公开(公告)号：US09624092B1

公开(公告)日：2017-04-18

申请号：US15010426

申请日：2016-01-29

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wei-Hua Fang ,  Kuan-Yu Wang ,  Her-Yi Tang ,  Xuan-Rui Chen

IPC: H01L23/02 ,  H01L23/06 ,  H01L23/34 ,  B81B3/00

CPC classification number: B81C1/00246 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00801 ,  B81C2203/0778

Abstract: A semiconductor structure having micro-electro-mechanical system (MEMS) devices is provided. One of the MEMS devices includes a substrate having a first region and a second region; a membrane structure formed in the first region and positioned correspondingly to a cavity of the substrate; a logic device formed in the second region, and electrically connected to the membrane structure; an interconnection structure formed in the second region, and the interconnection structure formed on the substrate and covering the logic device; and an etching stop layer formed in the second region, and the etching stop layer formed on the interconnection structure and including a nitride layer and a carbon-containing layer formed on the nitride layer. Also, a variation in resonant frequencies of the MEMS devices on the entire wafer is less than 10%.