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公开(公告)号：US3263319A
公开(公告)日：1966-08-02
申请号：US34804064
申请日：1964-02-28
Applicant: VARIAN ASSOCIATES
Inventor： TIFFT WILLIAM H , MCLAUGHLIN JOHN W , WENDELIN RANDOLPH H , SANDOR MICHAEL J
CPC classification number: C23F1/00 , B21D22/00 , B21D22/201 , B21D33/00 , Y10T29/4981
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