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公开(公告)号:US08891585B2
公开(公告)日:2014-11-18
申请号:US13937908
申请日:2013-07-09
发明人: Chih-Wei Huang , Jen-Min Shao , An-Chun Liu
CPC分类号: H05B3/66 , C30B11/005 , C30B35/00 , F27B14/06 , H05B3/03 , Y10T117/10 , Y10T117/1068
摘要: A heating electrode assembly for a crystal growth furnace includes: a heat insulation board unit that is disposed between a furnace wall and a heater, that includes a first surface facing the furnace wall and a second surface facing the heater, and that is formed with a hole extending through the first surface and the second surface; an electrode unit that includes an electricity input portion mounted to the furnace wall, a post portion disposed in the hole, and an abutment flange connecting the post portion and the heater; and an electrical insulating unit including a tubular sleeve that is disposed in the hole and that surrounds the post portion, and a pad that is clamped between the abutment flange and the second surface.
摘要翻译: 一种用于晶体生长炉的加热电极组件包括:设置在炉壁和加热器之间的隔热板单元,其包括面向炉壁的第一表面和面对加热器的第二表面,并且形成有 孔延伸穿过第一表面和第二表面; 电极单元,其包括安装到所述炉壁的电输入部,设置在所述孔中的柱部,以及连接所述柱部和所述加热器的抵接凸缘; 以及电绝缘单元,其包括设置在所述孔中且围绕所述柱部的管状套筒,以及夹持在所述邻接凸缘和所述第二表面之间的垫。