公开(公告)号：US20190186015A1

公开(公告)日：2019-06-20

申请号：US16283809

申请日：2019-02-24

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Bowan TAO ,  Jie XIONG ,  Fei ZHANG ,  Chaoren LI ,  Xiaohui ZHAO ,  Yanrong LI

IPC: C23C16/46 ,  C23C16/54 ,  C23C16/40 ,  C23C14/56 ,  C23C16/56 ,  C23C14/08 ,  C23C14/24 ,  C23C14/54

CPC classification number: C23C16/46 ,  C23C14/08 ,  C23C14/24 ,  C23C14/541 ,  C23C14/562 ,  C23C16/40 ,  C23C16/545 ,  C23C16/56

Abstract: The invention provides a thin film deposition system and a method, and relates to the field of thin film deposition. The deposition method comprises the following steps: 1) heating metal substrate; carrying out deposition. The method is characterized in the step 1) that a current is conducted into the metal substrate at one end of the growth zone by one electrode, and out of the metal substrate at the other end of the growth zone by the other electrode, so that the metal substrate is heated by the heat emitting of the resistant of the metal substrate itself. According to the method, the quality of the prepared thin film is improved, while the preparation cost of the thin film is reduced. In addition, the consistent double-sided thin films can be easily prepared on two surfaces of the metal substrate by employing the system and method.

公开(公告)号：US20180195907A1

公开(公告)日：2018-07-12

申请号：US15865297

申请日：2018-01-09

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao WANG ,  Jun HU ,  Fei WANG ,  Zezhan ZHANG ,  Jing JIANG ,  Jie XIONG ,  Yueming WANG ,  Tiezhong MA ,  Dong YAN ,  Xueke GOU ,  Ting ZHOU ,  Yi NIU ,  Pei HUANG

IPC: G01J5/08 ,  F01D17/08 ,  G01K1/02

Abstract: A device for measuring surface-temperature of a turbine blade, the device including a probe having a front-end mirror for receiving infrared radiation of a surface on the blade, a collimation lens for refracted the infrared radiation, a PD detector to receive the infrared radiation, and a focal-length servo; and a radial-scanning servo connected to the probe. The front-end mirror, the collimation lens, and PD detector are disposed along the optical axis of the collimation lens. The focal-length servo is adapted to move the collimation lens along the optical axis of the collimation lens. The radial-scanning servo is adapted to move the probe along the optical axis of the collimation lens. The device of the invention is capable of accurately targeting a particular point on the blade having an irregular shape for temperature measurement to accurately detect the temperature distribution on the surface of the blade.

公开(公告)号：US20170191163A1

公开(公告)日：2017-07-06

申请号：US15121045

申请日：2015-04-30

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Bowan TAO ,  Jie XIONG ,  Fei ZHANG ,  Chaoren LI ,  Xiaohui ZHAO ,  Yanrong LI

IPC: C23C16/46 ,  C23C16/56 ,  C23C14/24

CPC classification number: C23C16/46 ,  C23C14/08 ,  C23C14/24 ,  C23C14/541 ,  C23C14/562 ,  C23C16/40 ,  C23C16/545 ,  C23C16/56

Abstract: The invention provides a thin film deposition system and a method, and relates to the field of thin film deposition. The deposition method comprises the following steps: 1) heating metal substrate; carrying out deposition. The method is characterized in the step 1) that a current is conducted into the metal substrate at one end of the growth zone by one electrode, and out of the metal substrate at the other end of the growth zone by the other electrode, so that the metal substrate is heated by the heat emitting of the resistant of the metal substrate itself. According to the method, the quality of the prepared thin film is improved, while the preparation cost of the thin film is reduced. In addition, the consistent double-sided thin films can be easily prepared on two surfaces of the metal substrate by employing the system and method.