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公开(公告)号:US12274155B2
公开(公告)日:2025-04-08
申请号:US18402792
申请日:2024-01-03
Applicant: Universal Display Corporation
Inventor: Kent Khuong Nguyen , Sriram Krishnaswami , Daniel Toet , Jeff Hawthorne , William E. Quinn
Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
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公开(公告)号:US11903302B2
公开(公告)日:2024-02-13
申请号:US17549066
申请日:2021-12-13
Applicant: Universal Display Corporation
Inventor: Kent Khuong Nguyen , Sriram Krishnaswami , Daniel Toet , Jeff Hawthorne , William E. Quinn
CPC classification number: H10K71/135 , C23C14/04 , C23C14/228 , C23C14/50 , H10K71/164 , H10K71/191
Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
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