公开(公告)号：US09048246B2

公开(公告)日：2015-06-02

申请号：US13921174

申请日：2013-06-18

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ming-Te Wei ,  Po-Chao Tsao ,  Ching-Li Yang ,  Chien-Yang Chen ,  Hui-Ling Chen ,  Guan-Kai Huang

IPC: H01L23/00 ,  H01L21/768 ,  H01L21/78 ,  H01L23/58

CPC classification number: H01L23/562 ,  H01L21/76838 ,  H01L21/78 ,  H01L23/585 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A die seal ring is provided. The die seal ring includes a substrate and a first layer extruding from the substrate. The first layer has a first fin ring structure and a layout of the first fin ring structure has a stamp-like shape. In addition, a method for forming a die seal ring is provided. A substrate having an active region is provided. A patterned sacrificial layer is formed on the substrate. A spacer is formed on the sidewall of the patterned sacrificial layer. The patterned sacrificial layer is removed. The substrate is patterned by using the spacer as a mask, thereby simultaneously forming at least a fin structure of a Fin-FET and a first layer of the die seal ring.

Abstract translation: 提供了模具密封环。 模具密封环包括基材和从基材挤出的第一层。 第一层具有第一鳍环结构，并且第一鳍环结构的布局具有戳状形状。 此外，提供了一种用于形成模具密封环的方法。 提供具有有源区的衬底。 在衬底上形成图案化的牺牲层。 在图案化牺牲层的侧壁上形成间隔物。 图案化的牺牲层被去除。 通过使用间隔物作为掩模对衬底进行构图，从而同时形成Fin-FET的鳍结构和模密封环的第一层。

公开(公告)号：US20140367835A1

公开(公告)日：2014-12-18

申请号：US13921174

申请日：2013-06-18

Applicant: United Microelectronics Corp.

Inventor： Ming-Te Wei ,  Po-Chao Tsao ,  Ching-Li Yang ,  Chien-Yang Chen ,  Hui-Ling Chen ,  Guan-Kai Huang

IPC: H01L23/00 ,  H01L21/78 ,  H01L21/768

CPC classification number: H01L23/562 ,  H01L21/76838 ,  H01L21/78 ,  H01L23/585 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A die seal ring is provided. The die seal ring includes a substrate and a first layer extruding from the substrate. The first layer has a first fin ring structure and a layout of the first fin ring structure has a stamp-like shape. In addition, a method for forming a die seal ring is provided. A substrate having an active region is provided. A patterned sacrificial layer is formed on the substrate. A spacer is formed on the sidewall of the patterned sacrificial layer. The patterned sacrificial layer is removed. The substrate is patterned by using the spacer as a mask, thereby simultaneously forming at least a fin structure of a Fin-FET and a first layer of the die seal ring.

Abstract translation: 提供了模具密封环。 模具密封环包括基材和从基材挤出的第一层。 第一层具有第一鳍环结构，并且第一鳍环结构的布局具有戳状形状。 此外，提供了一种用于形成模具密封环的方法。 提供具有有源区的衬底。 在衬底上形成图案化的牺牲层。 在图案化牺牲层的侧壁上形成间隔物。 图案化的牺牲层被去除。 通过使用间隔物作为掩模对衬底进行构图，从而同时形成Fin-FET的鳍结构和模密封环的第一层。