公开(公告)号：US20230269994A1

公开(公告)日：2023-08-24

申请号：US18104353

申请日：2023-02-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Roman KOROTKOV ,  Craig Anthony OUTTEN

IPC: H10K71/13 ,  H01L21/02 ,  H01L21/302

CPC classification number: H10K71/13 ,  H01L21/02123 ,  H01L21/0223 ,  H01L21/302 ,  H10K2102/00

Abstract: Implementations of the disclosed subject matter provide an organic vapor jet print die including a linear array of depositors, with each of the depositors having a cluster of apertures. The organic vapor jet print die may include at least one first aperture in each cluster of apertures is a delivery aperture that is in fluid communication with a carrier gas source and an evaporation oven. At least one second aperture in each cluster of apertures may be an exhaust aperture in fluid communication with a vacuum reservoir with a static pressure lower than that at the apertures. The delivery apertures and exhaust apertures may have a uniformity that is less than 0.4%.

公开(公告)号：US20240052474A1

公开(公告)日：2024-02-15

申请号：US18228892

申请日：2023-08-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Craig Anthony OUTTEN ,  Roman KOROTKOV ,  Seckin GOKALTUN

IPC: C23C14/04

CPC classification number: C23C14/04 ,  H10K71/135

Abstract: Devices suitable for use in OVJP and similar deposition techniques are provided that include multiple delivery apertures that are uncoupled from one another, allowing for more plateau-like deposition profiles. Fabrication techniques for such devices are also provided in which multiple wafers are etched and laminated to one another to form a monolithic depositor block.

公开(公告)号：US20210343942A1

公开(公告)日：2021-11-04

申请号：US17370050

申请日：2021-07-08

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Roman KOROTKOV

IPC: H01L51/00 ,  B05C5/02 ,  H01L51/56 ,  B41J2/14

Abstract: Embodiments of the disclosed subject matter provide a micronozzle array including a linear array having a plurality of depositors connected in series, where a first depositor of the plurality of depositors may border a second depositor on a least one side boundary. The micronozzle array may include plurality of orifice arrays, where a width of each orifice in the plurality of orifice arrays is 20 μm or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel. The micronozzle array may include a plurality of exhaust distribution channels, where the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.

公开(公告)号：US20200235296A1

公开(公告)日：2020-07-23

申请号：US16711476

申请日：2019-12-12

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Roman KOROTKOV

IPC: H01L51/00 ,  H01L51/56 ,  B05C5/02

Abstract: Embodiments of the disclosed subject matter provide a micronozzle array including a linear array having a plurality of depositors connected in series, where a first depositor of the plurality of depositors may border a second depositor on a least one side boundary. The micronozzle array may include plurality of orifice arrays, where a width of each orifice in the plurality of orifice arrays is 20 p.m or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel The micronozzle array may include a plurality of exhaust distribution channels, where the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.