform assembling load is applied to the plurality of molded bodies.