公开(公告)号：US20120305765A1

公开(公告)日：2012-12-06

申请号：US13589461

申请日：2012-08-20

申请人： Ulrike ZEILE ,  Andreas SCHERTEL

发明人： Ulrike ZEILE ,  Andreas SCHERTEL

IPC分类号： H01J37/26

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

摘要翻译： 粒子束装置包括具有至少一个用于接收样本的接收元件的可移动的载体元件，并且其中接收元件位于载体元件上。 在各种实施例中，接收元件可以可拆卸地位于载体元件上和/或多个接收元件可以位于载体元件上，使得载体元件的移动导致多个接收元件在同一移动中的移动 空间方向或围绕同一轴线。 载体元件可以在三个空间方向上移动，该三个空间方向彼此垂直并可围绕平行于粒子束装置的光轴并围绕垂直于光轴定位的第二轴线的第一轴线旋转。 还公开了与样品研究和制备相关的使用粒子束装置的方法。