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公开(公告)号：US20240263312A1
公开(公告)日：2024-08-08
申请号：US18107365
申请日：2023-02-08
申请人： VSI Parylene
CPC分类号： C23C16/52 , B23K31/02 , B23K2101/12
摘要： A parylene coating system comprising a single welded reaction and chamber assembly is disclosed, the welded reaction and chamber assembly comprising a reaction zone having a vaporizer and a pyrolysis zone, the vaporizer including a body with one or more openings and a loading door; a deposition chamber for holding one or more specimens and having an inlet, an outlet, a lid, and at least one view port; wherein the pyrolysis zone is positioned between the vaporizer and the deposition chamber and welded at a first end to the vaporizer using a first weldment and at a second, opposing end to the inlet of the chamber using a second weldment. The parylene coating system further comprises a pumping system coupled to the outlet of the chamber and configured to reduce an internal pressure of the assembly to within a target pressure range for parylene deposition.
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公开(公告)号：US20230140950A1
公开(公告)日：2023-05-11
申请号：US17981935
申请日：2022-11-07
申请人： VSI Parylene
IPC分类号： C23C16/455 , C23C16/52 , C23C16/448 , B05D1/00
CPC分类号： C23C16/45561 , C23C16/52 , C23C16/448 , B05D1/60
摘要： A coating system for parylene deposition may include a chamber, a pumping system having a first and a second pump, where a pumping speed of the first and second pumps is based at least in part on an operating pressure; and a controller, the controller configured by machine-readable instructions to control activation of the first pump to initiate a pump down operation of the chamber, determine a cut-in pressure for switching operation from the first to the second pump, monitor an internal pressure of the chamber, switch operation to the second pump based at least in part on determining that the internal pressure of the chamber is at or below the cut-in pressure; and continue, using the second pump, the pump down operation of the deposition chamber until the internal pressure is at or below a target pressure for parylene deposition.
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