Atomic layer deposition inverted passivated surface acoustic wave sensor for early detection of biofilm growth
    1.
    发明授权
    Atomic layer deposition inverted passivated surface acoustic wave sensor for early detection of biofilm growth 有权
    原子层沉积倒置钝化声表面波传感器,用于早期检测生物膜生长

    公开(公告)号:US09417216B2

    公开(公告)日:2016-08-16

    申请号:US14157094

    申请日:2014-01-16

    摘要: A surface acoustic wave (SAW) biofilm sensor includes a transmitting electric to acoustic wave transducer defining an upper surface and a lower surface, a receiving acoustic wave to electric transducer defining an upper surface and a lower surface, a piezoelectric film layer defining an upper surface and a lower surface, and a passivation film layer defining an upper surface and a lower surface. Portions of the lower surface of the piezoelectric film layer are disposed on the upper surface of the transmitting electric to acoustic wave transducer and on the upper surface of the receiving acoustic wave to electric transducer, and the lower surface of the passivation film layer is disposed on the upper surface of the piezoelectric film layer such that the upper surface of the passivation film layer is configured to enable contact with a biofilm.

    摘要翻译: 表面声波(SAW)生物膜传感器包括限定上表面和下表面的发射电 - 声波换能器,限定上表面和下表面的电传感器的接收声波,限定上表面和下表面的压电膜层 和下表面,以及限定上表面和下表面的钝化膜层。 将压电薄膜层的下表面的一部分设置在发射电声波换能器的上表面上,并将接收声波的上表面设置在电转换器上,将钝化膜层的下表面设置在 压电膜层的上表面使得钝化膜层的上表面被配置为能够与生物膜接触。