Anode shield
    2.
    发明授权

    公开(公告)号:US11545332B1

    公开(公告)日:2023-01-03

    申请号:US16999684

    申请日:2020-08-21

    Abstract: Technology is described for an anode including a substrate, a target, and an anode shield. The substrate including a substrate material includes a first portion with a first cross-sectional dimension, and a second portion with a second cross-sectional dimension greater than the first cross-sectional dimension. The target includes a target material attached to a first surface of the first portion of the substrate. The anode shield includes a shield material attached to a second surface of the second portion of the substrate, and the substrate material differs from the target material and the shield material.

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